1 Blow Gun Series VMG K
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H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

Note1) With S coupler plug Note 1) In case of a type with an S coupler plug, specify no symbol (Rc) for the piping connection type. The size is Rc 1/4.

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

Cylinder with Lock Series CLS

200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual -X 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 785

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V (mm/s) = Auto switch operating range (mm) Load operating time (ms) x 1000 Current to operate load (OFF condition) > Leakage current If the condition given in the above formula is not met, it will not reset correctly

Air Cylinder

M8 1.25 M8 1.25 6 7 7 14 18 18 22 26 9 9 40 45 50 65 75 138 144 166 204 212 3.2 3.2 3.2 4.5 70 80 93 501 to 800 42 50 59 76 92 11 11 13 16 601 to 1200 601 to 1200 751 to 1400 751 to 1500 M10 1.25 M12 1.75 M12 1.75 11.5 13.5 13.5 102 116 10 10 116 133 100 6 Bore size Stroke range Without rod boot With rod boot MM N P S X Y RT RY (mm) (mm) H ZZ d e f h L ZZ 40 50 63 80 501 to 800 M14

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

CJP

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5, 10, 15 6-2-14 MB MB1 How to Order/Double Acting CA2 Standard stroke (mm) Rod end thread CS1 5, 10, 15, 20 5, 10, 15, 20, (25), 30 6 10, 15 With thread Without thread Nil B C76 C85 CJP D 10 15 F Without auto switch C95 CDJP D 10 15 F 97 S With auto

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

VCW

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

VN LVC LVA E 21 S LQ2 LVH LVD One nut (including insert bushing) of the nuts is not attached. Please refer to below piping example.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

15

20 0.01 CY1H 100 400 250 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Piston speed [mm/s] CY1F M2 M1, M3 [Graph 13] Allowable moment [Graph 11] Allowable moment CYP 200 200 100 100 Moment M1, M3 [Nm] Moment M2 [Nm] D CY1S25-Z CY1S25-Z E F D10 10 -X 5 5 100 400 250 100 400 350 Technical Data Piston speed [mm/s] Piston speed [mm/s] 1495 CY1S Series Calculation of Guide Load Factor Calculation

NCA1

BB BC F G Bore 500 600 800 Stroke (In inches and hundredths) Standard Oversized rod High temperature Low temperature Oversized W/ high temperature Oversized W/ low temperature Stainless steel piston rod L S R X D Note: Tie rod length varies by mounting style.

Series AK1000

1000 Flow rate (slpm, N2) 0 400 800 1200 1600 2000 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ. 55 High flow (Tied-diaphragm) Single Stage Regulator for General Applications Series AK9200 3/4 inch port size Inlet pressure : Max. 300 psig (2.1 MPa) Flow capacity: to 2000 slpm Body material: 316 SS How to Order Port Number q w e r AK92 02 4PL1212 S 0

ZPT/ZPX

Calculation ZX ZR : Lifting force (N) : Stable vacuum pressure (kPa) : Pad area (cm2) : Factor of safety: Horizontal pad contact : 4 (dynamic) Vertical pad contact : 8 (dynamic) W P S t Pad ZM W = P x S x 0.1 x 1 t W ZH W ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Box type (Built-in silencer) B S 07 ZH 06 06 Body ported type (Without silencer) D S 07 ZH 01 01 01 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com EXH. port size Note) Nozzle diameter Symbol Size Style One-touch One-touch One-touch One-touch One-touch Screw-in Screw-in

Mechanically Jointed Rodless Cylinder Series MY1

MY3M Shock Absorber Specifications Piston Speed 10 16 to 100 Bore size (mm) RB 0806 RB 1007 RB 1412 RB 2015 RB 0805 Model Without stroke adjusting unit 100 to 500 mm/s 100 to 1000 mm/s 100 to 1500 mm/s (2) A unit 2.9 5.9 19.6 58.8 100 to 200 mm/s 100 to 1000 mm/s (1) Max. energy absorption (J) 1.0 Stroke adjusting unit L unit and H unit 6 7 12 15 100 to 1000 mm/s Stroke absorption (mm) 5

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA06 1 262144 (Position control mode) 2000 1200 600 2400 1600 800 3000 2000 1000 Electronic gear denominator *3.

Mechanically Jointed Rodless Cylinders

Piston Speed Standard Stroke Bore size (mm) 16 25 40 63 20 32 50 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) 80 to 500 mm/s Without stroke adjustment unit (MY3A) 80 to 1000 mm/s Without stroke adjustment unit (MY3B) 16, 20, 25 32, 40, 50 63 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400, 1600, 1800, 2000 3000 80 to 1000 mm/s (16, 20 L unit: 80 to 800 mm