Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

HRX-OM-R016

HRS 20 A 030 Cooling capacity Option 030 2600W/3200W (50/60Hz) Null None B Earth leakage breaker Cooling method J Automatic water-supply A Air-cooled refrigerator type M Pure water piping W Water-cooled refrigerator type T High-pressure pump mounted W Fixed SI unit(*1) Piping thread type *1 Unit : MPa/ (degree Celsius) Null Rc Power supply F G (PT-G conversion fitting is included) 20 1-phase

LEC-OM069xx

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2. When set to the factory setting (Pn600 = 0), the DRIVERs built-in option has been used.

KG

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

Series VS

4 4 4 4 S T U X Y Z V W PITCH NOTE #2 Q 81 R 49 5.5 S 20.5 I J K L M N 22 O P 52 T 79.5 52.5 48.5 E 58.5 F 108 96.5 87 G 105 H C 9 D 50.5 A 177.5 B 119 26.5 26 41 28 20.5 18 58.5 45.5 64.5 58.5 30.5 20.5 SIZE 3 SIZE 2 SIZE 1 52 34 41 26 52 37 31.5 92 121 97.5 67.5 82.5 69 74 58.5 4 3 64.5 92 112 123.5 13 9 77.5 52 234.5 189.5 142.5 125 36 CC Y 42 2 2 2 Z AA 14 132.5 BB W 43 35 30 X 25 U 1.5

Dual Speed Controller with One-touch Fitting Series ASD 1

9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

ASD

9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

HRX-OM-R005

HRS 20 A 060 Cooling capacity Option 060 4900W/5900W (50/60Hz) Null None B Earth leakage breaker Cooling method J Automatic water-supply A Air-cooled refrigerator type M Pure water piping W Water-cooled refrigerator type W Fixed SI unit(1) 1) Unit : MPa/ (degree Celsius) Piping thread type Null Rc Power supply F G (PT-G conversion fitting is included) 20 1-phase AC200 to 230V(50/60Hz) N NPT

Series 10-, 21- AW-B Filter Regulator

R.

VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

+ 2 M+ * ;* !+ 2 MN+ * WO+ * )( )( 9 >@0 ( ) Light/Surge voltage suppressor ) ( Nil S Z R U * !@ ! -! * ! -! * !@ ! -! * ! -! ;= ,2 H+ % !+ LN+ * LO+ * MO+ * W+ * * !@ ! -! ;= ,2 E # ! -! , C.D 9 G+ , * !, -! + , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !

155

Voltage symbol 24 VDC V100-61-5-05 DC 24 VS R NL LED R 12 VDC V100-61-5-06 DC 12 VS 100 VAC V100-61-4-01 100/110 VS NL: Neon bulb, R: Resister V: Varistor LED: Emitting diode, R: Resister V: Varistor 200 VAC V100-61-4-02 200/220 VS 110 VAC V100-61-4-01 100/110 VS 220 VAC V100-61-4-02 200/220 VS Operating Environment 240 VAC V100-61-4-07 240 VS Caution With Light / Surge Voltage Suppressor

VS7-6

R. Unit/Specifications Air filter (w/auto-drain, w/manual drain) 5m Filtration Regulator 0.05 to 0.85MPa Set press.

VM

POM ZDC Material Note y Description q Description Plunger Valve Metallic plated Cover Gasket u i w e Sub-plate Hexagon socket head plug Valve sheet Valve Spring ZDC Metallic plated POM o Rolled steel r NBR t Stainless steel 5-6-13 Series VM100 Series VM100/Side Ported JIS Symbol 2 port Basic VM120-01-00 VM130-01-00 VM121-01-00 VM131-01-00 Actuator mounting hole 3 port R port (3 port only)

Micro Mist Separator Series AFD20/30/40

N.O. q r w Design Caution 1. Design the system so that the mist separator is installed in a pulsation-free location. The difference between internal and external pressure inside the element should be kept within 0.1 MPa, as exceeding this value could cause damage. e Selection Drain Caution 1. Do not allow air flow that exceeds the rated flow.

Mist Separator Series AFM20/30/40

02 03 04 06 R Flow direction: Right Left AFM20 to 40 N (1) Drain cock with barb fitting: 6 x 4 nylon tubing Float type auto-drain (N.O.) (4) W F (2) AFM30/40 D AFM30/40 Note 1) Drain guide is NPT 1/4 (applicable to AFM30 and 40), and the exhaust port for auto-drain comes with 3/8" Onetouch fitting (applicable to AFM30 and 40).

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Length per roll (m) Tubing material Symbol T Material Symbol TI Material Nylon Soft nylon Polyurethane Nylon Soft nylon Polyurethane Metric size Metric size Symbol 20 20 m (Standard) Length Inch size TS TU TIS TIU Color Nylon Symbol B Symbol B Color Black White Red Blue Yellow Green Clear Color Black Blue White Soft nylon Tubing size Inch size W BU W Size Size Metric size Symbol Symbol R

ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20B-L is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20B-L is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.