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:YES ALARM JOG SETTING Press the (3)SET key RTN ORIG:Start Select JOG Method of ending JOG Drive Press the (3)SET key Press the (5)MENU key JOG 1 RTN ORIG Done JOG:Move Posn 123.45mm AX IS. TEST Check 1 EXT Inp ON DATA MONITOR AX IS. OK ALARM JOG SETTING Press the (3)SET key Press the (3)SET key 3.

Return to origin instruction 3. Servo is OFF (SVRE output is OFF) 13 WAREA When the electric actuator is within the output range between "W-AREA1 and W-AREA2" of basic parameter, this terminal will be turned ON.

3 o !1 !2 i e t !0 A !3 !2 !1 o i t !0 !3 !2 !1 o i e t !0 A A e u w y q B C P2 P1 OUT IN P1 w y u B q w y u B q P2 OUT C C IN VXD2272/2382/2392 (32A to 50A) VXD2270/2380/2390 (32A to 50A) !4 !5 !3 !1 i t e !2 !0 A r u B y q !3 !2 !1 i t e o !0 A r u B y q w o w C C Operation When the coil !

During 2 value setting Selection of display item Right side 0x044F (1103) 0 R/W Y U8 1 -76No.PS-OMX0002-A Product individual parameters (continued) Data Date Index Sub Access Initial value 1 Parameter storage type (dec) Remarks (dec) index 2 3 Line name 1st letter Y U8 0 Refer to Figure "1st letter (11seg) of Line name communication data". 0x071C (1820) 0 R/W 0x071D (1821) 0 R/W Line name

(NPN) b-v G39 1 e , i,,",, 2-wi," K39 -1 i DiagnostiC Indication I'" 3-~,e (NPN) 1 5V, 12 \ M9NW Relay, PLe 3-w", (PNP) It . ~ .. (2-ColOr indication) 2-~-,"24 V I ( ~ .' Grommet , , 3-wi,.

time Tmin [ms] Shortest positioning time Tmin [ms] 6 86 350 W = 300 W = 400 W = 500 LAT3m-10 120 250 W = 400 W = 500 300 100 5 LAT3m-20 Frequency [cpm] Frequency [cpm] Allowable thrust setting value 150 200 120 250 W = 300 LAT3m-30 4 200 150 200 150 W = 0 W = 100 W = 200 200 150 300 100 W = 0 W = 100 W = 200 3 300 100 600 50 600 50 2 0 0 0 5 10 15 20 25 30 Stroke(Positioning distance) St

4 u e q w !7 t y !5 !8 !3 r i !0 !6 o !1 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Qty. Note Kit no.

SYJ72R is only for manifold use. 4-4-38 39 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Construction q e r t w y q e r t w y N.C. N.O. (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) i i V100 3 (R) 1 (P) 3 (R) 1 (P) SY u u SYJ VK Component Parts Replacement Parts VZ No.

During 2 value setting Selection of display item Right side 0x044F (1103) 0 R/W Y U8 1 -73No.PS-OMV0006-D Product individual parameters (continued) Data Date Index Sub Access Initial value 1 Parameter storage type (dec) Remarks (dec) index 2 3 Line name 1st letter Y U8 0 Refer to Figure "1st letter (11seg) of Line name communication data". 0x071C (1820) 0 R/W 0x071D (1821) 0 R/W Line name

3 !1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

l Y w H w Y w l l " i I I I r r l i | v l l . s o w d ; l w | v w f f Y L : f <.t __ I i i Y f Fw -t wl5uwl sor-;sS sownsot Y r.L. rr 5 r r a r s o s o w l s o w f s o v l , * ; * 1 i ' l , l -1 l a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a MX9IEtr-@EHN+NE_I T l I r I I I I l I o , o o @ o a @ @ @ esrio" ruup @Auto switch See

Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".

127.9 (Max. 132.9) S 31.9 0.5 to 4 L/min 3/8 141.7 102.6 87.5 87.5 (symbol 04) (symbol 03) P 65.9 W 65.9 Nil 35.9 3/8 127.9 (Max. 132.9) S 35.9 2 to 16 L/min (symbol 03) 141.7 102.6 87.5 87.5 (symbol 20) 1/2 P 69.9 (symbol 04) W 69.9 Nil 51 1/2 137.5 (Max. 143.2) S 51 5 to 40 L/min (symbol 04) 151.2 111.5 91.3 91.5 (symbol 40) 3/4 P 95 (symbol 06) W 95 -70No.PF-OMW0004-B Remote

OUT2) 0: 0.05 (sec) 1: 0.1 (sec) 2: 0.5 (sec) 3: 1.0 (sec) 4: 2.0 (sec) 5: 5.0 (sec) 1800 0x0708 0 R/W Digital filter U8 3 Y 0: inS (Instantaneous flow) Measurement mode display screen setting 2000 0x07D0 0 R/W Display mode U8 0 Y 1: AC (Accumulated flow) 2: ioL (IO-Link mode) Resolution setting: only for 1 L, 10 L and 100 L 2010 0x07DA 0 R/W Display resolution U8 0 Y 0: 1000 resolution 1

Set value Remarks index type 2 dec hex 0: MPa 1: kPa 2: kgf/cm2 3: bar 4: Psi 1000 0x03E8 0 R/W Unit (Selection of display unit) U8 0 Y Setting of display unit NorP (Selection of switch output PNP/NPN) U8 1 Y 0: nPn 1: PnP Setting of switch output specification 1001 0x03E9 0 R/W 0: rEd (Constantly red) 1: Grn (Constantly green) 2: 1SoG (OUT1 turns green at ON) 1002 0x03EA 0 R/W CoL (Selection

1 o q %0 y $3 r#3W #1U$1#6Z B A CL MLGC CNA CB @3 !4 %2 !3 $0 @8R #7[ $2 w #0T $7 $9 $5 %1 %3 $6 @1 N@4 !8 @0 !7 !9 @2 @6 $4 CV/MVG B section (Piston guide bushing) A section (Release piston bushing) CXW 100 80 63 50 40 50, 63, 80, 100 CXS @9S CXT !2 !2 MX Description Material Note Component Parts Description Material Note Component Parts MXU No. No.

0 3 port 3 port 7 MPa 7 MPa i i o o PE port 12 port PE port 12 port u y t u t y w w e q e q 1 port 2 port 1 port 2 port r r !0 !0 3 port 3 port Component Parts Description Material Note No.

San=a1+a2+a31 3.11-10 Air Slide Table Series MXS Allowable load: W (N) Fig.1 Overhang: Ln (mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 CL W Mp Mr My W W MLGC L3 A6 W L1 A2 L2 A4 CNA W Mey Mep CB L2 A4 CV/MVG A2 L3 Work mounting coefficient: K Fig.3 CXW Table mounting CXS