Multi-Axis Step Motor Controller

Motor power supply (+), Common () @1 P1, P2 EtherNet/IPTM communication connector Connect Ethernet cable. *1 Connectors are included. (Refer to page 12.) 11 Multi-Axis Step Motor Controller JXC73/83/92/93 Series Wiring Example 1 For 4 Axes 1 pc.

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P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.

3 Position Cylinder Series RZQ

P2 = 1.5 x 0.5-0.024 x 15 = 0.39 MPa r Retraction The above values are for cases where the maximum payload found by the selection method is loaded. 0.2 0.1 100 200 300 Speed Adjustment Max. speed (mm/s) The data below illustrates the strokes controlled by the respective speed controllers. Gradually increase from a low speed to the desired speed setting.

3 Port Solenoid Valve/

Fixed orifice and variable throttle are available as a throttle for adjusting the pressure increase. (1, 1.5, 2) Output Pressure (P2) vs Time Graph Output P2 P1 P2 reaches half of P1, and then the main valve of the soft start-up valve turns on.

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

High Vacuum Angle Valve, XL Series

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal primary pressure Drop of primary pressure Increase of primary pressure Pressure P1 P2 Time Switch output 1, 2 ON OFF The correction value is not stored on the EEPROM. When auto shift is used: When the primary pressure changes, set the auto shift function to Lo.