MXS Series Air Slide Table

12 16 20 25 10,20,30,40,50,75 10,20,30,40,50,75,100 10,20,30,40,50,75,100,125 10,20,30,40,50,75,100,125,150 10,20,30,40,50,75,100,125,150 Stroke adjuster/shock absorber option BS BT With shock absorber at extension end* With shock absorber at retraction end* *Shock absorber option is not available for MXS6 52 Air Slide Table MXS Series Construction/Parts list, Seal list 3 6 8 9 br bs bt bp

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Lubricant Table ttanuf9ctuf's I LuDrrcrm BP THB 32 Castrol Perfecto T32 ESSO/Exxon TERESSO 32 Mobil DTE Lig ht Shell Turbo T32 @ 4 Port Solenoid Yalve NVZlOOO Symbol NVZ1120 A B NVZ1120-OG-t\,ts-F NVZlI2GOG.M5 Model o.2 (90) Spec ifications Air, Inert gases Operating Pressure range 20-1ooPst(1.5Ambient and fluid Max.120'F(50"C) Response time 15 ms or less (atTOPSI) Max.operating 900 cpm

Shock Absorbers and Rate Controls

5 .38 .71 .65 t 1 t.37 .71 .63 .n SLA 9/l6ll Ex.50 stA ir r34 (rR)0rM.35 .5 to .63 tl5 18 lJNt .31 r.55 .tl .63 .18 SlAVl-|6 x-50 5tA 338{7 trRl0Eril.5 .5 .94 .55 V,r . 16 Uflt .43 r.64 .98 .88 ,28 SLAl -l2xl 5ta 33848 (rRloEMt.01.0 1.50 1.80 I,r2 UNt .59 2.88 1.42 1.25 .39 \oles: L To bp used d t r -or D-fio1 -odpl\ ontt 2.

Accepts nylon and urethane tubes, Applicable for both vacuum and positive pressure applications, Release collar allows easy removal of tubing without damaging the tube, Maximum vacuum pressure of 1.0MPa, TUBE CAP, CONNECTORS, KQ2 FITTING, BP, KQ2 1/8, .00009 lb

CJP

Auto switch model Applicable bore size (mm) 23.6 55.0 OUT 39.3 44.5 104 IN 74.2 15 D-90/97 D-90A/93A 53.0 124 OUT 88.3 6, 10, 15 BP-1 OUT IN 6-2-8 3 Series CJP Pin Cylinder Single Acting, Single Return Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-90, D-90A Most sensitive position and operating range of auto switch (a) Operating range Most sensitive

CJP

Auto switch model Applicable bore size (mm) 23.6 55.0 OUT 39.3 44.5 104 IN 74.2 15 D-90/97 D-90A/93A 53.0 124 OUT 88.3 6, 10, 15 BP-1 OUT IN 6-2-8 3 Series CJP Pin Cylinder Single Acting, Single Return Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-90, D-90A Most sensitive position and operating range of auto switch (a) Operating range Most sensitive

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Series BP regulator was designed for general use in a wide variety of applications. Available options include Hastelloy® internals for corrosion resistance, panel installation, and a variety of pressure gauges in psig/bar or MPa units. Operating pressure: 0.5 to 300 psig; Stainless steel or brass construction

Series BP regulator was designed for general use in a wide variety of applications. Available options include Hastelloy® internals for corrosion resistance, panel installation, and a variety of pressure gauges in psig/bar or MPa units.

10 μin. (0.25 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard, Cv: 0.09, Bonnet: BP

Surface Finish: 10 μin. 0.25 μm, Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV8 (1/2 Inch Face Seal, Female), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Option: HF (High Flow, CV: 1.1), Bonnet: BP

COMPACT COMPRESSOR, COMPACT COMPRESSOR, Q38, 3607.40000 lb

ITV

(Error number 5) 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2. S1 OFF ON OFF ON S2 OFF OFF ON ON Preset pressure P01 P02 P03 P04 For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.

Programless Controller Series LECP1

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

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A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

LG1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.