Ejector Valve Unit, Series ZYY/ZYX

Nil 0.6m 30 3m 50 5m Example) ZSE1-00-15CN-X129 1pc. ZS-20-5A-50 1pc. 5 Ejector Valve Unit Series ZYY/ZYX How to Set the Pressure How to Use the Connector Internal Circuits and Wiring Examples 1. Installation and removal of connector ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.

CEx-OMQ0010

21 M4x10 LOCK FREE 8-3 () 2 15 0.3MPa 30 [LOCK] 22 8-4 MPa () () mm 40 50 63 80 100 N 882 1370 2160 3430 5390 )15% 23 8-5 (kgf) (kgf) (mm/s) (mm/s) 24

Rotary Table

In the actual setting, adjust them after confirming the auto switch operating condition. 30 - Maintenance and Inspection For most suitable use of rotary table, regular inspection is required according to the operating condition.

MRQB-OM0002

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 1 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 2 , 2 2 2 2 3 , , ,, 4 , , , , , , , , , , , , 5m [] ,, , , , , , , , 5 ,, , , , , , , , , , , , , , 6 , 2 ,40mm, ON ON ON ON , ,: 1000 (ms) (mm) V(mm/s) = <> ,,(ON ) ,5m , ,30m, , <> ,100m <> (D-A96A96V ) ,,( ) [n ,n ] ,, ,, ,D-A90,A90V

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note Conductor resistance /km, 20C (68F) 65 or less 1.5m 3m 5m AXT100-DS25-015 Approx. 10 Cable: 25 cores x 24AWG AXT100-DS25-030 Withstand voltage 1min, VAC 1000 AXT100-DS25-050 L If a commercially available connector is purchased use a MIL-C-24308 standard 25 pin type female connector. Note) The minimum bending radius of the D sub connector cable is 20 mm.

JXCx-OMT0028CN

2.3 . 7 2.4 () . 8 (1) . 8 (2)GW . 8 (3)LEC . 8 (4)GW . 8 (5)GW . 8 (6) . 9 (7) . 9 3 . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGEN1) . 13 (2)DIN (LECGEN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1GW (B RATE) . 15 4.2 (CN2SW) . 16 4.3LEC . 16 4.4GW EtherNet/IP . 22 5. . 26 5.1 CN4 . 26 5.2 CN3 . 26 5.3 CN1CONT . 26 5.4 CN2PC/TB . 27 6.CN4 . 28 1 - 6.1 . 28 6.2 . 29 6.3 . 30

VQ

AXT802-1A-l VG Cable Length Model VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimensions 1.5m 3m 5m VP Mounting direction D U D side mounting U side mounting VQ Note) The number of manifold stations cannot be changed.

Micro-Mist Separator with Prefilter Series AMH

PT/PF thread model I.D.4mm or more, O.o.l0mm or more, length 5m or less NPT thread model 1.0.3/16" or more, 0 .D.3/8" or more, OFluSh piping on the secondary side of AMH . length 200" or less Normally Open: ~ Open and close pipe line before operation to ensure proper connection sealing.

Mounting: B (Through Hole), Bore Size: 32mm, Stroke: 30mm, Option: Standard (Rod End Female Thread), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector With Lead Wire)

Magnet: Built-in, Mounting: Axial Foot, Bore Size: 16mm, Stroke: 30mm, Cylinder Rod Motion: Normally Retracted, Valve Specifications: 24VDC M Plug Connector, Light & Surge Suppressor: None, Auto Switch: Band Mounting, Number: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 10mm, Stroke: 30mm, Cylinder Rod Motion: Normally Retracted, Valve Specifications: 24VDC M Plug Connector, Light & Surge Suppressor: None, Auto Switch: Band Mounting, Number: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 30mm, Cylinder Rod Motion: Normally Retracted, Valve Specifications: 24VDC M Plug Connector, Light & Surge Suppressor: None, Auto Switch: Rail Mounting, Number: -

Magnet: Built-in, Mounting: Front Flange, Bore Size: 16mm, Stroke: 30mm, Cylinder Rod Motion: Normally Retracted, Valve Specifications: 24VDC M Plug Connector, Light & Surge Suppressor: None, Auto Switch: Band Mounting, Number: -

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.7, Support bracket: Through-hole

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.7, Support bracket: Through-hole

Magnet: Built-in, Mounting: Basic Style, Bore Size: 10mm, Stroke: 30mm, Cylinder Rod Motion: Normally Retracted, Valve Specifications: 24VDC M Plug Connector, Light & Surge Suppressor: None, Auto Switch: Rail Mounting, Number: -

Magnet: Built-in, Mounting: Front Flange, Bore Size: 10mm, Stroke: 30mm, Cylinder Rod Motion: Normally Retracted, Valve Specifications: 24VDC M Plug Connector, Light & Surge Suppressor: None, Auto Switch: Rail Mounting, Number: -

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

Electric Actuator/Slider Type

, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 7 15 29 7 17 35 10 22 44 Pushing force lbf [N] Note 3) (Set value: 45 to 90%) Max. speed [mm/s] 900 450 225 1200 600 300 1000 500 250 Pushing speed [mm/s] Note 4) 35 or less 30 or less 30 or less Max. acceleration/deceleration

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.