Slider Type Ball Screw Drive/11-LEFS Series

L1 [mm] L1 [mm] L1 [mm] L1 [mm] 1000 1000 1000 1000 X LEM 500 500 500 500 LEY 0 0 0 10 20 30 40 50 0 0 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 LEPY LEPS Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 LER Y 400 400 400 400 Mer m LEH 200 200 200 200

Intrinsically Safe Valve

Intrinsically Safe Valve 5 Port Solenoid Valve (Body Ported) (Base Mounted) UL Certified Intrinsically Safe Valve Designed for Use in Intrinsically Safe Environment UL913 & CSA157 Compliant Series 53-SY5000/7000/9000 NC300-C Dimensions Compact, High Flow Compact, High Flow B A L3 Model Dimension L1 L2 L3 53-SY5120-L 53-SY5120-LL 53-SY5120-TT 53-SY7120-L 53-SY7120-LL 53-SY7120-TT 53-SY9120

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

L2 A B L1 L2 14 12 A PA B A B 14 SMC A PA B A B A PA 40 (53) L-side R-side L-side R-side (2n-1/8) D-side D-side 14 34 103 2 103 174.5 (Single) 4n-3/8, 1/2 2, 4 port 94 62 59 17 174.5 (Single) 216.5 (Double) 216.5 (Double) 221.5 216.5 (3 position) 221.5 216.5 (3 position) Bottom ported M12 connector L: Dimensions n: Stations n P, R1, R2 port 2 3 4 5 6 7 8 9 10 1 Formulas L 157 L1 L2 L1 L2

VZS

1/8, C4, C6 Double check spacer 300 Lead wire length (n) Individual SUP spacer (1) (2) Manual override Stations Control unit Pressure unit D side Outlet for check Control unit 140 n: Stations L Stations Formula 17n + 19 17n + 144.5 17n + 164.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 70 87 104 121 138 155 172 189 206 223 240 257 274 291 308 325 342 359 376 393 410 427 L1

Plug-in/Plug Lead: Single Unit

= 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) L n Dimensions 2 158 178 9 445 465 2 158 178 9 445 465 3 199 219 10 486 506 3 199 219 10 486 506 4 240 260 11 527 547 4 240 260 11 527 547 5 281 301 12 568 588 5 281 301 12 568 588 6 322 342 6 322 342 7 363 383 7 363 383 8 404 424 L1 L2 8 404 424 L1 L2 2-6-37

VZ1000

19 398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Manifold Specifications

19 398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Digital Gap Checker

Checker ISA3 Series Dimensions ISA3-mmm-mmmB-L1 (With control unit) L1 (23) 57 30 58.5 41.6 46.2 1.6 3.5 12 11 66 H 5.5 40.4 29 24 16 64.4 (Max. 67.4) 24 3.1 33 52.5 30 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 2 38 13 L2 (49) ISA3-mmm-mmmB-R1m ISA3-mmm-mmmB-R2m 29.3 L1 46.2 41.6 58.5 30 30 52.5 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

Table of Contents

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data L2 L1 2.

Title not found

P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No.

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

S070

(MPa) 0.1 0.3 0.3 0.5 0.1 0.3 Cv factor Symbol 0.021 0.011 0.021 0.011 0.011 0.006 A B C D E Note) 0.35 0.5 0.1 (With power saving circuit) F Note) Note) An option only applicable to 24 VDC plug lead type. 4-11-8 9 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Base mounted manifold/Stacking base SS073A01 02Stations C V100 SY L2 0.1 W with power saving circuit SYJ L1

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

L2 L3 Common SUP, Individual EXH/Top Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (Non-locking) 2-Rc 1/8 1(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8

3 Port Solenoid Valve Series VQ100 1

M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) M plug connector (M) (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 56 Indicator light 59.5<64.5> 300 66<71> Indicator light (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 50 P R 3 1 P R 3 1 < >: AC < >: AC Formula L1 = 10.5n + 9.5 L2 = 10.5n + 22.5 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

12 13 14 15 16 17 18 19 20 41 54 75 85.5 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 83 96 125 135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 156.5 169.5 200 210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250 260.5 219.5 232.5 262.5 273 51.5 64.5 87.5 98 L1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

S070

1.8 18 5 23.5 21 P = 7.2 11 22 3.5 3.5 VK 8 VZ R1.7 7 25.5 3.4 28.5 VT 3.5 150 (Lead wire AWG#26) 27 VP 5 150 (Lead wire AWG#26) ~ = VG 3.5 VP ~ = ~ = S070 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2 = n x 7.2 +