Modular F.R.L. Unit

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model B C D E G A H 63 66 76 Y 14 19 21 Z 6 7 7 W 28.5

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G flats 12 .., ~ w w ,. u Rat with rib .. ~ 2 .5 B '--=-1 1/ ' Flat with rib ' 8 . 8 >; ~ \L~~~!

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

1.1

Specify the quantity of units necessary for use with your piping system. 29 Series HRG Dimensions [Dustproof filter set] HRG-FL001 HRG-FL005 A A (10) (25) (25) B (25) (25) (10) B Surface fastener HRG-FL010 A (10) (25) (25) B (390) (390) HRG-FL015 A (10) A (10) (25) (25) (25) (25) B (Large) (Small) B (390) (390) (mm) A B C Part no.

NCA1

6 MF5 w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

A

mm C mm S Y M B O L S AMG150 14 170 63 10 AMG250 38 191 76 10 AMG350 12 220 90 10 AMG450 34 241 106 10 AMG550 1 279 122 10 AMG650 1 12 388 160 10 AMG850 2 479 220 10 H O W T O O R D E R W AT E R S E P A R AT O R S E R I E S AMG AMG S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

b 0.26 0.20 0.22 0.19 b 0.35 0.18 0.21 0.18 C6 C8 C10 C12 C8 C10 C12 C12 10-SS5V1-10 10-SS5V2-10 10-SS5V3-10 10-SS5V4-10 Note) The values are for individually operated 2 position type manifold bases with 5 stations.

Air Cylinder NCA1 Series

w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

NCQ8

Minimum Auto Switch Mounting Stroke (inch) D-M9, D-F9W D-M9V, D-F9WV No. of auto switches D-A9 D-A9V D-F9BAL Model NCDQ8A(B)-(C)(M) NCDQ8A(B)-100S(M) NCDQ8A(B)-200S(M) NCDQ8A(B)W-(C)(M) NCDQ8A(B)Z-(M) NCDQ8A(B)Z-100S(M) NCDQ8A(B)Z-200S(M) NCDQ8A(B)Z-100T(M) NCDQ8A(B)Z-200T(M) 0.62 (5/8") 0.25 (1/4") 0.62 (5/8") 0.25 (1/4") 1.00 (1") 1 0.62 (5/8") 0.37(3/8") 0.62 (5/8") 0.25 (1/4") 1.00 (1

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 Applicable tubing size (inch) Fitting type Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B Symbol E T P U F Type Union elbow Union tee Panel mount union Union Union flange Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Cylinder with Lock

Auto switch model D-Y59m D-Y69m D-Y7P D-Y7PV D-Y7H D-Y7mW D-Y7mWV D-Y7BA D-Z7m D-Z80 D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NTL D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW A B A B A B A B A B A B A B A B A B A B 32 13.5 10.5 9.5 6.5 10 7 15 12 3.5 0.5 7.5 4.5 3.5 0.5 7 4 9 6 6.5 3.5 40 10.5 14 6.5 10 7 10.5 12 15.5 0.5 4 4.5 8 0.5 4 4

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

Slider Type Ball Screw Drive/11-LEFS Series

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

CA2

A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 40 37 38.5 69 81 69 71.5 31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5 107

Free Mount Cylinder

Single Acting, Spring Return D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 4.5 6.5 4 4 2.5(5) 0 17.5 17.5 All stroke 13.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 0.5 2.5 7.5 7.5 1.5(1) 3.5 16 0.5 2 8 8 2(0.5) 4 2 20 0 10 10

SYJ300/500/700

S and Z types 24VDC: 7% to +10% 12VDC: 4% to +10% T type 24VDC: 8% to +10% 12VDC: 6% to +10% 659 10-SYJ300 3 port / Pilot operated solenoid valve Flow characteristics / Weight C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv 12(PA) 23(AR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm 2) L/M plug connector M8 connector Grommet 10-SYJ312 10-SYJ322 10

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

100 6-5-52 53 Series CG1Q Air Cylinder: Low Friction Type Double Acting, Single Rod With Mounting Bracket Without rod boot ZZ Axial Foot Style Axial foot style: CG1LQ Without rod boot Z Bore (mm) B LC LD LH LS LT LX LZ M W X Y 20 25 32 40 50 63 80 100 34 4 4 4 4 5 5 6 6 6 6 7 7 10 12 11 14 20 53 53 53 60 67 67 74 74 3 10 10 10 10 17.5 17.5 20 20 15 7 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53

PFxx-OMX0002

R/W AoUt (Setting of analogue output) U8 0 Y 0: 1 to 5 V 10 to 10 V Setting of analogue output (Voltage output type only) 1 R/W FrEE (Setting of free range mode) U8 0 Y 0: oFF (Unused) 1: on (Used) Setting of free range mode 2110 0x083E Setting range 0x0190 to 0x1068 (400 to 4200) 2 R/W F_H (Set value of free range) S16 4000 Y Set value of free range Rated value 10% to 105% SAVE (Accumulated

Modular F.R.L. Units

Optional/Semi-standard specifications N.C.: Gray N.O.: Black B B B B B Dimensions Barb fitting Applicable tubing: T0604 Width across flats 17 1/4 Width across flats 14 1/8 M5 x 0.8 Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Model Standard specifications Bracket mount P1 P2 A B C E F G J M N Q1 Q2 R S U V AC20-A AC25-A AC30-A AC40-A AC40-06-A 30 30 38.4