KRM

Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str. Frunzei, Nr. 29, Sector 2, Bucharest, Romania TEL: 01-3205111 FAX: 01-3261489 SLOVAKIA SMC Priemyseln automatizci, s.r.o Nova 3, SK-83103 Bratislava TEL: 02-4445-6725 FAX: 02-4445-6028 CHINA SMC (China) Co., Ltd. 7 Wan Yuan St.

VFM300

One way roller lever VFM350-02-02 VFM350-02-02S 14 polyacetal or head steel roller JIS Symbol (Pilot exhaust port) 0.5 MPa supply 2.4 mm P.T. 7 N F.O.F. 2-4.2 mounting hole 4.6 mm O.T.

VQ5000

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Silencer Series AN

Performance Weight g Effective area mm2 Sonic conductance C [dm3/(sbar)] Recommended flow m3/min(ANR) Model AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 5 1 0.4 or less 0.5 10 2 0.8 or less 1 15 3 1.0 or less 2.5 35 7 3.0 or less 4 60 12 5.0 or less 5.5 90 18 8.0 or less 8.5 Note) Recommended flow rate is the flow at 72.5psi (0.5 MPa) in the inlet pressure.

Table of Contents

7 !8 !

SL5200

Surface finish Ra max 10 in. (0.25 m) Standard 7 in. (0.18 m) 5 in. (0.13 m) Code 0 M V X Specification Standard Sub-atmospheric Code V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

ITV

P3020114 Flat bracket INI-398-0-6 L-bracket Straight type 100 TM-4DSX3HG4 Right angle type Cable connector 15 25 TM-4DLX3HG4 7 R 3.5 (10) 30 2.3 40 52 (7) 36 F.R.L. 50 36 84 4 5.5 4 7 50 AV 36 7 AU 36 7 70 20 60 AF 12 4 5.5 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Please visit our web site for the latest selection of available models with CE mark. http://www.smcworld.com 16-14-7

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Power Valve Precision Regulator

02 03 04 04 06 10 10 12 14 20 Nil 01 02 ITVX 1 4 1 For VEX13 (NBR seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3 For VEX1 33B (FKM seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3B Note) O-rings cannot be shipped as a single unit. 4 1 PVQ 8 3 3 A B 2 1 Body ported Base mounted 2 1 VY1 4 3 5 VBA VBAT 1 1 2 1 1 4 1 7 1 4 1 AP100 1 2 9 2 Without sub-plate

REA/REB

0 @4 w @7 !7 !6 RHC MK(2) Component Parts Material No. Description No.

REA/REB

M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless

HRX-OM-W002

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

ZP

tube, 6/4) 14.5 16.5 5 7 1.8 2.5 13.5 15.5 5 7 1.8 2.5 ZCU 14.5 16.5 5 7 1.8 2.5 AMJ Size 10, 13, 16 Size 40, 50 Misc.

HRX-OM-X084

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Trouble shooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

REA/REB

M5 x 0.8 26 68 8 80 14 19.5 20 15 39.5 9 38 4 REAR15 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 18 21 25 18 54.5 14 53 5 REAR20 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 17 20.5 40 22 64 11 62 5 REAR25 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 20 21.5 40 28 72 15 70 6 High Precision Guide Type REBH Order Made Auto Switches REAR32 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 26 24 50 35 79 13 76 7 REAR40 7 M6 x 1 11 Rc 1/

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 749 AS20-D Series Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

Sine Rodless Cylinder Series REA/REB

7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts Component Parts No. Description No.