CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Hs Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 30 72.5 73

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Hs Hs Ht Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 72.5 73 30

Battery-less

D-G

Dual Rod Cylinder Series CXSJ/CXS

Bore size Operating Range B D (mm) 6 5 10 6 15 6 20 7.5 25 8 32 9 D-A9, D-A9V D-M9, D-M9V D-M9A, D-M9AV D-M9W, D-M9WV 2.5 3 3.5 4.5 4.5 5 The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

Stability of suction position,

ZP3EU-YF4JB10 [Weight: 430 g] ZP3EU-YF4JB30 [Weight: 461 g] ZP3EU-YF4JB50 [Weight: 486 g] Width across flats 17 Width across flats 30 Width across flats 17 Width across flats 30 Bushing Bushing 50 8 8 8 8 50 A B Bushing Bushing M22 x 1.5 M22 x 1.5 B A D-D D-D Rc1/8 Rc1/8 22 22 D D D D 26 26 32 32 11 11 42 42 19 19 4 4 11.11) 11.11) 30 (Rotating angle) 30 (Rotating angle) 50 61 Dimensions

V100

) (D, Y) VS N.C.

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

MY1

Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y59A, D-Y69A D-Y59A D-Y69A D-Y7P D-Y7PV D-Y59B D-Y69B Auto switch model no.

NCG/CG1

H7BAL Hs ~ = Auto switch Hs ~ = Auto switch D-C7, D-C8 A 30 30 31 35.5 43 43 D-C73C, D-C80C D-B5, D-B6 D-B59W Bore size (mm) B 28.5 28.5 29.5 32.5 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 A 30 30 31 35.5 43 43 B 28.5 28.5 29.5 32.5 40.5 40.5 B 22.5 22.5 23.5 26.5 34.5 34.5 B 25.5 25.5 26.5 29.5 37.5 37.5 Hs 27 29.5 33 37.5 43 50 A Hs 27 30 33.5 38 43.5 50.5 A 27 27 28 32.5 40 40 Hs 27.5 30

Air Cylinder

10 7.5 15 27 39 0.5 16 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 D-A9lV 10 7.5 7.5 15 27 39 0.5 16 7 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 Rail mounting D-F7l/F7lV D-J79/J79C D-A7lH/A80H D-A73C/A80C 10 10.5 10.5 18 30 42 3.5 16 10 10 18.5 30.5 42.5 48.5 72.5 90.5 102.5 4 D-F7lW/J79W D-F7lWV/F79F D-F7BA/F7BAV 10 10.5 18 30 42 3.5 16 10 18.5 30.5 42.5 48.5 72.5 90.5 102.5 4 D-F7NT 10 15.5

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

ZP

Width across flats 12 r Buffer stroke t Vacuum inlet y Connection thread D C B 10 86 52 23 20 124 62 51 30 134 72 40 170 82 77 50 180 92 Width across flats 7 10 41 25 2.5 6 M10 x 1 14 3 10 87 53 23 20 125 63 51 30 135 73 40 171 83 77 50 181 93 N4 N6 U4 U6 A10 N S U F GN GS 16 42 26 E2 J K ZP Y D 10 93 59 23 Construction p. 118 14 3 20 131 69 51 30 141 79 40 177 89 77 50 187 99 25 48 30 3.5

Electric Actuator

Size Order no. 22 16 25 32 LE-D-2-1 LE-D-2-2 LE-D-2-3 $1 Component Parts No. Description Description Note 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 No.

CJ2

/C80, D-C73C/C80C D-A7/A80, D-A7H/A80H, D-A73C/A80C, D-A79W D-F7/J79, D-F7V, D-J79C, D-F7W/J79W, D-F7WV, D-F7BAL, D-F79F , D-F7NTL, D-F7BAVL Reed switch D-H7, D-H7C, D-H7W, D-H7BAL, D-H7NF Solid state switch 6-3-1 2 Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 6, 10, 16 How to Order Bore size 6 10 16 Standard stroke (mm) 6 10 16 6 mm 10 mm 16 mm 15, 30, 45, 60 15, 30

24

With head end lock D-M9 D-M9V D-M9W D-M9WV D-Z7 D-Z80 D-Y59 D-Y69 D-M9A D-M9AV D-A9 D-A9V D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA Auto switch Auto Switch Proper Mounting Position [mm] *1 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV D-Y7BA *1 D-A9 D-A9V *3, *4 D-P3DWA *2 D-P4DW Bore size A B A B A B A B A B 20 9 38 5 34 4 33 25 9.5 38 5.5 34 4.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

66 50.5 75.5 41 66 30 30 16 125.5 125.5 D-G5NTL D-G59F D-G5NTL D-G59F 32 32 117 117 26.5 101.5 92 51.5 76.5 42 67 51.5 76.5 42 67 33.5 33.5 17 126.5 126.5 40 40 119 119 31 106 94 56 81 44 69 56 81 44 69 38 38 19 131 131 20 20 27 102 92.5 52 77 42.5 67.5 52 77 42.5 67.5 27.5 27.5 17.5 25 25 27 102 92.5 52 77 42.5 67.5 52 77 42.5 67.5 30 30 127 127 17.5 117.5 117.5 D-B59W D-B59W 32 32 28 103

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

D LEC-CSNA-1 11.1 Product no.

LJ1H

Limit switch 10 20 30 None B contact specification 2 pcs.

Vacuum Pad

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E

Vacuum Pad

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E