energy saving effect

W: 13 [kW] W Efficiency Power supply output VI: 20 [kVA] Q = P = Q = P = V x I x Power factor In this example, using an efficiency of 0.7: In this example, using a power factor of 0.85: 13 0.7 = = 18.6 [kW] = 20 [kVA] x 0.85 = 17 [kW] Cooling capacity = Considering a safety factor of 20%, Cooling capacity = Considering a safety factor of 20%, 18.6 [kW] x 1.2 = 22.3 [kW] 17 [kW] x 1.2 = 20.4

MXF

20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60

Digital Pressure Switch

If resetting fails, an investigation by SMC Corporation will be required. Displayed in the case of an internal data error. System Error If the error can not be reset after the above measures are taken, then please contact SMC. -55No.PS-OMM0005-J Specifications Model No.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

RSH/RS1H

30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

RSH/RS1H

30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

MVGQ

ML2B C J G5-S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

HRS100/150

415 VAC (50/60 Hz) 20 A M5 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 HRS150-Al-40-l HRS150-Wl-40-l Note) An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 70C at 600 V, are used at an ambient temperature of 30C.

CE2

Besides, the whole accuracy after mounting on an equipment may be varied depending on the mounting condition and surroundings. As an equipment, calibration should be done by customer. 110C K Neoprene cross ML2B Maximum ambient temperature for the rod boot itself. C J G5-S Auto Switch Mounting Bracket Part No.

CE2

Besides, the whole accuracy after mounting on an equipment may be varied depending on the mounting condition and surroundings. As an equipment, calibration should be done by customer. 110C K Neoprene cross ML2B Maximum ambient temperature for the rod boot itself. C J G5-S Auto Switch Mounting Bracket Part No.

Guide Cylinder/Compact Type Series MGC

160 176 110 125 9 9 88 165 M8 37 160 1/8 86.5 30 62 4 142 19 19 190 210 115 135 11 12 96 200 42 194 1/8 95 35 67 4 M10 GL GQ GR I J K L M N O P Note 2) Q R S T U V W Bore size (mm) 20 25 32 40 5.5 4 4 35 60 80 105 50 25 M6 x 1 M5 x 0.8 94 12 26 16 112 53 50 9 7 7 40 70 95 125 60 32 M5 x 0.8 104 12 31 20 132 63 60 M8 x 1.25 9 7 7 40 70 95 125 60 32 1/8 104 12 38 20 132 63 60 M8 x 1.25 11 8

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.

Thermo-chiller

Filter Rc3/8 20 m V V 5 Flow meter Rc1 V Prepare a flow meter with an appropriate flow range.

10

K (46) 12.4 15 15 Closed E 7 7 20 Open F 10 10 34 G 4 x M4 x 0.7 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-10DZ 38 36 51 26 56 76 100 24 80 MHL2-10D1Z 54 52 67 42 78 118 142 39 108 MHL2-10D2Z 72 70 85 60 96 156 180 57 146 J dimension is at fully closed.

Basic Type/Direct Mount Type

If an accurate stopping position is required at the stroke end or midstroke, use an external stopper to secure accurate positioning.

IZx-OMP0064

IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.

Rotary Actuator/Vane Style Series CRB1

The product with an auto switch is available only for J and Z shafts of XA33, 35, 37 45, 51 and 54.

Fluoropolymer Piping Equipment

LQ1P41-R3 12 6 29 20 26 17 7 20.5 43.5 82.1 39 23 3.6 8 39 24 LQ1P51-R2 19 10 29 20 26 17 7 20.5 43.5 82.1 39 23 7.4 8 39 24 Inch Size Model A side B side E1 E2 H1 H2 J K L1 L2 M1 M2 Min. port size t W1 W2 Applicable tubing O.D.