Smooth Cylinder

) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 5 to 30 5 to 30 5 to 50 5 to 50 12 16 20 25 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-27 5-27 HRX-OM-X010 Chapter 5 System Operation 5.3.25 Maintenance screen 1 POWER ON 1 2 3 Figure 5-28 Maintenance screen 1 Table 5-25 Maintenance screen 1 No.

Compact Manifold Regulator Series ARM5

1/4 3 12.5 19 35.5 8, 5/16 8, 5/16 5 13.5 21 38.5 Note) The O-ring is attached.

Vacuum

Bellows type Bellows type 25 8 31 5.5 3.85 5 8.5 8.7 't9 1 0 5 25 6 1 8 20 29 35 9.9 8.5 '106 IPI $eries Wi[r Bulfen ilimsns Pad Diameters a2. s4 . @6 . @8 Pad Dfameters @10. s13. s16 Flat type Flat type 45 Frs* Flat with rib Deep typezPTloD. 16D only ) r Adaptor plate: Provided as stahdard Flat type 2 2.6 3 5 8 0.8 4 4.8 r 6 3 5 0.8 6 7 2.5 3 5 0.8 2.5 3 6 5 8 1 (sr) Female Th reacl/Weight

CG5-S

GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

Compact Cylinder with Lock Series CLQ

(mm) B 88 98.5 19.5 22.5 78 88.5 A A B 69 78.5 CL CL 20 25 29.5 32.5 79 88.5 5 to 50 5 to 50 5 CU DCZ CX +0.4 +0.2 CW RR B + Stroke G L Bore size (mm) CL+ Stroke 0.1 0.3 CD CX CU CW CZ G L L1 RR S A + Stroke -X 20 25 8 10 12 14 18 20 8 10 16 20 27 31 4.5 5 18.5 22.5 9 10 39.2 43.2 Individual -X Rod end nut Refer to page 832 for details of rod end nuts and accessory brackets.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

R 32 DS5032 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 * Supplied with

LEC-OM07605CN

LEC-MR-BAT6V1SET/ 3[AL. 25 ] 2. 5 3.

MU

5, !6, !7, and !

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

Programless controller Step motor (servo 24 VDC)

LEHS10 LEHS20 LEHS32 LEHS40 speed acceleration speed acceleration speed acceleration speed acceleration [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] 0 5 100 5 100 5 100 5 100 1 7 150 10 150 10 150 10 150 2 10 200 15 200 15 200 15 200 3 12 300 20 300 20 300 20 300 4 15 400 25 400 25 400 25 400 5 20 500 30 500 30 500 30 500 6 25 600 35 600 35 600 35 600 7 30 700 40 700 40 700

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

Guide Cylinder Series MGG

MGZ D-A93 D-M9 D-M9W Less than 50 strokes MGT Less than 55 strokes Operating Range (mm) Auto switch model Auto switch model Bore size (mm) Bore size (mm) 20 7 25 6 32 8 40 8 50 8 63 9 80 100 20 25 32 40 50 63 80 100 D-A9 D-M9/M9W D-H7/H7W D-H7BAL/H7NF D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G5NBL 4 4 4.5 5 6 6.5 5 5.5 5 5.5 6.5 7 D-B7/B80 D-B73C/B80C 7 8.5 9 10 9.5 10.5 8 10 9

MY1

5 !

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

JIS Standard Hydraulic Cylinder

5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

Guide Cylinder/Compact Type Series MGC

(mm) Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 7 25 6 32 8 40 8 50 8 D-A9 D-M9/M9W D-A9 D-M9 D-M9W Note) qBMA2-020 wBJ3-1 Note) qBMA2-025 wBJ3-1 Note) qBMA2-032 wBJ3-1 Note) qBMA2-040 wBJ3-1 Note) qBMA2-050 wBJ3-1 5 5.5 5 5.5 6.5 D-B7/B80 D-B73C/B80C 8 10 9 10 10 D-C7/C80 D-C73C D-C80C D-H7/H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C/C80C D-B5/B64 D-B59W

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm