Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

SYJ300/500/700

F Nil Rc G N T NPT NPTF Brackets are not installed.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Standard length is 300 mm, but the following lengths are also available.

MG

111.5 23 19 240 M14 55.5 56 62 WA S T U VA VB WB Bore size (mm) X YY YL Z Over 25 st to 100 st Over 300 st Over 100 st to 200 st 200 Over 200 st to 300 st 42 Over 25 st to 100 st Over 300 st Over 100 st to 200 st 128 Over 200 st to 300 st 25 st or less 25 st or less 80 100 M12 x 1.75 24 28 100 198 156 180 140 28 52 54 75 128 300 92 178 M14 x 2.0 28 11 124 236 188 210 166 48 72 35 47 90 148

5-Port Solenoid Valve

9 y t @0 u Lead wire color Terminal no.

Compact

LAT LZ LC3F2 177 Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32 Caution E-MY16 E-MY25 LEM25 LEM32 LEM series E-MY series How to Order 25 LEMB 300 T S q w e r t y !

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

Environment

Cycle time: T can be found from the following equation. Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

AC Servo Motor Driver (Network card type ）

Actual speed t New set-point (bit 4) t Target position (set-point) t Profile velocity t Current target position processed t Set-point acknowledge (bit 12) t Target reached (bit 10) t (5) Set of set-points After the current positioning operation is completed, the next positioning is started.

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

0.55

X505 [IP65 compatible] [IP65 compatible] [IP65 compatible] Manual override Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (length 300 mm) M: With lead wire (length 300 mm) D: With connector Y: With connector T: Conduit terminal LN: Without lead wire MN: Without lead wire Light

Table of Contents

520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57

Air Cylinder Series CM2

Up to 400 6.8 3.2 102 131 133 142 to 400 Up to 300 Up to 300 4 4 8 7 9 9 41 111 19 10 9 40 37 60 75 30 14 10 40 40 60 40 112 120 122 47 28 40 55 20 25 6.8 3.2 102 135 Up to 300 Up to 450 137 146 to 450 Up to 300 Up to 300 4 4 8 7 9 9 41 113 19 10 9 40 37 60 75 30 14 10 40 40 60 40 114 122 124 47 28 40 55 20 25 6.8 3.2 104 137 Up to 300 Up to 450 139 148 to 450 Up to 300 Up to 300 5 4 7

Electric Actuator

LEFB32;T-300; LEFB32;T-500; LEFB32;T-600; LEFB32;T-700; LEFB32;T-800; LEFB32;T-900; LEFB32;T-1000; LEFB32;T-1200; LEFB32;T-1500; LEFB32;T-1800; LEFB32;T-2000; 306 506 606 706 806 906 1006 1206 1506 1806 2006 32 Series LEF Electric Actuator/ Specific Product Precautions 1 Be sure to read before handling.

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

SYJ3000/5000/7000

Standard length is 300 mm, but the following lengths are also available.

MGP

300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38 42 35 50 to 124st 45 46 48 50 54 47 125

Electric Actuator

T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] 300 0.5300(0.06 + 0.06) 300 T2 = = = 0.94 [s] L 0.5V(T1 + T3) V T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

NCQ8

300 350 400 NCDQ8BZ150-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8BZ200-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8BZ250-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8BZ300-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8BZ400-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC-1 3/8 1 1/2 1

JXCx-OMT0023

1200 470(423 to 517) [Unit: mm] Model D H T E (Note)L d W D T Max.