LECP6_C

LED() /P.18 5.CN1: PLC /P.24 6.3 / / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1: /P.11 3. EMG ) SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 / /P.11 3.

LECA6_C

SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4. LED() /P.18 5.CN1: PLC /P.24 6.3 CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1:EMG ) /P.11 3.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Shaft Pattern Sequencing I Applicable shaft type: S, W, Y How to Order F59 B C P D C S 50 90 X RA1 A2 A24 C10 -X6 Built-in magnet Auto switch Nil D None Built-in magnet Refer to page 11-7-13 for the part no. of auto switches.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

Digital Flow Switch

9 Specifications p. 10 Flow Range p. 11 Analog Output p. 11 Pressure Loss p. 11 IN Side Straight Section and Accuracy p. 12 Internal Circuits and Wiring Examples p. 12 Construction: Parts in Contact with Fluid p. 13 Dimensions p. 13 3-Screen Display Digital Flow Monitor PFG300 Series How to Order p. 14 Specifications p. 15 Internal Circuits and Wiring Examples p. 16

MXS Series Air Slide Table

L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

F/ISE

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

CHKD/CHKG

A32 A33 A34 Note 1) Dimensions indicated with an asterisk () in the patterns A1, A2, A18, A20, A22, A31, A32, A33, and A34 are provided in the table below.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

CY1F

0.1 x mcos + msin P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m mv P Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 29) 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax)+ Dynamic moment (ME) Allowable dynamic moment (MEmax

Rotary Table/

P-80 (D) 2nd printing April, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

SMC Electronic Switch Series Variations

Operating humidity range P.3.14-3 Vacuum breaking pressure Full scale Operating indicator light P.3.14-5 P.3.14-4 Voltage resistance Full span Operating pressure range Operating temperature range Operating voltage G W Orifice Gas contact part Wind comparator mode P.3.14-5 P.3.14-3 P Grommet Panel mounting H Z Peak indication part P.3.14-4 PNP output Hysteresis Zero out (Zero

1

MY1B P . 8-11-16 MY1M P . 8-11-40 MY1C P . 8-11-56 MY1H P . 8-11-72 MY1CW P . 8-12-14 MY1MW P . 8-12-14 Stroke adjusting unit For applicable symbol, refer to the table below. Note) For MY1H, the parts are packed together when shipped. Stroke Note) Indicates the stroke prior to mounting the stroke adjusting unit.