Hydraulic Cylinders

Nil (Example) A93 3m . L (Example) A93L 5m .

D-F6N/D-F6P/D-F6B

Applicable model: D-A73, A73H, A73C, A93, A93V, A53, A54, B53, B54, C73, C73C, E73A, Z73, D-R73, R73C, 97, 93A, A33, A34, A33A, A34A, A44, A44A 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed. 1. Keep wiring as short as possible.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

CRQ2

Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Please contact SMC in this case. 356 Series MGG Guide Cylinder Specifications JIS Symbol Standard Stroke Model (Bearing type) Long stroke (mm) Standard stroke (mm) Bore size (mm) 20 75, 100, 125, 150, 200 250, 300, 350, 400 25 350, 400, 450, 500 32 350, 400, 450, 500, 600 40 350, 400, 450, 500, 600, 700, 800 MGGM(Slide bearing) MGGL(Ball bushing bearing) 75, 100, 125, 150, 200, 250, 300 50

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Manufacture of intermediate strokes at 1 mm intervals is possible.

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Grease pack part no.: GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) REB 236 IN 71 118 165 20 10 314 OUT 94 157 220 REC 378 IN 113 189 264 25 12 491 OUT 147 245 344 CY CY Intermediate Stroke CX Installation of spacer on standard stroke body. Refer to page 1168 for standard model no. Intermediate strokes at 1 mm intervals are available by using spacers with standard stroke cylinders.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Standard Nil A Both ends adjuster P Note) Axial piping CS Extension

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

Please contact SMC in this case. 392 Guide Cylinder/Compact Type Series MGC JIS Symbol Specifications Standard Stroke Model (Bearing type) Bore size (mm) Standard stroke (mm) Long stroke (mm) 20 75, 100, 125, 150, 200 250, 300, 350, 400 25 350, 400, 450, 500 MGCM (Slide bearing) 32 350, 400, 450, 500, 600 75, 100, 125, 150, 200, 250, 300 350, 400, 450, 500, 600, 700, 800 MGCL (Ball bushing

MVGQ

, 3 Coil rated voltage (V) 100, 110, 200, 220 AC50/60 Hz Standard Stroke 10% of the rated voltage Allowable voltage Model Standard stroke (mm) 0.35 (With indicator light: 0.4) Standard type DC Power consumption (2) M L 0.1 (With indicator light only) With energy saving circuit MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 100 V 0.78 (With indicator light: 0.81) M L 20, 30, 40, 50, 75, 100 125, 150

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Z (Super Compact), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 841 1402 1962 63 OUT 935 1559 2182 IN 1361 2268 3175 80 OUT 1508 2513 3519 IN 2144 3574 5003 100 OUT 2356 3927 5498 Intermediate Strokes Installation of spacer on standard stroke body. Method Model no. Refer to page 4 for standard model no.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Weight reduced by 53% at the maximum Overall length (Z + Stroke) Overall Length (Z) Weight (mm) (kg) Series MY3A MY3B MY1B Series MY3A MY3B MY1B 63 63 40 40 25 25 16 16 320 8.26 240 2.95 150 0.99 110 0.34 356 8.99 276 3.08 178 1.09 122 0.35 460 14.5 340 4.41 220 1.57 160 0.73 At a 100 mm stroke Series Variations Positioning cushion mechanism The uniquely designed piston shape enables reduction

Magnet: D (Built-in), Mounting: R (Front Block), Bore Size: 150 (1 1/2"), Stroke: 0200 (2"), Cushion: w/o Rubber Bumper, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: R (Front Block), Bore Size: 150 (1 1/2"), Stroke: 0100 (1"), Cushion: C (Rubber Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.