Nozzle Type Ionizer

0.3 High flow rate nozzle High flow rate nozzle 0.2 O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.1 0 0 120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal)

E-P HYREG ® Series VY1 1

Individual external pilot port: P1 M5 (VY1B01-00 only) 2-5.5 Mounting hole Blanking plate Common external pilot port: See Note for P1. 2-M5 (VVEXB-2-2n-01 only) R port: 2-Rc 1/8 Exhaust from the both sides for 6 stations or more. P port: 2-Rc 1/8 Pressurize from the both sides for 6 stations or more.

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

AC Servo Motor Driver (Pulse input type/Positioning type ）

PF_ _ ]) . 5-63 6. NORMAL GAIN ADJUSTMENT 61 to 6-33 6.

A

10 6 10 21.5 8-32UNC 12 0~0.002 -0.4 ~ -0.2 5 3/16 16 7 6.3 RCS-01 6 10 21.5 8-32UNC 12 0~0.002 6.4 -0.3 ~ -0.1 3/16 16.6 21 10 12 RCD-015 12 6 12 28 8-32UNC 16 0~0.002 6.4 -0.3 ~ -0.1 3/16 25 14 12 RCS-015 6 12 32 8-32UNC 16 0~0.002 8 -0.4 ~ -0.2 5/16 21 25 11.5 10.3 RCD-02 16 6 16 34 10-32UNF 20 0~0.002 8 -0.4 ~ -0.2 5/16 25 11.5 10.3 RCS-02 6 16 34 10-32UNF 20 0~0.002 10 -0.4 ~ -0.2 3

Table of Contents

6 6 CY1H D-Y5/Y6/Y7 6 5 5 5 D-Z7/Z80 6 9 A B CY1HT D-Y5/Y6/Y7 5 6 Some switches cannot be mounted.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS23 1FE-01 AS22 1FE-02 AS23 1FE-02 AS32 1FE AS33 1FE AS42 1FE AS43 1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

VZM400

-01-06 VZM450-01-06S Toggle lever VZM450-01-08 VZM450-01-30R VM-30CR Red VM-30CB Black VZM450-01-30B Push button (Mushroom) VM-30CG Green VZM450-01-30G VM-30CY Yellow VZM450-01-30Y VZM450-01-32R VM-32CR Red VM-32CB Black VZM450-01-32B Push button (Extended) VM-32CG Green VZM450-01-32G VM-32CY Yellow VZM450-01-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VZM450-01

VEX1

(Example) VVEX2-2-7-02N VEX3222-1LN 6 pcs. VEX1-17 1 pc. VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

Check Valve Series AK

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

AIR COMBINATION

N.C. type is recommended. 18 6.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Valve Single Unit

How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3

VZ5000

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized 3 position closed center/exhaust center/pressure center 3 position closed center De-energized De-energized 3

Filter Regulator

Note 4) -10- 6.

VZM500

-01-06 VZM550-01-06S Toggle lever VZM550-01-08 PAT.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

M5 M5 x 0.8 M5 female thread, through type (with mounting hole) 01 R 1/8 (with M5 female thread) IM5H Option N01 NPT 1/8 (with M5 female thread) R04 4 reducer R06 Description Part no. Note 6 reducer Connector for pressure sensor controller ZS-28-C 1 pc.