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Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

HEAD OFFICE: 1-16-4, SHIMBASHI, MINATO-KU, TOKYO 105, JAPAN TELEPHONE: 03-3502-2740 FACSIMILE: 03-3508-2480

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: Rc1/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: Rc1/4, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: G1/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: G1/4, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: 0.05 to

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: G3/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: NPT1/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: NPT1/4, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: 0.05

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: NPT3/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate

Stations 02 03 2 stations 3 stations Station 3 2 1 D side U side 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 A 5 B G Electrical entry Body type Body type Base mounted with clips G C Grommet Plug lead with light/surge voltage suppressor Symbol A Coil voltage Power consumption Pressure specification Flow rate 5 6 V S R 24

D-sub Connector. Series SV D-sub Connector. How to Order . Manifold Electrical Wiring. Dimensions . Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV3000 for D-sub Connector. Series SV4000 for D-sub Connector. Flat Ribbon Cable Connector . Series SV Flat Ribbon Cable Connector.

F.R.L. combination VHS20 Y200-D Y200T-D AC20-D VHS30 Y300-D Y300T-D AC30-D VHS40 Y400-D Y400T-D AC40-D * New VHS series compatible with previous model spacer Y200(T)-A to Y400(T)-A. Spacer (Y-D) Spacer with bracket (YT-D) Pressure relief 3 port valve 8 - 5. Construction/ Parts list Standard specifications No.

VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible

(mm) Nylon Urethane Effective orifice(mm 2) Weight (g) L A D M Part No. d KCH04-99 KCH06-99 KCH08-99 KCH10-99 KCH12-99 4 6 8 10 12 5 8 11 18 24 5.6 5.6 13.1 13.1 26.1 18.0 41.5 29.5 58.3 46.1 40.6 43.1 46.7 52.6 54.9 22.6 24.1 25.2 28.6 29.4 9.8 11.8 14 17 19 16 17 18.5 21 22 4 6 8 10 12 Note) D: max. diameter 77

) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT CE2 15000 18cm 7-2 ()() A /B (CEU1CEU5 )0.1mm

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.

ZS-46-B Panel mount adapter ZS-46-D Panel mount adapter + Front protection cover ZS-46-5L Power supply/output connection lead wire 5-core, 2 m ZS-27-01 Front protection cover B Panel mount adapter Connection Example ZS-46-B PFG300 Sensor connector D Panel mount adapter + Front protection cover PF3A7 H Power supply/output connection lead wire ZS-46-D Lead wire and M12 connector (Option for