CLS

, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 CL 2 (Different sides, Same side), 1 155 170 35 145 CL1 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 170 + 55 35 + 55 145 + 55 MLGC n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Different sides Same side Different sides Same side CNG 110 150 2 35 110 150 100 D-A3 D-G39 D-K39 MNB 150 + 30 (n 2) n = 2, 4, 6, 8

VQ7-6/7-8

P, R port size L R L side R side Cylinder port size 04 06 C12 Rc 1/2 Rc 3/4 One-touch fitting for 12 Note) It is not applicable to One-touch fittings. 03 04 3/8 1/2 Thread type Rc Nil NPTF T G F Replacement Parts (For manifold block) Description Material Qty.

CLK1

4 53 12 6 5 3-Rc 1/8 Unclamp side port 47 45 45 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 102 + Stroke 55 6 Hole: 10H8 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26

Clamp Cylinder with Lock Series CLK1

4 53 12 6 5 3-Rc 1/8 Unclamp side port 47 45 45 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 6 Hole: 10H8 102 + Stroke 55 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26

VQ4000

T kit 12 stations C8 (For 8) C10 (For 10) C12 (For 12) Rc 1/4 Rc 3/8 Rc 1/2 Option 2.24 F kitD-sub connector T kitTerminal block box L kitLead wire S kitSerial transmission VV5Q41VQ400 VQ401 Side L kit Except solenoid valve weight L kit 16 stations VQ4000 Direct exhaust with silencer box S kit 10 stations VQC Rc 1/4 Bottom Note) For details about inch-size One-touch fittings and other

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Large Size Vacuum Module: Series ZR

ZR1-F-D Filter switch unit for replacement 12 Refer to Table (5) on page 944-1. Pilot valve assembly Valve body assembly 6 7 Refer to Table (1) on page 944-1. Note 1) Precautions on handling the filter case 1. The case is made of polycarbonate.

MXW

A F F L = 200 mm F L = 200 mm A L L MX L L = 200 mm MTS A MXW8/12/16 MXW8/12/16 MXW8/12/16 MY 0.03 0.03 0.10 CY MXW12 MXW8 MXW16 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXW12 MXW8 MXW16 0.08 MG MXW12 MXW8 MXW16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

New

U F F G 2 x P 2 x P G Port size Port size DIN terminal A B C D J K Q T I Cable 6 to 12 S 12.5 R 1/4 Exhaust port (44) U F G1/2 E H L G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A< 80 118 23.5 62.5 39 16.5 30 2 136 112 112 78 185 40 Grommet Grommet (with surge voltage suppressor) DIN terminal Model Q R U Q R U 27 20 175 30 20 161.5 VXF24A< R U T 64.5

Cylinder with Lock Series CNS

V Reed switch Solid state switch IC circuit Terminal conduit 5 V, 12 V 12 V 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) Relay, PLC Yes IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 24 V 12 V Grommet IC circuit 5 V, 12 V Water resistant (2-color indication) 12 V IC circuit With diagnostic output (2-color indication)

Series SV

02 12 stations 2 stations 12 One-touch fitting Note 2) Specified layout (Up to 24 solenoids possible.)

Title not found

rodp I isolaEd conmon tpe r l o 2 f 4 l ConVolNET compatibte '| to 12 (24) CANopen compalible + wheD +ecilyns rwo Dr nue opliom list symb.,ls n alphabericaorder Exampe,KN Note 1) Be sue to ndicale the w rng specilicalions In the specilicaton order sheer Note 2) The mounling posion ol lhe name ptaie s on the lop hce of the mvr for dre termnal Nole) P and F ports use th same type of 1 lo 12

Cylinder with Lock

8, 12, 16)2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 70 75 80 85 95 D-A9 n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces

Compact Cylinder Series CQS

A B 32 32 41 44 F 7.5 7.5 9 11 L A B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 200 35 to 200 75 to 200 75 to 300 6 8 7 12 6 8 10 12 25 29 36 40 M4 x 0.7 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 20.5 M3 x 0.5 32 38 47 52 5 6 8 10 15.5 20 3.5 3.5 5.4 5.4 45.5 13.5 25.5 34 M4 x 0.7

VQ7-6/7-8

P, R port size L R L side R side Cylinder port size 04 06 C12 Rc 1/2 Rc 3/4 One-touch fitting for 12 Note) It is not applicable to One-touch fittings. 03 04 3/8 1/2 Thread type Rc Nil NPTF T G F Replacement Parts (For manifold block) Description Material Qty.

RSQ

16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18 10 15 7 24.5 25.5 31.5 28 31 27 17 11 21 15 20 14 18 12 18.5 12.5 15.5 9.5 31.5 32.5 38.5 35 38 34 27 29 26.5 21.5 11 25.5 15 24.5 14 22.5 12 23 12.5 20 9.5 35 36 42 38.5 41.5 37.5 30.5 32.5 30 29.5 4.5 33.5 8.5 32.5 7.5 30.5 5.5 31 6 28 3 41 42 48 44.5 47.5 43.5 36.5 38.5 36 10-8-13 14 Series

Multi-channel Digital Sensor Monitor ( compatible)

0 Differential pressure check mode, pressure range, display unit 33 F 1 Setting of OUT1 39 F 2 Setting of OUT2 42 F 3 Digital filter setting 44 F 4 Auto-preset function 45 F 6 Fine adjustment of display value 47 F10 Sub display setting 48 F11 Display resolution setting 54 F14 Zero cut-off setting 55 F80 Power saving mode 56 F81 Security code 57 F90 Setting of all functions 59 F95 Channel

CY1

M1 = F x L F A F F A L L L Opposite port side Guide central axis (single axis type) Port side For the dual axis type, this is the cylinder's central axis.

MK

Symbol A 11.5 12 B 4.5 4 W 19.5 21.5 W 5.5 6 A 11.5 12 B 4.5 4 A 7.5 8 B 0 0 Hs 17 19 W 1.5(4) 2(4.5) A 7.5 8 B 0 0 12 16 Bore size (mm) D-F9BAL Model Symbol Bore size (mm) A 10.5 11 B 3.5 3 W 14.5 15 Hs 17 19 12 16 4.1-13 Rotary Clamp Cylinder/Heavy Duty Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S A73 20 10 R F Number of auto switches Rotary clamp cylinder S 2 1 Mounting Style

Air Slide Table Series MXW

MXS Width across flats 10 MXQ 6 x M5 x 0.8 thread depth 9 Note) 6H9 + 0.030 0 depth 5.5 (Insert) MXF 7 MXW MXJ 74 36 59 MXP MXY 34 33 125 33 Y Y L MTS 6H9 + 0.030 0 depth 5.5 10 20 20 K A 43 31 23 A 3 Z (N-1) x H G N x M6 x 1 thread depth 12 NN x M6 x 1 thread depth 12 6H9 + 0.030 0 depth 5.5 Bottom through-hole 5.1 HH GG H 7 Bottom through-hole 5.1 F E 6H9 + 0.030 0 depth 5.5 (mm) DE F G