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Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

CA2

to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 40 +0.070 0 0.1 0.3 12 18.0 up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 50 +0.070 0 0.1 0.3 16 25.0 up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 0.1 0.3 20 31.5 102 13 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 10 22 80 +0.084 0 0.1 0.3 25 35.5 100 up to 750 20 to 750 40 37

VM

insertion of R thread Connection thread R Model H 2(A) 1(P) Effective area (mm2) L1 L2 L3 L4 L5 L6 Q B Weight (g) 1(P) R 2(A) 2(A) R 3(R) VHK R-01S-01S 18 41 65.2 32.6 32.6 16.5 3.5 11 57 30 8.6 1.2 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK R-02S-02S 18 41 78 39 39 16.5 3.5 11 66 47 9.7 1.2 VHK R-03S-03S 22 46 88.6 44.3 44.3 21.5 4 14 76 72 16.1 3.2 VHK R-04S-04S 22 46 97.4 48.7 48.7 21.5 4 14

HRX-OM-W002

Model number: HRR012/018/24/030-AN/WN-10/20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRR012/018/024/030-AF/WF-10/20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

AC Servo Motor Driver (SSCNET /H Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: J + M

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: B + J

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: J + M

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: B + J

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With earth leakage circuit breaker

Type: -, Cooling Method: -, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With earth leakage circuit breaker / With automatic water supply

Type: -, Cooling Method: -, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With earth leakage circuit breaker / With automatic water supply / Compatible with deionized water (pure water) piping

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With earth leakage circuit breaker / Compatible with deionized water (pure water) piping