8

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com P Load impedance Resistance of the load that impedes the current flow. Panel mounting To allow a product to be mounted on a panel in an appealing and secure fashion.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ON-flow 0.01 /2B, 6 11/2B, 21 0 0 0.2 0.4 0.6 0.8 1.0 Pressure (MPa) 1 2 3 4 5 Flow speed (m/s) Precautions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Be sure to read before handling.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set

ZSE1/ISE1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZM ejector system.

VVX31/32/33

Series VVX31/32/33 Construction/Principal Parts Material Port R Port P Port A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option Material Description No.

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. Removes water droplets from air by simply installing in vacuum equipment connection lines.

0.4

-B 40 W 50 L/min 1000 Hz 0.55 0.4 High speed response required for both ON and OFF -E 80 W 100 L/min 650 Hz 0.55 0.55 -F 40 W 100 L/min 550 Hz 0.7 0.55 -J 80 W 150 L/min 600 Hz 0.6 0.75 -K 40 W 150 L/min 500 Hz 0.8 0.75 * Current needs to be limited.

Support Guide/11-LEFG Series

507 630 10 4 600 11-LEFG32-S-550 700 557 680 11-LEFG32-S-600 750 607 730 11-LEFG32-S-650 800 657 780 12 5 750 11-LEFG32-S-700 850 707 830 11-LEFG32-S-750 900 757 880 11-LEFG32-S-800 950 807 930 14 6 900 11LEJS 25ALEC LEC S LEC SS-T LEC Y Motorless LAT LZ LC3F2 529 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG40-S 4 x M8 x 1.25 thread depth 13 60 106 (170) 6H9 (+0.030 0 ) depth 7 58

Air Tank Series AT 1

650 650 1080 1080 1080 1300 1300 1268 1258 1978 2278 1550 2160 2770 2558 3288 1000 945 1340 1340 1100 1550 1650 1700 1700 550 645 740 740 750 750 750 850 850 6 9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C

Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2. Discharge the drainage on a regular basis.

CJ1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Single acting 6-2-4 5, 10, 15, 20 MB MB1 How to Order/Double Acting CA2 CJ1B 4 5 U4 CS1 C76 Applicable tubing Mounting style C85 Tubing material Size O.D. 4 mm 4 mm Basic style B Symbol Bore size 2.5 mm 2.5 mm Polyurethane Soft nylon Bore size 4 C95

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: L (Left Side Parallel), Motor Type: T6 (100W Output, Absolute Encoder), Lead: H (LEFS25, 20mm; LEFS32, 24mm; LEFS40, 30mm), Stroke: 150mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations), Cable Type: S (Standard

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: Left Side Parallel, Motor Type: 100W Output, Absolute Encoder, Lead: LEFS25, 20mm; LEFS32, 24mm; LEFS40, 30mm, Stroke: 150mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Body Bottom, 2 Locations, Cable Type: Standard Cable, Cable Length: 5m,

LEF-OM002xx

Stroke(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 9 - LECP6/LECP1/LECPMJ/JXC91 Horizontal Transfer LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg)

CY1

Example) for CY1S25 650 (1) Maximum load weight = 20kg (2) Load weight for 650st = 13.6kg 13.6 (3) = = 0.68 is the result. 20 Calculation formula for (1) ST: Stroke (mm) Maximum load weight (center of slide block) (kg) Bore size (mm) 6 10 15 20 25 32 40 CY1S6 CY1S10 CY1S15 Model Max. load weight (kg) 1.8 3 7 12 20 30 50 10 (0.861.3x103xST) 3 10 (1.51.3x103xST) = Stroke (max) 1 to 300st

Switches

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Switches Solid State Switches Applicable Actuators Series LXF, LXP, LXS D-F9 Series LJ1 (non-standard motor) D-Y7GL Cannot be mounted on Series LXF with ball screw specification. Auto Switch Specifications Auto switch part no.

VZA200/400

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics (2) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Type of actuation Port size Pilot port size b Cv b C [dm3/(sbar)] Valve model Pilot VHS Body ported Body ported Base mounted Base mounted (With sub-plate) VZA212

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VT VP 3 1 AC DC VG Rated voltage Allowable voltage range Coil insulation Inrush Holding Power consumption DC VP Double solenoid 2 Electrical entry S070 Apparent power AC (Power consumption) VQ Grommet, Grommet terminal, Conduit terminal, DIN terminal

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or

Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maintenance Caution Tube deformation ratio at the minimum bending radius = LD 2d 1 x 100 1.