72 215 80 65 21.5 81 224 100 Long stroke (a stroke of 1001 mm or larger) 2 x P (Rc, NPT, G) G G FT With rod boot 2 x cushion valve Width across flats KA MM E RY FB FY D e C H1 f l 10.2 B1 C B h + l AL RT N N K A ZZ + l + Stroke M S + Stroke H FX FZ ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) A AL FB B B1 C D E FD FT FX FY FZ G H1 J K KA 1001 to 1200 50 35 32 88 70 27 52 20 40 9.0 20
(With an approximately 5 C safety margin, the system should operate within a maximum 55 C limit.) The necessary cabinet heat dissipation area can be calculated by equation 10.1. P A = K T (10.1) A: Heat dissipation area [m2] P: Loss generated in the cabinet [W] T: Difference between internal and ambient temperatures [C] K: Heat dissipation coefficient [5 to 6] 10 3 10.
) P2 B C R (Pressure gauge port size) O S O S Q Clearance for maintenance 2 x P1 (Port size) K IN OUT Drain G A OUT AW30(K) to AW40(K)-06 Bracket (Option) Panel fitting dimension N T M J P2 2 x P1 (Port size) D (Pressure gauge port size) Y W U F S IN OUT B C R Z Q V OUT IN Plate thickness AW30(K): Max. 3.5 AW40(K): Max. 5 P2 K OUT E Clearance for maintenance (Pressure gauge port size) A G
E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.
K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.
30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol: A29 Symbol: A28 DA 30 30
Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q Q B Pressure gauge (accessory) K H OUT Pressure gauge port size Square embedded type pressure gauge (accessory) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D AC30A, 40A A N F E P K C G G OUT IN B Pressure gauge (accessory) K OUT Pressure gauge port size J L Square embedded type pressure
flats KA 4 x J 4 x J 2 x Cushion valve 2 x Cushion valve CDH10 CDH10 MM MM REA E D D E B C B C REB Width across flats B1 Width across flats B1 AL H1 AL H1 CX CX REC N N F N N F U U A A K K C C B B Smooth Smooth H H ZZ + Stroke Z + Stroke S + Stroke RR ZZ + Stroke Z + Stroke S + Stroke RR L L Low Speed (mm) MQ Bore size (mm) A AL B B1 C CDH10 CX D E F G H H1 J K KA RHC 40 30 27 60 22 44 10
a B r a c k e r ( A c c e s s o r Y : B ) P u r s i n s a i r ( M i n i m u m c l e a r a n c e u b e c o n n e c t i o n P o r t f o r u r g e a i r e x h a u s t p o i n t c h e c k e r i o n : S ) Dew 0 p t m e t h o d a b l e 6 .
250 k/500 kbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 9.6 k/19.2 k/45.45 k/93.75 k/ 187.5 k/500 k/1.5 M/3 M/6 M/12 Mbps 21.6 to 26.4 VDC 100 mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage Internal current consumption 22.8 to 26.4 VDC 11 to 25 VDC 100 mA or less Power supply for output Power supply voltage Power supply for Power supply
K L F I J (D) Flat terminal C E U 11 T A OUT IN M B 2 x P Port size I F J L K (D) (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Port size P A B C E F I J K L D M T T V U U T 68.5 (74.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) 82.5 (90.5) U 62.5 (68.5) 107.5 (113.5) 29 62.5 (68.5) 5 C VXD2 30 3/4 99.5 68.5 47.5 23 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 33 35 1 102 71 50
joint CHA Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D d K L L1 E Part no.
(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 0.030 0.060 Type C 5 for axis 0.030 0.060 Type C 8 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 14 for axis 0.050 0.093 Type C 18 for axis 0.050 0.093 Type C 22 for axis 0.065 0.117 7-6-20 21 Accessory Bracket Series CQ2 Simple Joint: 32 to
Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated
K V V Direct exhaust Complex exhaust1 End plate exhaust C Refer to page 18 for the standard supply pressure per nozzle diameter.
port size) D U M N T Bracket (Option) J 2 x P1 (Port size) AR50(K), AR60(K) A Q C B K IN OUT F R S P2 (Pressure gauge port size) U M J T N D Bracket (Option) Applicable model AR20(K) to AR60(K) AR10, AR20(K) to AR60(K) Round type pressure gauge (with color zone) AR20(K) to AR60(K) Digital pressure switch Square embedded type pressure gauge Option Round type pressure gauge J J J H H H Center
Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.