Wedge Cam Operation Provides

Internal Holding Force External Holding Force MHKL2-12C MHKL2-12S 20 15 Holding force (N) Holding force (N) Pressure 0.6MPa 15 Pressure 0.6MPa 10 0.5MPa 0.5MPa 10 F F 0.4MPa 0.4MPa 5 5 0.3MPa 0.3MPa Note) In case of single acting type, the value is for stroke center. 0 0 10 20 30 40 50 10 20 30 40 50 10 20 30 40 50 Holding point L(mm) Holding point L(mm) MHKL2-16S MHKL2-16C External hold

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

F . Bponse time 1.zms .LeadwiE Oil pr@f vinyl, 63.4, 0.008 in.'? 2 wne (Red Black),20 inx . lmpacl rAislance " 30G . tNularion Esistance 50m or more under the lest voltag 500VDC (BeMen case and cable) . Wirhsland vohaSe 1500VAC 1 min (BeMeen .6e and cabls) . Amb enl lenpralur 10 60'C 04'l4O"F) . Prol*lion slruciure.

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F . Bponse time 1.zms .LeadwiE Oil pr@f vinyl, 63.4, 0.008 in.'? 2 wne (Red Black),20 inx . lmpacl rAislance " 30G . tNularion Esistance 50m or more under the lest voltag 500VDC (BeMen case and cable) . Wirhsland vohaSe 1500VAC 1 min (BeMeen .6e and cabls) . Amb enl lenpralur 10 60'C 04'l4O"F) . Prol*lion slruciure.

High Power Cylinder Series RHC

thread NC E E NA B WH 10 FT H2 10 A K F N JC JD N S + Stroke F H ZZ + Stroke (mm) H1 GB GA FZ FW FY FX FT FD F E D C B A Bore size (mm) Stroke range (mm) Effective thread length 5 47.5 53.5 68 38 21 51 6 7 16 14.5 10 40.5 32 18 15.5 200 to 700 20 6 49.5 56.5 70 44 27 53 9 7 16 18 12 45.5 36 22 19.5 200 to 700 25 6 51.5 55 72 50 33 55 9 7 19 18 12 51.5 44 22 19.5 200 to 1000 32 8 51.5 56

Cylinder with Lock Series MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46

5 Port Solenoid Valve SY Series

) C8, N9 C10, N11 1 2 M plug connector (M): SY7120-M(-F ) C8, N9 C10, N11 1 2 DIN terminal (D): SY7120-D(-F ) C8, N9 C10, N11 1 2 M8 connector (W0): SY7120-W0(-F ) C8, N9 C10, N11 1 2 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 66 58.5 Max. 10 47.2 31.5 [38.5] 32.1 16.1 36 M8 x1 Approx. 300 (Lead wire length) 42.6 [49.6] 19 Pg7 110 [112.2] 100.2 [102.4] 119.1 120 109.1 95.2

MGC

F (N) Allowable end load F (N) Data MGCL40Stroke -R (Ball busing bearing type) Deflection Y (mm) Deflection Y (mm) St: Stroke (mm) Allowable end load F (N) MGCL50Stroke -R (Ball busing bearing type) St: Stroke (mm) Allowable end load F (N) 8-22-9 10 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60 89 M5 x 0.8 79 10 10 40 12 M6 x

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) A a B C d E F G GA J K M MA MM NA P R S T V W H ZZ D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 44 18 45 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

Refrigerated Air Dryer

point IDFA psi (MPa) Operating pressure 100 (0.7) F (C) Inlet air temperature 100 (37.8) IDFB IDFB F (C) Ambient temperature 100 (37.8) Single-phase 115 VAC [voltage fluctuation 10%] 60 Hz Single-phase 230 VAC [voltage fluctuation 10%] 60 Hz Three-phase 460 VAC [voltage fluctuation 10%] 60 Hz Power supply voltage (frequency) IDH (A) Operating current Note 5) 9 4.5 5.6 3.8 ID (W) Power consumption

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

100

0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value) *1 Silencer exhaust specification The graph shows the

Wedge Cam Operation Gripper Series MHK2

Holding Force MHK2-12D MHK2-12D 25 20 Pressure 0.6MPa Pressure 0.6MPa 20 Holding force N Holding force N 15 0.5MPa 0.5MPa 15 0.4MPa 10 0.4MPa 10 0.3MPa F F 0.3MPa 5 5 0.2MPa 0.2MPa 0 0 1N = 0.2248 lbf = 0.102 kgf 1MPa = 145 psi = 10.2 kgf/cm2 10 20 30 40 10 20 30 40 50 50 Holding point L mm Holding point L mm O. D. holding MHK2 series I.

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

PFxx-OMS0001CN

1]OUT1(29)[F 2]OUT2(47) -23No.PF-OMS0001CN-A <> 1 [P_1][n_1] [] 500 L/min OUT1OUT2[P_2][n_2] [F 1]OUT1(29)[F 2]OUT2(37) 30 (25) -24No.PF-OMS0001CN-A [] 2 [F 0] 2 F99 F1 F0 2 -25No.PF-OMS0001CN-A () () [F 0] [ rEF] [ ANR] 27 [ Uni] 1 [ L] L/min [ oU1] OUT1 [ HYS] [ 1ot] OUT1 [ 1_P] [ 250] 250 L/min(PFMC7501) [ P_1] OUT1 [ 500] 500 L/min(PFMC7102) 29 [F 1] [ 1000] 1000 L/min

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

RHC

75 115 12 308 65 100 391 13 47 3/4 236 41 34 47.3 M26 x 1.5 10 118 90 139 14 330 80 10-6-13 13 Series RHC Dimensions: Rod Side Flange Style 20 to 40 Rc P Rc P GA GB 4-FD H2 NN MM I H1 ND FY FW NC NB NE D Effective thread FT NF E E 10 10 A F K JD N N JC NA S + Stroke F H WH B FX ZZ + Stroke FZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

PF-OMN0009_C

-2No.PF-OMN0009CN-F / 1 1.5 3 3)1 1 () [] -3No.PF-OMN0009CN-F () () () () -4No.PF-OMN0009CN-F () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (), (0~90 )3mPas(3cP)(0~90 ) () <> -5No.PF-OMN0009CN-F * 16 FG (49 N () M8 IN IN OUT OUT OUT OUT IN 40 -6No.PF-OMN0009CN-F * () 6 33 () () 10 m DC(-)() -7No.PF-OMN0009CN-F * ( ) () CE -8No.PF-OMN0009CN-F * 3 * -9No.PF-OMN0009CN-F