Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn X-axis Xn Z-axis Zn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

Compact Manifold Regulator

rate L/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

EX500

Connector on the output device side M12 connector (5 pins, plug) Enclosure IP67 10 to 50C Operating temperature range Operating humidity range 35 to 85%RH (with no condensation) Environmental resistance Withstand voltage 1500 VAC for 1 min. between external terminals and FG 10 M or more (500 VDC) between external terminals and FG Insulation resistance 10 to 150 Hz with a 0.35 mm amplitude

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

0 5 10 15 Transfer load m (kg) Refer to page 145 for deflection data. 74 Non-standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF(X10) Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side 8H8 depth 8 Body mounting reference plane 130 200 Z section detail Stroke + 150

CLS

8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL 7 7 7 6 6 B D-F5/J5

Air Cylinder

(mm) 40 50 63 80 CA2-B04 CA2-B05 CA2-B06 CA2-B08 CA2-B10 +0.058 0 57 35 11 65 15 85 10 9 17 8 40 52 60 165 10 +0.070 0 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 +0.070 0 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 196 16 +0.084 0 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 100 +0.084 0 93 60 16.5 100 35.5 130 15 13.5 24 12 65 90 116 256 25 10 Series CA2 Dimensions of Accessories

Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

0.4

Purchasing order is available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 32 35 39 43 16 18 32 35 39 43 6 8 10 12 6 8.5 10 20.5 22 20.5 22 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

1.63

D-M9W 10 2 pcs. D-M9WV D-M9AV 5 Note 2) 1 pc. 10 2 pcs. 5 Note 2) 1 pc. D-M9A 10 Note 2) 2 pcs. 5 1 pc. D-M9V 5 2 pcs. 5 1 pc. D-A9V 10 2 pcs. 5 1 pc. D-A9 10 2 pcs. 1 pc. 15 D-P3DWA 2 pcs. 15 Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.

S070

Note) Order is accepted in 10 units. 4-11-4 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 V100 7 SY 12 18 SYJ 2-3.4 mounting hole VK 150 (Lead wire AWG#26) 5 22 6 VZ VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug

3 Port Solenoid Valve

Note) Order is accepted in 10 units. 3 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 7 12 18 2-3.4 Mounting hole 5 150 (lead wire AWG#26) 22 6 20.5 19 3 2 1 9.5 6.5 5.5 4.5 12.3 10 10 25 M3 0.5 3 (EXH) port M3 0.5 1 (SUP) port M3 0.5 2 (OUT) port S070B-C-M3 Plug lead type 0.1 W with power saving circuit 150 (lead

Support Guide/11-LEFG Series

ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit

AIR SLIDE TABLE

16.5 16.5 16.5 16.5 16.5 16.5 24.1 18.1 18.1 25.1 25.1 31.1 50.1 50.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 Solid state auto switch: D-M9M9 A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2

Cylinder with Lock Series CLS

10 10 10 10 RLQ D-A59W 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MLU D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 12 13 7 7.5 8 MLGP D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 ML1C 5 5 5.5 6 6 D-G39/K39 11 11 10 10 10 [Mounting screw set made of stainless steel] Since this is a guideline

Stroke Reading Cylinder and Counter

W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way