Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

5 Port Air Operated Valve

(B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1 (P) 3(EB) VPA VPA3

Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

90

Note 8) For y (connector type) of the single unit, select L, L, or W.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

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bracket and gauge ootion avarable X43O/X440 on y av4rade w th BEckel (B) and cauge (c) Standard BacKlow mechanism Optional specif ications Symbol Description Applicable Thread type [Ietric thread (M5) Rc NPT G o 02 to 0 2l\rPa setlinq Non-rclieving AF10 to 60.

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

0.4

(D-sub connector) y u @0 i o !

E-P HYREG ® Series VY1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G36-10-01 G46-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

90

Please contact SMC regarding the supply of digital pressure switch with unit conversion function. 794 Precision Regulator IR1000-A/2000-A/3000-A Series How to Order 0 0 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Clean Tubing: Polyolefin Tubing Series TPH

(mm) 2.5 4 6 7.5 9 White (W) Black (B) Red (R) Blue (BU) Yellow (Y) Green (G) Air/Nitrogen gas/Water (Pure water) (1) Fluid Max. operating pressure (at 20C) 1.0 MPa (2) 0.7 MPa (2) Min. bending radius (mm) 25 35 45 55 15 Refer to the burst pressure characteristics curve.

Information

y u u q w e r t q w e r t i i o o !

Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

Color Symbol Symbol Color Black White Red Color Blue Yellow Green BU Y G B W R 15-6-13 Series TRBU Installation on One-touch Fittings Caution Lengths of tubes to be inserted into One-touch fittings are indicated on the outer layer of TRBU tubes.

Air Catch Sensor Series ISA

DC (+) Brown Main circuit of switch Main circuit of switch OUT 1 OUT 2 OUT 3 OUT 4 OUT 5 Load OUT Black + GND VCC NC OUT 6 12 to 24 VDC Max.80 mA DC () Blue L side R side PNP-type open collector DC (+) Brown 12 to 24 VDC Max.80 mA OUT Black + q w e r t y ZSE ISE Load DC () Blue ZSP PS ISA Specific Product Precautions PSE Read before handling.

Free Mount Cylinder Series CU

Note 4) ( ) in column W is the dimensions of D-A93.

SV

a t y Component Parts No.

One-touch Fittings

Symbol Size Tubing connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1