CL

6 !7 !8 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

•

,xt2S Y G G Aat Rat with_ril l G G 'G Rat FJat~ ri ZPR40g 4D 43 1 8.5 32 42B 160.6 6 8 6.5 , 3.3 ZPR20~ 20 23 1 4 29 39.8 57.6 5 6 6 4 1.7 zPR25~ 25 28 , . 14 29 39B 57.6 5 6 8 , ZPR5O~ (iO 53 1 95 33 m l61.6 6 . 6 75f i 3 .8 , 4 1.8 ZPR32~ 32 35 14.5 29.5 40.3 sal 5 6 8 4.5 2.3 Deep type (mm) "B E I. F '-1: M6 x1 M:U8xt25 y Model C 0 M G I.. G Deep type (mm) H:M5xO.8 H:t.

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

CNG

PG PH PL S FD FT FX FY FZ XA XB J l ZZ H e f h ZZ 35 182 30 16 55 202 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 0.25 x Stroke 40 198 30 17 62 220 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 5.5 7 60 30 75 3 12 M5 x 0.8 40 201 35 17 62 223 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 6.6 7 60 30 75 3 12 M5 x 0.8 50 227 (236) 35 17 70 247 (256) 6 14 M14 x 1.5 44 1/8 28 2.5 81

Cylinder with Lock Series CNG

S FD FT FX FY FZ XA XB J l 0.25 ZZ 182 H e f h ZZ 202 35 30 16 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 220 198 40 30 17 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 5.5 7 60 30 75 3 12 M5 x 0.8 223 201 40 35 17 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 6.6 7 60 30 75 3 12 M5 x 0.8 247 (256) 227 (236) 50 35 17 70 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

-fl Seies

NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8 5/16" AS321F-02-11 AS321F-03-08 31.8 15.2 41 8 17.9 43.3 21 67 18.5 57 29.5 3/8" 23 20.9 46.5 35.2 40.2 41.5 19 3/8 AS321F-03-07 AS321F-03-10 27.8 43.3 10 13.2 18.5 39.3 17 55 21 59 31.8 1/4" AS321F-03-09 AS321F-03-12 29.5 15.2 41 18.5 57 44.3 12 20.9 46.5 41.5 40.2 35.2 20.9 22 61 32.8 23 5/16" 3/8 AS321F-03-11

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-06SD ASD530F-03-08SD ASD530F-03-10SD ASD530F-03-12SD ASD630F-04-10SD ASD630F-04-12SD 4 9.3 29.4 17.5 12.9 8 9.6 10 4.7 11.7 30.7 31 0.7 27.4 7.8 M5 x 0.8 6 11.6 32.5 20.6 13.7 18 6 11.6 14 38.5 22.9 38.9 13.7 36 12 14.2 11.8 7.2 34.7 1.2 31.6 10.6 R 1/8 8 15.2 15.8 44.8 28.2 38.2 18.5 38 6 12.8 43.5 25.2 17 72 18 8 17 15.2 18.5 15 7.2 46.5 28.2 41.7 40.2 1.2 34.7 11 18.5 R 1/4 74 10 18.5

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

button: White color) 2, 3.2, 4, 6, 8, 10, 12 Inch size (Release button: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS321F-02 AS331F-02 R1/4 AS321F-03 AS331F-03 R3/8 AS421F-04 AS431F-04 R1/2 Note 1) AS121F-M5-02 applicable cylinder bore sizes are 2.5, 4, 6.

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

23 16.2 AS331FG-02-12 AS331FG-N02-07 34.4 55.7 46.9 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 20.6 12.9 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.3 43.3 42.8 37.8 25.2 45 49.5 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 63 18.5 23 19 20.6 12.9 AS331FG-03-08 AS331FG-N02-11 28.2 48 53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 69 21 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-

CG5-S

(mm) Stroke range A Bore size (mm) AL P B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA S ZZ 20 15.5 to 350 1/8 18 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 83 121 25 19.5 to 400 1/8 22 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 83 126.5 32 19.5 to 450 1/8 22 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 85 128.5 40 27

Fieldbus System

Valve Plate EX600-ZMV1 EX600-ZMV2 (Specialized for Series SY) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. 13 Accessories Series EX600 Reinforcing brace This bracket is used on the bottom of the unit at the intermediate position for connecting 6 units or more.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

6 and !7 from the table above. o Head cover Anodized Aluminum alloy !0 Seal kits consist of items !5, !6 and !

Series H, DL, L, LL Self-align Fittings

Weight (g) M L2 L1 A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DT04-01 15 5.7 33 DT04-02 17 19 4 10 19.6 10 23.5 40 DT06-01 14 35 17 10 19.6 23.5 6 DT06-02 16 19 44 14 12 DT06-03 22 70 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 120 DT08-01 18 45 25 8 14 DT08-02 16 21 52 14 12 24.5 DT08-03 22 73 26.5 49 10 17 DT10-02 23 72 14 26.5 DT10-03 17 22 78 DT10-04 27 28.5

Serial Network

: (952) 943-1299 Fax: (952) 943-1614 Austin Phone: (512)926-2646 Fax: (512) 836-1397 Romania Phone: 01-2552625 Fax: 01-2552630 Japan Phone: 03-3502-2740 Fax: 03-3508-2480 Malaysia Phone: 03-56350590 Fax: 03-56350602 Denmark Phone: 70252900 Fax: 70252901 Vancouver Phone: (604) 517-1646 Fax: (604) 517-1647 Nashville Phone: (615) 331-0020 Fax: (615) 331-9950 Boston Phone: (978) 326-3600 Fax:

CM2

(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.