End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

C95

85 70 60 25 D-F5/J5 1 10 2 (On different faces or same face) 15 130 125 120 95 75 70 25 D-F5NTL 1 10 D-F5 W D-J59W D-F5BAL D-F5 F D-F5LF 2 (On different faces or same face) 15 130 125 120 90 75 70 25 10 1 Auto Switch Mounting Position and Mounting Height Reed switch Solid state switch Auto Switch Mounting Position Auto Switch Mounting Height D-F5, D-J5 D-F5 W, D-J59W D-F5BAL, D-F5NTL D-A5

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement CRB2 MSQB70 MSQB100 CRBU2 80 80 70 70 CRB1 Displacement m Displacement m 60 60 50 50 MSU 40 40 CRJ 30 30 20 20 CRA1 10 10 CRQ2 18 16 14 12 8 6 4 10 2 0 8 6 4 12 10 2 0 Load Nm Load Nm MSQ MSQB200 MSZ 90 80 CRQ2X MSQX Displacement m 70 60 MRQ 50 40 30 20 10 30 25 20 15 10 5 0 Load Nm Rotation Accuracy: Displacement Values at 180 (Reference values) Rotating amount of table

MXQ

Tightening Torque 6 8 12 16 20 25 D-A9/A9V D-M9/M9V D-F9W/F9WV 4.5 5 6 7 8 9 2 (2.5) 2.5 (2.5) 3 (3) 4 (3) 6 (3.5) 6 (3.5) Use a torque of approximately 0.05 to 0.1 Nm. As a guide, it can be tightened about 90 past the position at which tightening can be felt. Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Required fluid volume for extension (l/min) Required fluid volume for retraction (l/min) Bore size (cm) Piston rod diameter (cm) Piston speed (mm/s) Q: Q: D: d: : Q = D __ 4 6 _ 1000 .. Formula (1) Q = (D d) __ 4 6 _ 1000 .

LEC-OM069xx

Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * *

AS

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Mass (g) Mass (g) M1 d M1 L2 D2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 4.5 5.2 38 39.2 48.7 40.7 40.7 50 52.2 52.2 54.4 59.8 4.5 5.2 6.2 5.2 6.3 6.7 8.1 8.4 9.3

1.1

IDF-TR4000-6 440, 460 VAC (50 Hz) 440 to 500 VAC (60 Hz) IDF-TR4000-7 HRG005IDF-TR7000-8 IDF-TR14000-8 IDF-TR18000-8 7 kVA 220, 240, 380, 400, 415, 440 VAC (50/60 Hz) 3-phase double HRG01014 kVA 200 VAC (50/60 Hz) HRG01518 kVA IDF-TR1700-5 IDF-TR1700-6/7 39 Cable hole Terminal block 243 183 Terminal block 295 259 200 220 30 205 10 15 220 270 160 15 4 x 8 4 x 10 250 290 190 IDF-TR-5/6/7 Terminal

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

Air Fittings & Tubing

A B Effective area (mm2) Weight (g) M-5ALN-4 M-5ALU-3, -4 C D 13 15 12.5 13.3 15.3 9 11 8.5 9.3 11.3 5 7 4.5 5 7 1.8 2.5 1.6 1.8 2.5 1.4 2.4 1.1 1.4 2.4 M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 4.0 4.4 4.0 4.1 4.5 SM5B, #6 to #10 M-5ALN-6 M-5ALU-6 Barb elbow for nylon tube: M-5ALHN-4, -6 Barb elbow for soft tube: M-5ALHU-3, -4, -6 C D Part No.

Title not found

rection: Bighl to lefl G D splay units for product name pate and presslrr gauge:PS , 'F AR1010 60.

Pilot Operated

N.O. 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz 1 2 3 VXD21 VXD22 VXD23 Symbol Nil 2 Valve Symbol Nil 2 Valve N.C. N.O.

Title not found

) AC servo motor (S6) 200 to 230 VAC 50/60 Hz AC servo motor (S7) AC servo motor (S8) Dimensions (mm) LECSAm 40 135 2 x 6 Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1

5 Port Solenoid Valve Series SV1000/2000/3000/4000

SJ U side SY D D D D D D SV 3 2 1 Stations SYJ SZ D side How to Order Valve VP4 Note) SV 1 1 0 0 F 5 S0700 Note) Available with manifold block for station additions. Refer to pages 429 and 433. Series VQ 1 2 3 4 SV1000 SV2000 SV3000 SV4000 VQ4 Rated voltage VQ5 Made to Order Type of actuation 5 6 24 VDC 12 VDC Main valve fluoro rubber (Refer to page 448.)

Slider Type Ball Screw Drive/11-LEFS Series

( ) 5H9 depth 5 +0.030 0 n x 5.5 6 60 150 D x 150 (= E) B 15 15 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering.

Compact Cylinder

D-A90, A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch Weight OUT ( ) Blue Unit: g Model D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V D-A93, A93V 0.5 6 6 6 6 8 8 Lead wire length (m) LED Brown OUT (+) Brown 3 30 30 30 30 41 41 Contact protection box CD-P11 CD-P12 Resistor Dimensions Unit: mm Reed switch Zener diode D-A90/D-A93/D-A96 OUT () Blue 2 2.8 4.5 Blue 2.7 4 24.5 (22

Rotary Table/

Auto Switch Internal Circuits D-A90V OUT () Brown Contact protection box CD-P11 CD-P12 Auto Switch Weights Reed switch (g) OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length 0.5m 6 6 6 6 8 8 Lead wire length 3m 30 30 30 30 41 41 D-A93V LED Auto Switch Dimensions Brown (Red) Contact protection box OUT (+) Brown Resistor Reed switch D-A90, D-A93, D-A96 Zener diode CD-P11