3 Port Solenoid Valve Rubber Seal Series SY100 1

(For AC) (Light/Surge voltage suppressor) (Station 1) (Station n) (Station 1) (Station n) A A A A 13 13 8.7 7.7 (Pitch) n-M3 x 0.5 (A port) 12.6 P = 10.5 n-M5 x 0.8 (A port) 12.6 P = 10.5 (Pitch) M3 M5 L plug connector (L) M plug connector (M) 31.7 (For AC) 30.4 (For DC) 15.6 39.1 (For DC) 45.6 (For AC) 40 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 26.4 Other dimensions

3 Port Solenoid Valve Rubber Seal Series SY100

12.6 P = 10.5 (Pitch) M3 M5 L plug connector (L) M plug connector (M) 31.7 (For AC) 30.4 (For DC) 15.6 39.1 (For DC) 45.6 (For AC) 40 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 26.4 Other dimensions are same as grommet type.

Air Slide Table Series MXS

x 8 M5 x 0.8 P M MXS-AS6 (L)-X11 15 26.5 C A 5 16.5 MXS-AS8 (L) MXS8 (L) 7 21.5 8 3 14.6 7 10 M3 x 10 11 M3 x 12 15 26.5 MXS-AS8 (L)-X11 M6 x 1 MXS-AS8 (L)-X12 25 5 36.5 B 20 MXS-AS12 (L) E MXS12 (L) 9.5 12 4 18.5 10 13 M4 x 12 16 M4 x 15 31 M8 x 1 15 30 MXS-AS12 (L)-X11 MXS-AS12 (L)-X12 25 40 D F MXS-AS16 (L) 5 24.5 MXS16 (L) 11 14 5 12 16.5 M5 x 18 19 M5 x 18 37 21 MXS-AS16 (L)-X11 15

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Se ries CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Type 2-Port Solenoid Valve JSXM Series p. 39 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Glossary of Terms Bracket Options p. 23 How to Order p. 39 Flow Rate Characteristics, Common Specifications p. 40 Construction p. 41 Dimensions p. 42 Modular Connection Examples p. 44 Spacer / Spacer with Bracket

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

VQ7-6/7-8

62 B A B A R1 (L 500) Cable with connector R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 Series VQ7-6 Construction DIN Terminal

3 Port Solenoid Valve Metal Seal Series VZ200 1

(M) (D) With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 19.5 14.5 n-M5 x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n +

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(g) R A B A A 29 28 27 26 25 24 23 22 21 20 No. 460.5 448 435.5 423 410.5 398 385.5 373 360.5 348 L dimension R P R P P 82.9 80.6 78.4 76.1 73.9 71.6 69.4 67.1 64.9 62.6 Weight (g) B SY7000 DIN rail dimensions and weight VZ1000-11-4SY3000 SY5000/7000 Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

CNG

m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

I

Proof 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output P I P I N G S P E C I F I C AT I O N S 01 Direct Piping 1/8 PT T1 NPTF 1/8 H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 ISE4 B D W I R I N G S P E C I F I C AT I O N S O P E R AT I N G P R E S S U R E L Grommet Entry 3m Lead 0.6m -0.1 ~ 1MPa L -10 ~ 100KPa DIN R A I L M O U N T I N

21

P(2) P(1) P(1) Note 1) P P P P P P P P P P P P P P P P P P P P P P P P P Note 5) P Basic Foot Rod flange Head flange Integral clevis Single clevis Double clevis Note 3) Note 1) Note 1) P(1) Note 2) P(1) Note 2) P(1) P(1) P(1) Rod trunnion Head trunnion Boss-cut/Basic Boss-cut/Rod flange Boss-cut/Rod trunnion Note 1) Mounting nuts are not attached to the integral clevis, single clevis and

CNG

m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

125

Common external pilot port (VVEX2-2 only) 2 x Port 3(R): 1/4 30.5 2 x 6.5 7.5 A B A B P1 P1 13.5 (For mounting) 98 88.2 11.5 27 P1 P 66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P): 1/4 L1 L2 67.5 Supply from both ends when there are 5 stations or more. 71.6 82.9 (Station n) (Station 1) VVEX2-1 (Internal pilot) 67.5 51.5 A A 37.5 VEX VEX 11 P=31 30 n x Port 2(A): 1/4 R P L Dimensions Formula

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Crack on the back of the belt LES Model Screw size Max. tightening torque [Nm] Length: L [mm] LEYG25M L M5 x 0.8 3.0 40.3 LEYG32M L M5 x 0.8 3.0 50.3 LEPY LEPS L LER Body fixed/Bottom mounting LEH Model Screw size Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M6 x 1.0 5.2 12 LEYG32M L M6 x 1.0 5.2 12 LEY -X5 11LEFS 11LEJS Body fixed/Head side tapped type Model Screw size