Adsorption Plate

less 250 x 250 18 625 or less 282 Body size under 100 to 150 350 or less 300 x 300 20 900 or less 339 20 to 350 under 150 to 200 400 or less 23 Over 900 under 200 to 250 450 or less Order a thickness equal to or greater than that shown on the table.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 3-8H10 depth 5 92 11.5 20 67 90 (T-slot pitch) 45 9.4 62 92 8-6.6 4.5 10 58

Stroke Reading Cylinder and Counter

Series Variations CE1 Series CEP1 Series Standard stroke (mm) Standard stroke (mm) Manufacturable stroke range Manufacturable stroke range Bore size (mm) Bore size (mm) 25 50 75 100 125 150 175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

Electric Actuator / Low profile slider type

30 40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

Air Cylinder

83 73 5 4 20 CDP-7A 100 4 x 36L Polished round 24 88 78 5 4 25 Split pins and flat washers are included.

Booster Regulator/Air Tank

150 500 250 250 824 (mm) Drain port Rc 1/4 A 531 570 494 527 576 B 444 479.8 444 479.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 D Note) 519 543 Booster regulator model VBA20A VBA40A VBA22A VBA42A VBA43A Note) When option G (pressure gauge) is selected 20 38 R S 05 10 R S VBAT A1VBAT A1With safety valve With safety valve Safety valve port Rc 3/8 Safety valve port Rc 3/8 250 A (mm) A 60 130 VBAT05

0.4

or less VQ1200 13 or less 10 or less 0.70 0.15 0.16 0.72 0.25 0.18 Metal seal 13 or less Double VQ1201 20 or less 15 or less 0.85 0.20 0.21 1.0 0.30 0.25 Rubber seal 20 or less VQ1300 40 or less 20 or less 0.68 0.15 0.16 0.72 0.25 0.18 Metal seal 26 or less Closed center VQ1301 47 or less 25 or less 0.70 0.20 0.16 0.65 0.42 0.18 Rubber seal 33 or less VQ1000 VQ1400 40 or less 20 or less

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

20 37.4 66.5 20 16 20 (38) VQ4 The broken line indicate DIN rail mounted style [-D].

MX-OMP0051

30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20 14 14 21 21 27 46 46 MXQ20(A) 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 20.9 21.9 21.9 21.9

MGC

Rc 1/8 20 40.5 70 73 162 25 58 241 14 104 26 55 M8 x 1.25 Rc 1/4 Bracket Mounting Stroke Long Stroke Without Rear Plate Bracket mounting stroke Stroke range (mm) Bore size (mm) Bore size (mm) Bore size (mm) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100 st or more 250 to 400 88 14 119 125 st or more 350 to 500 88 14 131 150 st or more 350 to 600 90 14 136 200 st or more 350 to 800

30

JC63-18-150 0.5 0.5 0.75 1 300 800 1250 3100 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 20 25/32 40 50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 M8 x 1 M10 x 1.5 M10 x 1 M12 x 1.25 M12 x 1.5 M12 x 1.75 M16 x 1.5 M16 x 2 20 25 32 32

Cylinder with Lock

40 9 12 70 90 50 110 95 17 56 20 13 15 12 58 11 Up to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 65 20 18 12 15 58 11 Up to 1000 40 37 102 32 119 139 1/4 1/4 78 25 52 13.5 18 102 130 76 160 123 21 79.5 20 23 18 17 71 13 Up to 1000 40 37 116 41 133 160 1/4 1/4 92 30 52 13.5 18 116 150 92 180 144 21 93.5 22 25 20 19 72 16 With Bellows (mm) (mm) Bore size (mm) 40

CNA

40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 x 1.25 Up to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 M10 x 1.25 Up to 1000 40 37 102 32 119 139 1/4 1/4 78 25 52 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 M12 x 1.75 Up to 1000 40 37 116 41 133 160 1/4 1/4 92 30 52 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 M12 x 1.75 Up to 1000

CNA

40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 x 1.25 Up to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 M10 x 1.25 Up to 1000 40 37 102 32 119 139 1/4 1/4 78 25 52 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 M12 x 1.75 Up to 1000 40 37 116 41 133 160 1/4 1/4 92 30 52 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 M12 x 1.75 Up to 1000

CNA

40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 to 600 MGQ 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 to 750 MGG 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 to 750 (mm) MGC Bore (mm) 40 50 63 80 100 K KA

3 Port Solenoid Valve

Station 3 2 1 D side U side Stations 02 03 2 stations 3 stations 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valve S070 A 5 B G Electrical entry Body type Body type Base mounted with clips Symbol A G C Grommet Plug lead with light/surge voltage suppressor Coil voltage Power consumption Pressure specification Flow rate 24 VDC 12 VDC

CG1

(162) 150 (162) 182 (196) 182 (196) 10 (12) 20 25 32 40 50 63 80 100 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 26 31 38 47 58 72 89 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 12 14 18 25 30 32 40 50 14 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 69 (77) 69 (77) 71 (79) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 8 10 12 16 20 20 25 30 13 17 17 19 27 27

Compact Cylinder with Lock Series CLQ

-50D x 125 L x 140 L x 165 L x 115 L 115 125 140 165 -75D -75D -75D x 150 L x 165 L x 190 L 150 165 190 -100D -100D -100D x 175 L x 190 L x 215 L 175 190 215 819 Series CLQ Construction: 20 to 32 i o !