3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

Vacuum Unit

Symbol Type Note Nil Without option Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" When R is selected for q, P needs to be selected.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

P R R P R A A A A A 87.2 [91.6] 33 47 44.2 [46.4] 22.1 (DIN 23.3) 43.6 [45.8] B B B B B 2.5 1/8 (P, R port) (Pitch) P = 16 Manual override 21 (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) 48.6 [55.6] + + + + + 33.2 12 20 M5 x 0.8 (A, B port) 24 Max. 13.5 43.5 (Pitch) P = 16 23 L plug connector (L) M plug connector (M) M8 connector (W0) DIN terminal (D)

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

5 Port Air Operated Valve

Base mounted Common EXH 2 to 20 stations 5 (R) , 3 (R) port 1/4 VPA P.1512 VFA330 VPA3 1 (P) port 1/4 VFA5000 VV5FA5-20 4 (A), 2 (B) port Common EXH 2 to 10 stations 5 (R) , 3 (R) port 3/8 1 (P) port 3/8 VFA520 VV5FA5-21 4 (A), 2 (B) port 5 (R) , 3 (R) port 1/2 Common EXH 2 to 15 stations 1 (P) port 1/2 VFA3000 VV5FA3-40 5 (R) , 3 (R) port 1/4 Common EXH 2 to 20 stations VFA340 1 (P) port

3 Port Air Operated Valve Series SYJA300 1

3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

New

E C C R E Water For Air For Medium A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

VEX1

Port 12 (P1), 23 (P2) Port 2 (A) Port1 (P) Port 2 (A) Port 1 (P) Port 3 (R) VEX350/370/390 (Solenoid) Pilot valve a Pilot valve b Port P1, P2 Port 3 (R) Port 2(A) Port 1 (P) VEX 1973 Series VEX3 Specific Product Precautions Be sure to read before handling.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

Fluoropolymer Piping Equipment

reducing LQ1E-T-R 3 4 5 P.905 6 2 Tubing extension union tee reducing LQ1T-T-R 3 4 5 P.906 6 Note) Basic size With reducer 868 Fluoropolymer Fittings Hyper Fittings Tubing O.D.

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Magnetically Coupled Rodless Cylinder

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

Rubber seal 5 Port Solenoid Valve Series SYJ7000

R port thread type Stations Applicable solenoid valve Nil 00F 00N 00T Rc G NPT NPTF 02 2 stations + + 01 C6 C8 01 C6 C8 SYJ720-P port 1/8 : : R P R 15 15 stations SYJ723-R port 1/8 Note) For more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port.

AC Servo Motor Driver (Network card type ）

Zero speed detection ZSP ZSP turns on when the servo motor speed is zero speed (50 r/min) or less. Zero speed can be changed with [Pr. PC07]. OFF level 70 r/min 1) Forward rotation direction 3) 2) 20 r/min (Hysteresis width) ON level 50 r/min [Pr. PC07] Servo motor speed 0 r/min [Pr.

Air Cylinder NCA1 Series

E C I A L R O D T H R E A D X A O P T I O N Thread Form Code M .

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E d R f j Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J 2 x M depth 5 A G H B1 B b 2 x P Port size i DS: DIN terminal DZ: DIN terminal with light 70 CS: Conduit 58.3 51.9 500 R R DN: DIN terminal without connector WN: WN: M12 connector without cable 44.1 34.3 R R [mm] Size Port size P A B B1 C E G H J M 30 1/4, 3/8 21 <22> 57 28.5 89.8 10.5

10

(with surge voltage suppressor) Grommet U U1 U U1 X X X1 X1 300 Q F D D 300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole E C R C R E 1.2 1.2 1.2 1.2 B1 B B1 B 2 x P Port size 2 x P Port size Y W Y W DIN terminal Conduit terminal U U1 U U1 X X X1 X1 Cable 6 to 12 F Q S 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D 34 D G1/2 Q2 F (44) 31.5 32 25 E T E C R C R G1/2 S2 B B1 2 x P Port size