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Red ST(M) LED is flashing Red PWR(V) LED is On Red ST(M) LED is On Green MS LED is On Red PWR LED is On Green LEDs are On Red MS LED is On LED display LED display Off Off URL http://www.smcworld.com PWR(V) Display ST(M) PWR MS NS Displays the network status. for 2 hours each in direction X, Y and Z respectively (De-energized) Displays the module status.

. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply SI unit common status PROFIBUS DP status Red SF LED is On and red BF LED is flashing Diagnostic Commissioning LED Display Outline with Dimensions Specification Troubleshooting Red/green ST(M) LED is flashing alternately Vibration resistance 147 m/s2 3 times each in directions of X, Y and Z respectively (De-energized)

Red ST(M) LED is flashing Green LRUN LED is On Red PWR(V) LED is On Red ST(M) LED is On Red LERR LED is On Red PWR LED is On Green LEDs are On Holds the output. Output is Off. (Default setting) LED display LED display Off Off Content URL http://www.smcworld.com PWR(V) Display ST(M) LRUN LERR Displays the error status.

Cylinder tube shape for 0.75, 106 K M1 O-counter bore R depth A + Stroke E 0.13 [0.16] Note 1) 2 sides x 4 places (Inch) C Symbol Bore 1/8"st 1/4"st 3/8" to 4"st A Z W R Q P O N M2 M1 K J I H E D 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.31 0.36 0.46 1.25 0.56 #10-32UNF 1.56 0.06 0.25 0.86 1.22 0.15 0.25 0.19 0.15 1.31 0.38 #10-32UNF 0.50 0.70 0.52 1.56 0.88 5/16-24UNF

Specifications Bore size (mm) 25/32/40/50/63 Item 1.05MPa 0.7MPa 0.18MPa 10 to 60C (With no freezing) 50 to 300 mm/s Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Stroke length tolerance Grease +1.8 0 +1.4 0 +1.0 0 0 to 250 st: , 251 to 1000 st: ,1001 st to Fluorine grease Particle generation grade (Refer to front matter pages 13

Not required (Non-lube) Lubrication 50 to 1000 mm/s 50 to 700 mm/s Operating piston speed Allowable stroke tolerance Up to 250 st: , 251 to 1000 st: , 1001 to 1500 st: , 1501 to 2000 st: +1.0 0 +1.4 0 +1.8 0 +2.2 0 Air cushion Cushion Port size G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 G 1/2 Basic, Axial foot, Rod flange, Head flange, Single clevis, Double clevis, Center trunnion Mounting Standard

5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500

Description 10 20 30 50 Seal kit P523010-20 P523020-20 P523030-20 P523040-20 No. Description Qty. No. Description Qty. No. Description Qty. No.

Basic Compact LEHZ10 LEHZ10L 100 100 80 80 Overhang H [mm] Overhang H [mm] 60 60 70%, 40% 40% Pushing force 100% 40 40 70% Pushing force 100% 20 20 0 0 20 40 60 80 100 0 0 20 40 60 100 80 Gripping point L [mm] Gripping point L [mm] LEHZ16 LEHZ16L 140 140 120 120 Overhang H [mm] Overhang H [mm] 100 100 Pushing force 100%, 70%, 40% 70%, 40% 80 80 Pushing force 100% 60 60 40 40 20 20 0 0 20

Height/ Single Acting, Spring Return (S) Reed switch Solid state switch D-C7/C8 D-B5/B6/B59W D-A33A/A34A D-A44A D-C73C/C80C Proper Auto Switch Mounting Position/Spring Return (S) Auto Switch Mounting Height A dimension Auto switch model Bore size (mm) Auto switch model Bore size (mm) 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 Hs B 151 to 200 102 107 108 113

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Dual 3-port valves, 4 positions VQC1000/2000 (Rubber seal only) Model A side B side JIS symbol Two

mmm J kit: PC wiring compatible flat ribbon cable 325 20 Max. 16 stations T kit:Terminal block box 660 20 Max. 20 stations 455 Note 4) L kit: Lead wire 20 Max. 24 stations M kit: Circular connector 390 20 Max. 24 stations M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") C kit: Connector 115 20 Max. 20 stations SS0755-mCmC (Manifold pitch: 8.5) Rc1/8 S kit: Serial transmission (EX510)

-L1 1 HRZ001-L1 1 0 0 20 10 0 10 20 30 40 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) Circulating fluid temperature (C) HRZ002-W1/008-W1 5 HRZ008-W1 Heating capacity (kW) 4 HRZ002-W1 3 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) 84 Thermo-chiller Series HRZ Pump Capacity (Thermo-chiller Outlet) HRZ001-L1/002-L1/004-L1 HRZ004-H1/008-H1 HRZ002-W1

Double Acting, Female Threaded, Without Magnet (Without Auto Switch) Double Acting, Female Threaded, With Magnet (With Auto Switch) 10 10 20 20 16 16 1 1 12 Allowable lateral load fR (N) Allowable lateral load fR (N) 12 10 10 8 8 6 6 0.1 0.1 4 0.01 0.01 0 10 20 30 40 50 0 10 20 30 40 50 Stroke ST (mm) Stroke ST (mm) [Condition] fR CUJ cylinder Caution Adjust the cylinder drive speed by installing

Driver Inrush currents (A0-P) Main circuit power supply (L1, L2, and L3) Control circuit power supply (L11 and L21) LECSS2-T5/ LECSS2-T7/ LECSS2-T8 30 A (attenuated to approx. 3 A in 20 ms) 20 A to 30 A (attenuated to approx. 1 A in 20 ms) LECSS2-T9 34 A (attenuated to approx. 7 A in 20 ms) Since large inrush currents flow in the power supplies, always use molded-case circuit breakers and

Stroke ST (mm) 0 4 6 8 10 15 20 Caution Stroke ST (mm) When driving an inertial load, operate a cylinder with kinetic energy within the allowable value.

Rod clevis: GKM (ISO 8140) l1 [mm] Bore size [mm] Part no. e b d f h11 (Shaft) f H9 (Hole) l1 c (Min.) a (Max.) 32 GKM10-20 M10 x 1.25 10+0.5 +0.15 40 10 10 52 20 20 40 GKM12-24 M12 x 1.25 12+0.5 +0.15 48 12 12 62 24 24 50, 63 GKM16-32 M16 x 1.5 16+0.5 +0.15 64 16 16 83 32 32 80, 100 GKM20-40 M20 x 1.5 20+0.5 +0.15 80 20 20 105 40 40 125 GKM30-54 M27 x 2 30+0.5 +0.15 110 30 30 148 54 55