F

D2 L1 L2 L3 M1 Weight Model Applicable D1 D2 L1 L2 L3 M1 Weight Tube OD : d Max Min gf (Inch) (Metric) Tube OD : d Max Min gf 7.8 10 41.1 4.4 14.5 1/8 23.4 20.6 5.8 NAS1001F 3.2 7.8 41.1 4.4 23.4 20.6 14.5 5.8 8.9 42.3 4.9 5/32 24 21.2 6.2 AS1001F 10 4 8.9 42.3 4.9 24 21.2 6.2 14.5 8.9 43.8 5.2 5/32 32.6 27.6 11.4 15.5 6 11 47 6 25 22.2 7.2 11.8 16.5 11.4 50 6.2 NAS2001F 3/16 33.6 28.6 17.1

Cooling Capacity: 200 (CH1: 19 kW; CH2: 1 kW), Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control)

Cooling Capacity: CH1: 19 kW; CH2: 1 kW, Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control), Pump Option: -

Power Clamp Cylinder ø 40, ø 50, ø 63, ø 80 Series CKZT

6 6 6 6 8 8 8 8 D2 7 9 9 9 10.2 10.2 10.2 10.2 H 16 20 20 25 20 20 20 25 40 50 63 80 40 50 63 80 S Bore size 40 40 50 63 80 50 63 80 B For 40 of A015, S type only Offset Arm position A015 A045 Offset 15 Offset 45 D1 Right D2 H R Center D1 D2 C H Left D1 D2 L H 192

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Inch Size Applicable tubing O.D. d Applicable tubing O.D. d T D1 D2 D3 L1 L2 L3 M1 L4 (3) A (2) D1 D2 L1 L2 L3 L4 (3) A (2) Weight (g) H (1) Weight (g) H (1) T M1 Model Model Min.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Universal Type/Metric Size Applicable tubing O.D. d H D1 (Hexagon width across flats) M L3 A L4 L5 D3 D2 L1 Connecting thread T L2 Uni thread H D1 D2 L1 L2 L5 A Max. Min. Max. Min.

Speed Controller with Uni One-touch Fitting AS Series

L3 M D2 L1 Connecting thread T L2 H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

Rotary One-touch Fittings Manifold Series KM

D1 D2 L1 L2 L3 P Q1 Q2 M1 M2 6 KM13-04-06-3 10.4 18 19 20 21 22.5 13 15.5 15.5 19 19 60 63.5 70.5 74.5 81.5 12.8 9.9 11.1 11.1 12.8 12.8 13 16 18 23 27 17 18.5 18.5 21 21 4.5 6 6 7.5 7.5 4 10.4 16 38.2 KM13-04-08-3 15.2 KM13-06-08-3 12.8 15.2 KM13-06-10-3 18.5 KM13-08-10-3 15.2 18.5 8 8 6 12.8 17 45.4 10 10 8 15.2 18.5 52.6 KM14/Dimensions Applicable tube O.D.(mm) Part No. D1 H (Hex.)

LEC-OM07605CN

(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B

Antistatic One-touch Fittings Series KA

A D1 M L2 L1 D2 Part No.

KA

(mm) A D2 L1 D1 M L2 Part No.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Dual Speed Controller with One-touch Fitting Series ASD 1

D1 T T Metric Size L4 L5 A1 A2 M Max.

ASD

D1 A2 T T Inch L4 L5 A1 A2 M MAX.

Series KC Self-seal Fittings

L4 Weight (g) A L3 L1 L2 D1 D2 D3 Part No.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

Accs Set for CH1 (F Opt) HRL100/200/300, HRS090 AND LARGER CAPACITIES, O88, 5.5 lb