5

(mm) Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 Bore size ZZ 20 103 25 8 20 M5 x 0.8 95 25 62 9 10 40 40 60 40 120 25 107 32 12 20 M6 x 1 97 32 64 9 10 40 40 60 40 122 32 109 40 13 21 M8 x 1.25 125 40 88 10 11 53 53 77 44.5 154 40 138 * When female thread is used, use a thin wrench when tightening the piston

LJ1H

Nil W Matsushita Electric Industrial Co., Ltd.

CY1

1 #2 i @9 w $1 #1 #0 @7 CY1L10 to 40 @2 #9 @0 $0 t !4 !5 !9 #5 $2 #8 !2 !0 !6 !7 @4 @1 !8 @8 $1 #6 #7 F Enlarged view F 10,15 $1 @3 @5 @6 e y r q #2 !3 !1 o i u w #1 @7 #0 10 Parts list Parts list No. Description Slide block No.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

1

NCA Stroke Range DSeries Bore size (mm) Standard stroke (mm) Long stroke (mm) MY1B 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 100 to 2000 2001 to 5000 (Up to 3000 for 10, 16) -X MY1M(W) 16, 20, 25, 32, 40, 50, 63 100 to 2000 2001 to 5000 (Up to 3000 for 16) MY1C(W) 16, 20, 25, 32, 40, 50, 63 100 to 2000 2001 to 5000 (Up to 3000 for 16) 20MY1H 16, 20, 25, 32, 40 50 to 600 601 to 1500 (Up to 1000

Possible to transfer a workpiece at low-speed.

Shortened shaft Reversed shaft W W XA11 W W W W W XA12 W W XA13 W W W W XA14 W 10, 15 20, 30, 40 XA15 XA16 XA17 W 10, 15 10, 15, 20, 30, 40 XA18 W W W 10, 15, 20, 30, 40 10, 15 W W W W W XA20 XA21 W Stepped round shaft with double-sided chamfer 10, 15 XA22 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made

MY1

10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NH VV VV XX Z XX Z NH 27.7 10 30 160 28 56 40 40 3.5 153 7.5 48 9 11 2.5 15 14 68 13 33.7 12.5 32 200 34 60 50 40 4.5 191 11.5 45 10 14.5 5 18 12 72 14 Y 2-d R S D WX

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Aluminum alloy Aluminum alloy Carbon tool steel No. q w Description Cylinder tube Piston Bore size (mm) 12 16 20 25 32 40 50 63 No.

Environment

LEF How to Order LEJ LEL S2 25A-LEJS 40 500 A H LEM Series compatible with secondary batteries w e r q t y u i o !

Modular F.R.L. Units

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

MY1

l (600) 40 Weight m 30 W Caution MY1H40 MY1H40 MY1H40 (550) l W 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

CRQ2

shaft Reversed shaft W W W W 10, 15 20, 30, 40 10, 15 W W W W W W 10, 15, 20, 30, 40 10, 15, 20, 30, 40 10, 15 Stepped round shaft with double-sided chamfer W W 10, 15 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made to Order Chart 2.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

AC

Note 2) Without valve mechanism. q 00 10 20 30 40 e w w q w q q w e q w (1) Numbers in K indicate the constructing order from the left hand side (upper stream) with a view from front. Ex.) Symbol 00 AF+AR+AL 10 AW+AL (Available only for AC1010 to 4010.) 20 AF+AR 30 AF+AFM+AR (Available only for AC2030 to 4030.)

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

Aluminum High Vacuum Angle Valve

For details, consult your SMC sales representative. 419 B Aluminum High Vacuum Angle Valve Double Acting/Bellows Seal RoHS XLC/XLCV Series How to Order XLC M9N A 16 Flange size 16, 25, 40 XLC M9N A 50 1 Flange size 50, 63, 80, 100, 160 q t y w e r u XLC16 to 40 q Flange size w Flange type e Pilot port direction Rear flange surface Type KF (NW) K (DN) Applicable flange 16, 25, 40, 50, 63,

HRX-OM-W002

Cooling capacity[W] Cooling capacity[W] Cooling capacity[W] Cooling capacity[W] 3000 2000 2000 3000 Facility water temp. 2000 2000 Cooling capacity[W] Cooling capacity[W] Cooling capacity[W] 25 25 Cooling capacity[W] [W] 25 25 25 [W] 2500 2500 1500 1500 1500 1500 25 25 25 32 32 25 1500 1500 32 32 1500 1500 2000 32 2000 32 32 32 40 40 32 40 40 1000 1000 1000 1000 1500 40 1500 40 40 1000 40

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

HRX-OM-X037

Series HRX-OM-X037 Contents 9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7