Pressure Range: -100 kPa, Output Specifications: PNP, Open Collector Output, Sensor: External Sensor Type, Mounting: Panel Mounting, Protective Cover: w/Protective Cover, Made to Order: -

Pressure Range: 0.9 MPa, Output Specifications: NPN, Open Collector Output, Sensor: External Sensor Type, Mounting: Panel Mounting, Protective Cover: w/Protective Cover, Made to Order: -

Pressure Range: 3 (0.5 MPa), Output Specifications: 1 (PNP, Open Collector Output), Sensor: 1 (External Sensor Type), Mounting: A (Panel Mounting), Protective Cover: B (w/Protective Cover)

Pressure Range: 5 (0.9 MPa), Output Specifications: 1 (PNP, Open Collector Output), Sensor: 1 (External Sensor Type), Mounting: A (Panel Mounting), Protective Cover: B (w/Protective Cover)

Pressure Range: 9 (-100 kPa), Output Specifications: 1 (PNP, Open Collector Output), Sensor: 1 (External Sensor Type), Mounting: A (Panel Mounting), Protective Cover: B (w/Protective Cover)

Pressure Range: 5 (0.9 MPa), Output Specifications: 0 (NPN, Open Collector Output), Sensor: 1 (External Sensor Type), Mounting: A (Panel Mounting), Protective Cover: B (w/Protective Cover)

Regulator, Pressure Boosting Valve: Controller, Pressure Range: 0.1 MPa, Output Specification: PNP open collector output, Sensor: External sensor type, Mounting specification: Panel mount, Protective cover: With protective cover

EXxx-OMW0014CN

IO-Link DI DO StandardIO StandardIO 2 0x00 . 9-4 X0 X1 X2 X3 IO-Link 1 2 3 4 IO-Link 2 (I/Q) Bit 1 Bit 3 Bit 5 Bit 7 EX245-LA1 (EX245-LB1 0) 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DO 2 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DI() 9.5.

PFxx-OMA1007

Input 22 ITV control pressure measurement value [high byte] UnitkPa 23 ITV control pressure measurement value [low byte] 24 ITV diagnostic data [high byte] 25 ITV diagnostic data [low byte] Air Management Hub internal error 2 Air Management Hub internal error 1 Port 3 short circuit VP short circuit 26 Reserved 27 ITV-PQI 28 Port 4 PQI Isolation input signal (Port 3) Standby input signal X2

JXCx-OMU0026

Axis 2 (Y axis) Axis 2 (Y axis) Relative target position (X2, Y2) Relative target position (X2, Y2) CIR-R CIR-L CIR-3 Relative Centre coordinate (Xc, Yc) Relative transit position (X3, Y3) Composite speed Note1) Composite speed Note1) Composite speed Note1) Current position (X1, Y1) Current position (X1, Y1) Axis 1 (X axis) Axis 1 (X axis) Note1) Composite speed varies from approx. 0.7 to

Fieldbus system PROFINET compatible SI Unit

Table. 9-4 Connector allocation and the process data Note Connector position Connector designation X0 X1 X2 X3 IO-Link port number 1 2 3 4 Available when the IO-Link device sub-module is configured.

Title not found

not shown X21/2 not shown X2 x 5 Five Branches X3 X3 x 5 Five Branches X4 X8 X6 not shown 15 32 1 5 16 Parallel Run Combinations 1 5 16 7 16 Dia.

Table of Contents

S X2 Thread Option Proper coating range X2 With electroless nickel plated Proper thickness With thread seal Nil S Without seal With seal Note) With gasket for all of M3, M5 and M6 threads.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

PerU VVZR3OCJO.21A+X2 EX300-IB1-AB EX3OO-IE1-AB o.,scrlptlon O-sub cable with connectors on both ends Input Base Unit Input Expander Unit Series NVFR2000:Base Mounted Type Construction/Parts List NVFR2100 NVFR2200 2 position single 2 position double ~~lll1lF P B EB PE EA A P B EB PE 3 position Closed center/Exhaust center/Pressure center Closed center/NVFR2300 GSAlI!!

CEx-OMI0064

UP/DOWN X1 X2 X4 X4 4 SEL. UP DOWN SEL. (4) FUNC. FUNC. 1 LEFT/RIGH UP/DOWN SEL. SEL. (5) FUNC. FUNC. LEFT/RIGH SET SEL. SET FUNC. FUNC. FUNC. FUNC. -2 SEL. UP LEFT/RIGH OFFSET SEL. UP/DOWN SET SEL. 17 - DOWN -3 FUNC. FUNC. FUNC. FUNC. SEL. LEFT/RIGH STOP SEL. UP/DOWN UP 0.1 SET SEL. DOWN -4 FUNC. FUNC. FUNC. FUNC. SEL. UP/DOWN SET SEL. OUTPUT SEL.

LEC-T1_C

*Ver2.00 TB x2[sec] In progress ... x2[sec] (2) LECPA TB Ver2.1*LECPA SET DATA TEST MONITOR ALARM JOG SETTING 47 - (3) Step 1 AX IS. Step No. 0 () Posn 123.45mm Speed 600mm/s SET SET 6.1 TB Ver1.** 6.23 12 No. No.0 No.1No.2 12 a//No. No.

EXxx-OMU0020EN

Table. 7-3 Digital input allocation and the process data Connector position Connector designation X0 X1 X2 X3 X4 X5 X6 X7 Pin 2 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 Input Pin 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 -41No.EX##-OMU0020-A 7.5.

Air Fittings & Tubing

S X2 Option indication X2 With electroless nickel plated With sealant S Without sealant Sealant Note) With gasket for all of M3, M5 and M6 threads. With sealant 2.0-5 Air Fittings & Tubing/Precautionsq Be sure to read before handling.

MRQ

Symbol Symbol Intermediate stroke -X1 1 Rod end female thread -X2 2 MRQ S X X1 32 40 Mounting Style Stroke Cushion Rotation angle Auto switch MRQ S X X2 32 40 Mounting style Stroke Cushion Rotation angle Auto switch Operating stroke Intermediate stroke Rod end female thread For the intermediate strokes other than standard ones, the full length is shortened by cutting the linear motion side

V

Torr (mmHg) Sensitivity 1 Torr (mmHg) Repeatability 3 Torr (mmHg) Max. flow rate 120 Nl/min Weight 520gf Operating temperature -5~+60C / 23~140F Connection port Rc 14, Rc 38 T E C H N I C A L SPECIFICATIONS Typical circuit layouts D I M E N S I O N S VA C U U M R E G U L AT O R Solenoid Valve Vacuum Pump Tank Filter Vacuum Pad Vacuum Pick Up Pressure Transducer Solenoid Valves T203-1-0*-X2