Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

Intrinsically Safe Valve

SY5120-L-01-F1 21 22.6 47 4.5 38 16.7 16.6 1.2 22 29 2 x M3 x 0.5 thread depth 3.5 (For mounting bracket) 14.7 2 x 3.2 (For mounting) 65 40 11.6 Insulator: Black () A B Insulator: Red (+) Manual override 16.2 2 x 3.2 (Manifold mounting hole) 36 2 x 1/8" {A(4), B(2) port} (2 x 3.2 mounting hole) (37) 111.8 0.3 mm2 44 (E-type) 14.7 (40.2) (36.7) 40 32.5 20.5 1.55 (32.3) (1.2) 109.1 L (Lead

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF

modular-press-e

Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.

Modular F.R.L. Pressure Control Equipment

Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Modular Design with Uniform Body Style

OUT q (Port size) OUT q (Port size) Port size IN OUT OUT q e OUT w 1/8 Port size IN OUT OUT q e OUT w e Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Dimensions Body type: Standard Body type: Front and back port selectable 2 x P1 2 x P2 2 x P1 2 x P2 B B Center of F.R.L. body C Center of F.R.L

I

Model IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 Bracket P36201023 P36202028 P36203018 Pressure Gauge G33-2-01 G33-4-01 G33-10-01 G43-2-01 G43-4-01 G43-10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !

3 Port Solenoid Valve Metal Seal Series VZ200 1

) 1 2 1 2 DIN terminal: VZ2 5-D(Z)-01 L: VZ2 5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7

IR1000/2000/3000

Diaphragm assembly P53801005 P53802005 Stainless steel, HNBR Valve P53803015 Brass, HNBR Valve P53803016 Brass, HNBR Valve P36202018 P36202018 P36203017 SUS304 Fixed throttle 4.35 x 1 6 x 1 8.31 x 1 HNBR O-ring 2 x 0.6 3.2 x 1 HNBR O-ring JIS B 2401 P16 (1) NBR O-ring 1.7 x 0.85 2.5 x 1 NBR O-ring 2.5 x 1 3 x 1 NBR O-ring 24 x 1.5 39.5 x 2 NBR O-ring 10 x 1.3 JIS B 2401 P11 27.8

Table of Contents

100 x 253 150 x 140 x 446 200 x 170 x 526 280 x 280 x 497 63 x 63 x 191 85 x 85 x 258 120 x 120 x 236 140 x 140 x 383 180 x 170 x 465 63 x 63 x 136 80 x 82 x 170 90 x 90 x 233 140 x 140 x 380 140 x 140 x 490 140 x 140 x 590 80 x 80 x 153 90 x 90 x 216 140 x 140 x 250 140 x 140 x 360 140 x 140 x 460 AFF4B AFF22B AFF37B AFF75B AM150 AM250 AM350 AM550 AM650 AMD150 AMD250 AMD350 AMD450 AMD550

Table of Contents

PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS121F-M3-23 AS121F-M3-01 3.2 7.2 16.1 19.7 26.6 24.1 24 21.5 4 8.4 10.5 7.2 19.7 26.6 24.1 21.5 4 8.4 10.5 10 12.7 5.5 5.5 16.1 24 10 12.7 M3 x 0.5 M3 x 0.5 AS121F-M3-04 AS121F-M3-03 4 9.3 5/32" 9.3 AS121F-M5-23 AS121F-M5-01 1/8" M5 x 0.8 M5 x 0.8 17.3 8.4 17.3 22.1 3.2 22.1 8.4 AS121F-U10/32-23 AS121F-U10/32-01 12.7 1/8" 10-32UNF 10-32UNF 9.6 12.3 7 12.7 25 12.3 28.6 25.8 22.2 8 AS121F-M5

VK300

: VK332-DM5 01 Grommet: VK332-GM5 01 Max.10 68.8 (Bracket) 14 9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting

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3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

15 34 SMC Cover diameter 1.6 Cross section 0.34mm2 R2 R1 5 1 P 3 Manual override 56 48 4 (54.5) 51 45 A, B port 22 16 16 SMC 9 9 9 2.1 PE port M5 X 0.8 (Not applicable to standard.) 18 18 5-Rc(PT)1/8,1/4 (P, A, B, R1, R2 port) 2.1 28 M5 X 0.8 External pilot port (Only external pilot style(R)) 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ215 (R)lYl L plug connector (L): VQZ215 (R)lLl 97.5<98.5

E-P HYREG

Individual external pilot port: P1 M5 (VY1B01-00 only) 93 2 x 5.5 (For mounting) P1 P1 P1 P1 3.5 31 18.5 Port 3(R): 2 x 1/8 Exhaust from the both sides for 6 stations or more. 3.5 L1 L2 P=23.4 17.7 6.5 Common external pilot port: See Note for P1. 2 x M5 (VVEXB-2n-01 only) 22.4 22.4 Blanking plate Port 2(A): n x 1/8 61.5 94 9.5 R A A P1 31 26 19 P 9 8 18.45 P=23.4 29.95 10 25.5 Port 1(P)

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Unified thread (10-32 UNF) NPT N G F AS1200-M3 AS1400-M3 M3 M3 x 0.5 Male thread comes with R thread. AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(G), (H): SYJ54G H -01 1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0