5 D-A7H D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6) Note 4) D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-F7W/J79W D-F7BA/F79F/F7NT 10 15 15 + 20 (n 2) (n = 4, 6) Note 4) D-F7WV D-F7BAV 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) Note 3) When n is an odd number, an even number that is
x 100l x 115l 115 50 (M) 100 50 (M) M5 x 55l x 140l 140 75 (M) 55 CHKDB25 5 (M) x 60l x 165l 165 100 (M) 60 10 (M) x 65l M12 x 75l 75 CHKDB63 5 (M) 65 15 (M) x 70l x 80l 80 10 (M) 70 20 (M) x 75l x 85l 85 15 (M) 75 25 (M) 10.4 x 80l x 90l 90 20 (M) 80 30 (M) x 85l x 95l 95 25 (M) 85 35 (M) x 90l x 100l 100 30 (M) 90 40 (M) 16 x 95l x 105l 105 35 (M) 95 45 (M) x 100l x 110l 110 40 (M) 100
M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3 43-L-M5 M plug connector (M): 10-SYJ3 43-M-M5 M8 Connector (WO): 10-SYJ3 43-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5[115.9] R1 P R2 R1 P R2 R1 P R2 91.9[96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6[39.8
How to Order N M X0 149 FND100 10 Nominal filtration rating Seal material Material t Symbol 149 149 m Nominal filtration rating Symbol N V NBR FKM 150 Element type Type 188 Symbol M Gold mesh Port size r Symbol 10 R1 Port size OUT IN Note Replacement Parts Specifications FND100V-10-M149X0 Model FND100N-10-M149X0 R1 Stainless steel 304 No. Description Element Material Kit No.
11.5 14 8 PA N PB PW M JK L LD P J MM NN HT Model HS REAL15 REAL20 REAL25 REAL32 REAL40 95 5.6 8 7.5 45 70 75 9.5 M8 x 1.0 M5 x 0.8 M5 x 0.8 25 21 M6 x 1.0 10 90 120 10 50 10 86 5.6 Rc 1/8 M6 x 1.0 M6 x 1.0 M10 x 1.0 10 31 130 7 10 11 60 100 86 10 M14 x 1.5 Rc 1/8 M6 x 1.0 39 10 M8 x 1.25 11.5 120 160 12 70 15 100 9.2 Rc 1/8 M10 x 1.5 M8 x 1.25 M20 x 1.5 17 47.5 190 9.2 12 10.5 90 140 136
C(D)QSB D(M) Bore size Stroke 10 Relief port The type which is applicable for using inside the clean room graded Class 100 by making an actuators rod section a double seal construction and discharging by relief port directly to the outside of clean room.
Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.
Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.
Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.
is an inductive load. w In a case where the wiring load is greater than 5 m.
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
Work load [kg] 2000 1000 800 1500 L9 L9 [mm] L9 [mm] 600 1000 Z m Me 400 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 2000 1000 800 1500 L10 [mm] L10 [mm] 600 1000 Y 400 500 200 m Me 0 0 0 2 8 10 4 6 0 10 15 5 20 Vertical L10 Work load [kg] Work load [kg] 2000 1000 800 1500 L11 [mm] L11 [mm] 600 1000 Z 400 500 200 m Me L11 0 0 2 8 10 4 6 0 0 10 15 5
Note 10) Spring assist Note 12) Stroke Hundredths of an inch (i.e. 06 = 0.06") Number of auto switches 2 pcs. 1 pc. n pcs.
(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.
Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.
M L CXS series: 20, 25, 32 M L CXS series: 10, 15 Stroke Stroke CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L 150 210 229 75 Model Stroke SS ZZ Z 80 135 152 50 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 175 257 287 125 180 197 200 282 312 120 180 199 65 125 207 237 150 232 262 110 170 189 125 185 204 110 192 222 110 180 204 120 202 232 120 190 214
(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.
(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.
p. 31 IDF100F to 150F IDFmF-m-R With an earth leakage breaker IDF190D to 370D IDFmD-3-R IDU3E to 75E IDUmE-m-R Power supply terminal block connection IDF1E to 15E1-10 IDFmE-10-S IDU3E to 15E1-10 IDUmE-10-S With a terminal block for power supply, operating, and error signals*3 IDF4E to 75E IDFmE-m-T p. 32 Refrigerant R134a (HFC) IDU E IDU3E to 75E IDUmE-m-T With a timer controlled solenoid
Also, when wiring is not required for a station that is to be mounted with an option such as an individual SUP spacer, enter an "X".