Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

5

141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot brackets.

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPT NPTF G N T F VV3ZA2 031 01 50 Thread type VZA200 01 S Thread type Nil Nil Rc NPT NPTF G Rc NPT NPTF G N T F N T F 1800 Series VZA200/400 3 Port Air Operated Valve Dimensions Body ported : VZA4 2-P-01 Pilot port M5 x 0.8 Mounting hole 2 x 3.4 2 x 3.4 mounting hole (Non-locking

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th the regulalor a a a a a a a a a a a a a a a a a a o a a a r t a a a a a a a o a a AW With digital pressure switch with display fitf"r r.gut"t;f outDut specificalions (tsE30-01-!!

Clean Room Rodless Cylinder Series CYP ø15, ø32

adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

SYA3000/5000/7000

R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1 N NPT Port size Without sub-plate Symbol Applicable series Nil NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 1 4 Port size Without sub-plate Symbol Nil With sub-plate 02 SYA5000 1 4 3 position closed

AR20-B to AR60-B

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

5 Port Air Operated Valve Series SYA3000/5000/7000 1

R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 Symbol Nil Port size Without sub-plate Without sub-plate (Pilot port: Expect RC) 1 4

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.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm

Air Pilot Operated Series NVSA

@nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Air Pilot Operated

@nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

45

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Plug-in Unit

Kit (Terminal block) L Kit (Lead wire) M Kit (Multiple connector) P Kit (Flat ribbon cable) F Kit (D-sub connector) VQC4000 t y !

VS7-6

Also, use AN110-01 for silencer for pilot EXH. VFR VP7 Individual SUP Style An individual SUP spacer (VV72-P-03, 04) mounted on the manifold-block allows each valve to be supplied individually.

Guide Cylinder/Compact Type Series MGC

Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) P Part No.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SJ3000 P 00 SJ3000-01-P(-H) SJ3000-M1-P(-H) SJ3000-00-P(-H) With manual operation of pressure adjustment screw Option 00 01 M1 Pressure gauge, top mounting Pressure gauge, side mounting Without pressure gauge Regulating port P port P Pressure adjustment screw operation Slotted locking type Manual Nil H Pressure gauge, side mounting Without pressure gauge Pressure gauge, top mounting Note)