REA/REB axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products
precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates
8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions
2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20
P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).
1-5 1.7 Waste Disposal . 1-6 1.7.1 Disposal of refrigerant and compressor oil . 1-6 1.7.2 Disposal of product . 1-6 1.8 Material Safety Data Sheet (MSDS) . 1-7 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.1.1 HRR010-A-10. 2-1 2.1.2 HRR010-W-10. 2-2 2.1.3 HRR010-A-20. 2-3 2.1.4 HRR010-W-20. 2-4 2.2 Name and Function of Parts . 2-5 2.2.1 HRR010-A-10/20. 2-5
2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.
Fig 2-2 Part number of product(2/2) 2.1 Model Number of Product HRR Series 2-2 HRX-OM-X071 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts 2.2.1 HRR050-A-20/40(Air cooled type) In the case of option Z, without bypass valve Fig 2-3 Names of the parts Table 2-1 Accessory list 2 copies Operation manual (English 1 copy/ Japanese 1 copy) Power supply connector 1 pc.
Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing
3 stns. x 1 2 stns. x 2 2stns. + 3stns. 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.
2 6 Circulating fluid outlet 1 Users equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 2 8 7 Water-cooled refrigeration Facility water inlet 1 Facility water equipment 7 2 Facility water outlet * Ensure that the overflow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller.
) 4 3 42 2 1 4 Connector pin numbers 43 2-3.4 Pin name Pin No.
For 3 stations For remote I/O A1W DeviceNet PROFIBUS-DP CC-Link 16 For 16 stations A2W 0 Without SI unit Stations Ports 1, 3, 5 position Symbol 02 Stations 2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Note 1) Double wiring specifications 08 02 8 stations 2 stations Note 2) Supply/Exhaust block assembly specification Specified
water inlet (Water-cooled refrigeration) 8 1 Fluid supply Automatic fluid fill port 2 2 6 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 Ensure that the overow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller.
equipment 7 1 2 Facility water inlet (Water-cooled refrigeration) 8 1 Fluid supply Automatic fluid fill port 2 2 6 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 * Ensure that the overflow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller
Process Pump Automatically Operated Type with Built-in Pulsation Attenuator (Internal Switching Type) Series PAX1000 How to Order 1 2 PAX1 1 02 Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID
However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.