CNA

1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37

CNA

11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27

C95

(n 2)/2 15 + 40 (n 2)/2 80 + 40 (n 4)/2 85 + 40 (n 4)/2 90 + 40 (n 4)/2 90 + 40 (n 4)/2 95 + 40 (n 4)/2 100 + 40 (n 4)/2 n Z80 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1, 2 Y59 15 15 80 85 90 90 95 100 Y7P 15 + 40 (n 2)/2 15 + 40 (n 2)/2 80 + 40 (n 4)/2 85 + 40 (n 4)/2 90 + 40 (n 4)/2

Slider Type Ball Screw Drive/11-LEFS Series

W [kg] Work load: W [kg] 50 20 40 Lead A 30 Lead A Lead H 10 20 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 40 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ The following graph shows the values when moving

Electric Slide Tables

10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 13 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Rod C96K Series 32, 40, 50, 63, 80, 100 How to Order C96K B C W 32 100 C96KD B C S W 32 100 M9BW With auto switch With auto switch (Built-in magnet) Number of auto switches Rod Nil 2 S 1 3 3 n n Nil Single rod W Double rod Mounting B Basic L Axial foot F Rod flange G Head flange C Single clevis D Double clevis T Center trunnion V Adjustable position trunnion Bore size 32 32 mm 40 40 mm 50

Table of Contents

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Glossary of Terms Specific Product Precautions 40 JSXM Series Construction JSXM20, 30, 40, Normally closed (N.C.) Body material: Aluminum q w e r t y u i IN IN o !0 OUT (Blow) !1 !2 Component Parts No.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

CA2

8 40 50 63 80 100 MBB40-PS-W MBB40-PS Seal retainer Rolled steel Zinc chromated !9 Consists of numbers #0, #1, #2, #4, and #6 above.

SY

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

•

-Pad Type ~ Type 2 4 -' 6 8 10 1316 20 25 32 40 50 .

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS i Carbon steel Lock piston o Hard chrome plated, Heat treated Carbon steel With Double End Lock MXF Lock bushing !0 Zinc bronze die cast Lock spring CBM2-20-PS-W Order No. CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W !1 Zinc chromated Steel wire MXW Bumper The seal kit is a set of @6 and @7.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS Carbon steel i Lock piston Hard chrome plated, Heat treated Carbon steel o With Double End Lock MGP Lock bushing Zinc bronze die cast !0 Lock spring CBM2-20-PS-W Order No. CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W Zinc chromated Steel wire !1 MGQ Bumper Urethane Alloy steel The seal kit is a set of @6 and @7.

Cylinder with Lock

[Horizontal] W Unlock port SOL.C SOL.B Locked Manual lock released SOL.A Bore size [mm] Hexagon wrench size of the lock release bolt 32, 40 3 50, 63 4 80, 100 5 Regulator 2.

MXS

SMXS16A, #3 SMXS16A, #4(#4+#9) SMXS16B, #1 SMXS16B, #2 SMXS16B, #3(#3+#7) (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50

Environment

101 to 400 155.5 141 LEC SS-T 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 15.4 8.2 60 101 to 500 178.5 160 LEC Y Size Stroke range [mm] S T U PC Incremental encoder Absolute encoder Y Without lock With lock Without lock With lock W X Z W X Z W X Z W X Z Motorless 25 15 to 100 46 92 1 15.4 87 120 14.1 123.9 156.9 15.8 82.4 115.4 14.1 123.5 156.5 15.8 51 101 to