CHKD/CHKG

95 100 105 110 115 120 125 150 175 200 225 250 85 90 95 100 105 110 115 120 125 130 155 180 205 230 255 100 105 110 115 120 125 130 135 140 145 170 195 220 245 270 120 125 130 135 140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 7 5 5 5 3 7.5 5 3 5 3 90 90 5 90 5 A MHZ 20 20 20 20 (3 x SA) 20 20 MHF Section SD SD MHL MHSJ3-63D MHSJ3-80D MHR MHK 4 MHS 10 4 11 MHC 3 5 3 5 90 90 MHT 5 MHY 20 20 20 20 MHW -X (mm) L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5

Dual Rod Cylinder Series CXSJ/CXS

, 100 80 25 20 15 100 10 30 35 40 45 50 60 70 75 80 90 40 35 30 25 20 15 100 10 45 50 60 70 75 80 90 Model CXS10 CXS15 CXSJ 30 40 50 97 92 87 82 102 107 112 117 122 132 142 147 95 90 85 80 75 70 65 100 105 115 125 130 55 45 25 35 45 99 94 89 109 114 119 124 129 139 149 154 104 159 169 179 95 90 85 80 75 70 105 110 120 130 135 100 140 150 160 CXS D-X Individual -X 567 Series CXS Dimensions

Air Cylinder

115 140 165 32 32 36 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 40 41 46 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 Bore size Female Rod End (mm) With Air Cushion With Rod Boot (mm) (mm) ZZ JH JW 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 158 171 183 196 221 246 271 23.5 10.5 25 162 175 187

Rotary Table: High Precision Type

MSUA1-90* P402070-3A MSUA1-180* P402070-3B MSUA3-90* P402090-3A MSUA3-180* P402090-3B MSUA7-90* P402060-3A MSUA7-180* P402060-3B MSUA20-90* P402080-3A MSUA20-180* P402080-3B *None that the rotation angle should not be changed even though the rotary unit has been changed. For maintenance, order units with a part number suitable for the model being used.

KQ2

Principal Parts Material Made to Order (Refer to page 90 for details.)

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.

Air Cylinder Series MB

D-A3 D-G39 D-K39 n (different side) 90 + 100 (n2) n = 2,4,6,8... 125 + 100 (n2) n = 2,4,6,8... n (same side) 1 60 65 75 80 85 90 90 90 2 (different side) 2 (same side) 70 75 80 85 70 75 80 85 70 + 30 (n2) n = 2,4,6,8... 70 + 50 (n2) n = 2,4,6,8... 75 + 30 (n2) n = 2,4,6,8... 80 + 30 (n2) n = 2,4,6,8... 85 + 30 (n2) n = 2,4,6,8... 75 + 50 (n2) n = 2,4,6,8... 80 + 50 (n2) n = 2,4,6,8... 85

A

254 45 90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0 Bracket Symbol Option Nil None D Oil-free Symbol With bracket Size 30 40, 50, 60 70, 80, 90 Nil None V V V B With bracket V V *1 M12 connector without cable (With surge voltage suppressor)*2 All voltages WN *1 Sizes 70 to 90 are not available with a bracket. *1 DC voltage only *2 A cable for the M12 connector is not included with the product.

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

CXS

, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132 142 147 99 94 179 89 109 114 119 124 129 139 149 154 159 169 104 25 35 45 CXS15 55 45 100 105 110 120 130 135 140 150 160 70 75 80 85 90 95 16 Standard Type Dual-Rod Cylinder Series CXS Made

Mechanically Jointed Rodless Cylinder Series MY1

30 60 40 122 25 140 28 MY1B 80 15 22 53 660 61 15 90 690 38 120 40 70 48 155 28 176 35 MY1B100 20 42 69 760 75 20 120 800 Y 2 x d R WX D Bottom ported (Applicable O-ring) Hole Size for Centralized Piping on the Bottom WX Y d D R Applicable O-ring Model 90 45 18 26 1.8 MY1B 80 120 50 18 26 1.8 MY1B100 P22 (Machine the mounting side to the dimensions below.) 968 Series MY1B Mechanically Jointed

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Series KV2 Fittings

Dont use a wrench on push-to-connect end. 2 2 Cut tubing square with a clean 90 edge Dont use excessive tube angle cut which can lead to leakage or breaking. 90 90 3 3 Use SMC Tube Cutters Dont use dikes, a knife, a saw or a dull tool to cut the tubing.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

8, ) Note 1) 1 10 90 100 110 2 Different surfaces 20 90 100 110 Same surface 75 Different surfaces (n = 2, 4, 6, 8, ) Note 1) 20 + 50 (n 2) 2 (n = 4, 8, 12, 16, ) Note 2) 90 + 50 (n 4) 2 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) D-B59W n Same surface 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 50 (n

Air Fittings & Tubing

P.2.1-22 Plug-in elbow Different dia.tee Straight union Used to change by 90 in a tube fetching direction from Onetouch fittings. P.2.1-14 KQ2H KQ2L KQ2T Used to connect tubes with size down in both 90 directions. Used to connect tubes in the same direction.

Cylinder with Lock Series CNS

63 35 14 16 155 23 25 30 M14 x 1.5 Up to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 Up to 1200 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA M MA MM N P Q R S T V VA H ZZ 125 140 160 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 110 440 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 343 95 20

Free Mount Cylinder Series CU

(g) Stroke (mm) Model 40 50 60 70 80 90 100 JIS Symbol Double acting, Spring rod 43 (53) 49 (59) 55 (65) C(D)U6-D 64 (74) 72 (82) 80 (90) C(D)U10-D CUJ 92 (122) 104 (134) 116 (146) C(D)U16-D CU 216 (253) 238 (275) 260 (297) 282 (319) 304 (341) C(D)U20-D CQS Made to Order Specifications (For details, refer to pages 1395 to 1498.) 363 (422) 397 (456) 431 (490) 465 (524) 499 (558) C(D)U25

Table of Contents

(100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1