0.4

129 118.5 108 97.5 87 76.5 66 55.5 364.5 354 343.5 333 322.5 312 301.5 291 280.5 270 259.5 249 238.5 228 217.5 207 196.5 186 175.5 165 VFR 387.5 375 375 362.5 350 337.5 325 312.5 300 300 287.5 275 262.5 250 237.5 237.5 225 212.5 200 187.5 398 385.5 385.5 373 360.5 348 335.5 323 310.5 310.5 298 285.5 273 260.5 248 248 235.5 223 210.5 198 VQ7 (L4) (L3) VV5QC21 (5.25) L2 L1 P = 16 38.5 1 1 99

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage Seal material Leakage rate (Water) Note) Fluid temperature (C) Ambient temperature (C) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 1 to 99 20 to 60 EPDM 0.2 cm3/min or less 1 cm3/min or less Note) No freezing External Leakage Seal material Leakage rate (Water) Note) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 0.1

ZSM1-115/121

In case of 1 digit = 1 kPa, it is displayed like 1, 2, 3 . . . 99, 100, with displaying every 1 kPa. Accuracy The maximum difference between the true value and that indicated by an instrument is the measure of the instruments accuracy. It is expressed as a percentage of the full-scale value of the reading according to the type of instrument.

CRB2/CRBU2/CRB1

Do not apply loads to the shaft exceeding the values shown on page 99. Applying loads exceeding the allowable values to the actuator can cause the actuator to malfunction and leading to bodily injury and damage to equipment and machinery.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications Through the adoption of an element that is used exclusively for removing water drops and the provision of ample housing interior space, a 99% water removal rate has been achieved.

REA/REB

D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 32 10 28 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25 to 40 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 18 97 99

Rotary Cylinder Series MRQ Size: 32, 40 1

. + 5 95 (mm) E Mounting screw Y Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

89.5 49 74 39.5 64.5 49 74 39.5 64.5 27.5 27.5 15.5 124 124 25 25 114.5 114.5 24 99 89.5 49 74 39.5 64.5 49 74 39.5 64.5 30 30 15.5 D-B5 D-B6 D-B5 D-B6 125 125 32 32 115.5 115.5 25 100 90.5 50 75 40.5 65.5 50 75 40.5 65.5 33.5 33.5 15.5 129.5 129.5 40 40 117.5 117.5 29.5 104.5 92.5 54.5 79.5 42.5 67.5 54.5 79.5 42.5 67.5 38 38 19 20 20 25.5 100.5 91 50.5 75.5 41 66 50.5 75.5 41 66 27.5 27.5

CQS

Stroke range Stroke range Bore size Bore size Long stroke 31 to 99 31 to 99 12, 16 12, 16 Stroke range 51 to 199 51 to 199 20 20 51 to 299 51 to 299 25 25 Part no.: CQSB25-47D-XB10 Makes 47 stroke tube. B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside. B dimension is 72.5 mm.

MG

CX Dimensions Dimensions DM5 x 0.8 Relief port (Vacuum port) -X 20Data FB B + Stroke A + Stroke 5 10 FB B + Stroke A B Bore size (mm) FB A + Stroke 50 stroke or less 66 67.5 109 109 117.5 117.5 121 141 51 stroke or more 97.5 99 114 114 129 129 148 166 20 25 32 40 50 63 80 100 19 20 22 22 23 23 24 29 Other dimensions are the same as standard type. 66 67.5 71.5 78 83 88 102.5 120 A Over 30

CLQ

117 136 154 50 22 53.5 94 63 135 L1 Rod end nut 135 63 75, 100 MLU Head Side flange style: CLQG/CDLQG ML1C DFV M -X Head Side Flange Style 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range 20FD FT FV FX FZ G L L1 M B A A B 91 36 10 to 50 63 46 101 9 9 80 92 108 38 8 33.5 60 Data 101 46 75, 100 107.5 43.5 10 to 50 80 53.5 117.5 11 11 99

RLQ

Bore size (mm) 32, 40 50, 63 Stroke range (mm) 21 to 99 31 to 99 Stroke range Part no. : RLQB32-47-B A special tube is manufactured for a 47 mm stroke.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Note 2) Only non-magnetic material is permitted as the mounting surface of a 20 cylinder. 25, 32, 40 (mm) Applicable switch model Bore size (mm) D-Z7/Z80/Y59/D-Y7P/Y7W A B C D 25 18 99 43 74 32 21.5 108.5 46.5 83.5 40 23.5 124.5 48.5 99.5 Note 1) 50 mm is the minimum stroke available with 2 auto switches mounted. Note 2) The above dimensions are given as reference dimensions.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model MY3A16 MY3A25 MY3A40 MY3A63 4.0 110 42 30 6.5 7 19 102 4.0 32.5 26 44 43 17.2 8 22.5 M5 x 0.8 Rc, NPT, G1/8 Rc, NPT, G1/4 Rc, NPT, G3/8 6.0 150 62 47 9.0 10 30 138 6.0 47.5 40 64 65 24.0 10 32.0 8.5 240 92 66 14.0 14 40 223 7.5 80.0 60 112 94 37.0 15 46.0 10.0 320 136 99

The FGH is available with a HEPO II element (filtration efficiency 99% or more), or a membrane element (filtration efficiency 99.9% or more). High precision filter for liquids; PTFE element seal; 99% or more filtration efficiency

Fluid: heated water (99°C or less); Max. operating pressure (MPa): 3.0; Effective area (Cv): 0.16 to 2.1; Coil rated voltage: 100, 110, 200, 220, 230VAC (50/60Hz); Ambient temp: -20° to 100°C; Fluid temp: 99°C or less

The FGH is available with a HEPO II element (filtration efficiency 99% or more), or a membrane element (filtration efficiency 99.9% or more). High precision filter for liquids; PTFE element seal; 99% or more filtration efficiency

AFG-D utilizes centrifugal force to effectively separate water from compressed air, achieving 99% water droplet removal. AFG-D modular body style allows it to be installed into existing FRL systems. Size (Flow Capacity): 20 (1000 L/min), 30 (1500 L/min), 40 (4000 L/min); Port size: 1/8" to 3/4"; 99% water droplet removal

Flame resistant, one-touch fitting series KR can be used for a wide range of pressures from a low vacuum up to a pressure of 145 PSI. The use of a special profile ensures positive sealing and reduced resistance when the tube is being inserted. KR fittings are effective when piping in a confined space. The body and threaded portion can turn.Effective when piping is in a confined space, Release