High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

MHZ

0.5 MPa Gripping force (N) Gripping force (N) 15 0.5 MPa 0.5 MPa 0.6 MPa 0.5 MPa MHW 150 0.4 MPa 0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.4 MPa 0.3 MPa 0.3 MPa 0.3 MPa MRHQ 100 L 0.2 MPa 0.2 MPa 0.2 MPa 5 Misc. 50 D0 10 20 30 40 50 0 50 100 150 Gripping point L (mm) Gripping point L (mm) 20MHZ2-16D/MHZL2-16D MHZ2-40D 400 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 50 350

3

Additional Weight Ensuring Safety Unit: g Caution 12 13 16 32 20 100 25 100 32 200 40 200 50 350 63 350 Bore size (mm) With arm Rod flange (including mounting bolt) If one side of the piston is pressurized by supplying air with the clamp arm attached, the piston will move vertically while the clamp arm rotates.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

CXT

CXTM (Slide bearing) CXTL (Ball bushing bearing) Max. movable weigh (kg) MXF Allowable static weight (kg) Allowable static weight (kg) Table displacement (mm) Table displacement (mm) Series MXW CXTl12 CXTl16 CXTl20 CXTl25 CXTl32 CXTl40 3 7 12 20 30 50 0.002 0.004 0.007 0.030 0.032 0.025 350 500 900 900 1100 1900 0.015 0.019 0.044 0.180 0.123 0.109 60 70 125 125 140 170 For moving and transporting

CYV

Laser marking Hexagon wrench Features 2 Rodless Cylinder for Vacuum Series CYV How to Order CYV 15 200 Rodless cylinder for vacuum Standard stroke Bore size 15 32 15mm 32mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 Specifications 15 32 Bore size (mm) Atmosphere to 1.3 x 10Pa (ABS) Operating environment pressure Air and inert gases Operating

MHZ

0.5 MPa Gripping force (N) Gripping force (N) 15 0.5 MPa 0.5 MPa 0.6 MPa 0.5 MPa MHW 150 0.4 MPa 0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.4 MPa 0.3 MPa 0.3 MPa 0.3 MPa MRHQ 100 L 0.2 MPa 0.2 MPa 0.2 MPa 5 Misc. 50 D0 10 20 30 40 50 0 50 100 150 Gripping point L (mm) Gripping point L (mm) 20MHZ2-16D/MHZL2-16D MHZ2-40D 400 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 50 350

Tamper Proof and Flat Head Screw

Flow direction symbols on body Flow Rate and Effective Area Meter-out type Meter-in type ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 4, 6 8, 10 1/8 5/32 3/16 1/4 6, 8 6 Metric sizes Symbol JIS symbol 1/4 5/16 3/8 Tubing O.D. 3/16 1/4 Inch sizes 1/4 5/16 3/8 3/8 19.8 flow Flow rate l/min (ANR) {Nl/min} 1200 1300 175 295 350 600 9.1 700 75 500 Controlled (Free) Effective

CYP

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

74.5> R P 3 1 < >: AC Formula L1 = 20n + 8 L2 = 20n + 26 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 48 66 87.5 98 68 86 112.5 123 88 106 137.5 148 108 126 150 160.5 128 146 175 185.5 148 166 187.5 198 168 186 212.5 223 188 206 237.5 248 208 226 250 260.5 228 246 275 285.5 248 266 287.5 298 268 286 312.5 323 288 306 337.5 348 308 326 350

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 43 54 75 85.5 59 70 100 110.5 75 86 112.5 123 91 102 125 135.5 107 118 137.5 148 123 134 162.5 173 139 150 175 185.5 155 166 187.5 198 171 182 212.5 223 187 198 225 235.5 203 214 237.5 248 219 230 250 260.5 235 246 275 285.5 251 262 287.5 298 267 278 300 310.5 283 294 325 335.5 299 310 337.5 348 315 326 350

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (Maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5 362.5 373 22 308.5 326 350

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D side VZS 2-C6, C8 VFS A 2 VS4 B D-sub connector VQ7 10.7 31.5 EVS (Port size: One-touch fitting type) VFN n: Stations L Stations Formula 20n + 21 20n + 30 16 341 350 15 321 330 14 301 310 13 281 290 12 261 270 11 241 250 10 221 230 9 201 210 8 181 190

VZS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D side VZS 2-C6, C8 VFS A 2 VS4 B D-sub connector VQ7 10.7 31.5 EVS (Port size: One-touch fitting type) VFN n: Stations L Stations Formula 20n + 21 20n + 30 16 341 350 15 321 330 14 301 310 13 281 290 12 261 270 11 241 250 10 221 230 9 201 210 8 181 190

KJ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Insertion Force of Series KK T 350 300 VMG 250 Insertion force N Series KK6 200 Series KK4 150 100 Series KK3 Series KK2 50 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Charging pressure MPa Insertion Force of Series KKA 350 KKA6 without check valve KKA6

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Insertion Force of Series KK T 350 300 VMG 250 Insertion force N Series KK6 200 Series KK4 150 100 Series KK3 Series KK2 50 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Charging pressure MPa Insertion Force of Series KKA 350 KKA6 without check valve KKA6

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 12.5 PSIG / 121 in H20 / 300 mbar , 12.5 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width