VZ5000

(Values at the initial period) Solenoid Specifications Option Grommet (G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D) 100, 200, 24, 48, 110, 220 Electrical entry AC 50/60 Hz DC Coil rated voltage (V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Power consumption (W

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CN5 parallel I/O connector CN4 serial I/O connector 150 132 141 CN3 encoder connector CN2 motor power connector CN1 power supply connector 4.6 for body mounting b) DIN rail mounting (LEC6D-) Refer to page 19 for L dimension and part number of DIN rail. (11.5) (81.7) 35 66 1 31 64.2 35 167.3 (When locking DIN rail) 173.2 (When removing DIN rail) 150 132 (91.7) Note) When two or more controllers

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

Electric Actuators

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Table of Contents

Applicable strokes: 150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LG1H2121SC-150-F2-X2 Allowable Moment (Nm) Allowable dynamic moment Allowable static moment LG1H21 Model Mounting orientation Load movement direction Pitching Rolling Yawing 142 79 150 a = 1000 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a 4000 a = 2000 L1 (mm) Pitching Mep m : Transfer load (kg) a

42

Port size 02 1/4 03 3/8 Porting specifications Nil Side ported B Bottom ported Note) Note) For bottom ported, port size is 1/4 only. 451 VQ4000 Series Dimensions: Plug-in Type Conduit terminal 2-position single: VQ410 -l 0 1 2 156 50 23.5 23.5 2 50 90 106 156 Indicator light 11 (12.5) 11 (12.5) 5 3 4(A) port 2(B) port 9 11 4 2 48 38 1 10.5 A B 38 24.6 48 4 2 A 13.5 13.5 2 x 5.6 Mounting hole

Air Cylinder

25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

MB

75 100 125 152 177 202 150 227 50 127 51 25 12.5 25 37.5 89 102 114 75 100 125 152 177 202 150 227 50 139 56 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 50 139 61 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 125 10 75 27 30 120 130 140 20 40 60 80 100 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket

VZ100/300/500

M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.

5 Port Solenoid Valve

Refer to page 643 for replacement method. 02 1/4 03 3/8 Nil Rc N NPT T NPTF F G Note) For bottom ported, port size is 1/4 only. 611 VQC4000 Series Dimensions: Plug-in Type Conduit terminal 0 1 2-position single: VQC410 156 2 50 23.5 23.5 156 2 106 90 50 Indicator light 11 (12.5) 2(B) port 11 (12.5) 4(A) port 5 3 9 11 4 2 48 38 1 10.5 48 38 24.6 A B 4 2 A 13.5 13.5 30 45 2 x 5.6 Mounting hole

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

In the case of MVGQM50-40 st, an interface of 10 mm wide is installed inside of the MVGQ50-50 st, and thus the full length dimension of the body is the same as 50 st. 20, 30, 40, 50, 75, 100 125, 150, 175, 200 25 M L MVGQ 25, 50, 75, 100, 125, 150, 175, 200 M L 32, 40 MVGQ 50, 63 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

Direct Solenoid

oN Opd.tion: 360 it60 131) 130 360 360 130 150 150 r5n 150 1 1 0 150 150 i $'q (46.C) (4.5) 0,177 t'r.5) (10) 0.39,1 ool (5) (5) .) 0346 19.81 0.543 03.31 03.q M6di4 air {lub.i*td d 0ll.16}, .nd non.flflm.blo mn.torlci non{orcs!.

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

C85

With Rod Boot (mm) Item h AM C e f K KK 1 to 50 Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 109 M8 x 1.25 71 84 96 134 159 25 22 10 36 20 8 M10 x 1.25 74 87 99 112 137 162 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

XL

58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum

High Vacuum Angle Valve, XL Series

58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum

13

85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU 1 8 1 8 1 8 6/Rc 6/Rc 6/Rc Body ported type (Without silencer) 48 1.0 1.3 1.5 1.8 2.0 88 ZL 1 8 1 8 1 8 1 8 6/Rc 8/Rc 10/Rc 12/Rc 12/Rc 6/Rc 10/Rc 8/Rc 10/Rc 1 4 1 4 ZY 1 4 3 8 3 8 12/Rc 12/Rc Body