End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

80 90 75 20 2 Same side 75 55 80 90 Caution 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides D-A44C q Socket wrench should be used when mounting brackets are replaced.

CNA

+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 4, 6, 8, 100+50(n-2) n=2, 4, 6, 8, 110+50(n-2) n=2, 3, 4, 5, 100+100(n-2) 100+100(n-2), n=2, 4, 6, 8, Same 10 90 100 110 With 1 10 75 80 90 Different 20 75 90 90 100 100 110 110 With 1 With 2 With n Same Different 20 55 75 75 80 80 90 90 With 2 With n (n-4) 90+50 2 n=4, 8, 12, 16 (n-4) 100+50 2 n=4, 8, 12, 16 (n-4) 110+50 2 n=4, 8, 12, 16 (n-2)

Electric Actuator

LEFS40 6H9 depth 7 ( ) 0.030 0 (170) Body mounting Note 1) reference plane 60 106 4 x M8 x 1.25 thread depth 13 58 7 6H9 depth 7 ( ) 0.030 0 74 (L) Cable length y 250 A (Table traveling distance) Note 2) 88 [(90)] (3.1) (86) 86 (165) 90 13 Stroke (90) [88] 61 [Origin] Note 4) Origin Note 3) 4 [2] 2 [4] 65 20 67.5 8 20 31 Motor cable (2 x 5) 68 53.8 8 Motor option: With lock (214) M4 x 0.7

CXWM/CXWL

65 90 90 90 90 90 Q 171 221 271 321 371 421 471 521 S 27 52 77 102 127 152 177 202 SS 128 153 178 203 228 253 278 303 Z 155 205 255 305 355 405 455 505 ZZ 199 249 299 349 399 449 499 549 Model CXWL25-25 CXWL25-50 CXWL25-75 CXWL25-100 CXWL25-125 CXWL25-150 CXWL25-175 CXWL25-200 8-26-44 43 Series CXWL Slide Unit: Build-in Shock Absorber Slide Bearing Type 25 With End Lock: CXWL25Stroke/25

Compressed Air Cleaning Filter Series

x 90 x 204 122 x 122 x 259 160 x 160 x 311 63 x 63 x 158 76 x 76 x 172 90 x 90 x 204 106 x 106 x 225 122 x 122 x 259 160 x 160 x 311 76 x 76 x 103 90 x 90 x 132 106 x 106 x 151 122 x 122 x 187 160 x 160 x 291 AFF6 AFF22 AFF37 AFF55 AM200 AM300 AM400 AM500 AM600 AMD100 AMD200 AMD300 AMD400 AMD500 AMD600 AMF200 AMF300 AMF400 AMF500 AMF600 100 x 100 x 253 150 x 140 x 446 200 x 170 x 526 280

CL

90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18 18 14 20 20 80 90 105 130 150 190 212 236 42 50 59 76 92 100 112 118 100 110 130 160 180 230 255 275 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

KJ

Use to change by 90 in a tube fetching direction from Onetouch fittings. MS Use to branch line in the same direction.

Air Cylinder Series CM2

D-X Individual -X Technical data 145 Series CM2 Single Clevis CX Z + Stroke CD B 90 A 51 40 3.2 6.8 20.5 40 57 LX LZ 6.8 x 3.4 7.5 Rotation Angle (mm) LX LZ Mounting Part no.

Cylinder with Lock Series CLS

59 16 107 58 110 M14 x 1.5 15 65 19 Up to 1000 3 30 14 47 78 43 31 50 161 18 110 146 1/4 128 28 17 36 36 90 59 16 114 64 110 M14 x 1.5 15 75 19 Up to 1200 5 46 14 56 53 182 95 23 132 169 1/4 144 32 20 40 40 90 59 43 18.5 130 74 120 17 36 80 22 M16 x 1.5 +0.100 0 Up to 1200 118 30 16 5 63 60 204 106 36 167 195 3/8 162 40 23 50 45 115 70 48 17 18.5 149 86 135 20 41 90 26 M18 x 1.5 +0.100

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

CV/MVGQ

n = 2, 4, 6, 8 15 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16, 110 + 50 (n 4) 2 Different sides n 75 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 90 100 110 20 90 100 110 75 90 100 110 10 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4

C95

115 135 165 45 60 70 80 20 20 25 25 245 280 300 330 16 18 22 26 25 30 30 40 Max. 157 Min. 30 275 315 335 375 130 170 170 200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250

C95

115 135 165 45 60 70 80 20 20 25 25 245 280 300 330 16 18 22 26 25 30 30 40 Max. 157 Min. 30 275 315 335 375 130 170 170 200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 199 242 257 289 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 125 160 200 250

High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

CLS

As a guide, it should be turned about 90 past the point at which tightening can be felt. 9-9-23

Step Motor Controller

or less (No condensation) 14 to 140F (10 to 60C) (No freezing) 90 or less (No condensation) Between the housing (radiation fin) and SG terminal 50 (500 VDC) 0.29 lbs (130 g) Note 1) Do not use the power supply of inrush current prevention type for the controller input power supply.

Hydraulic Filters

90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685

CS1

14 36 43 29 32 25 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 50 47 75 15 31 161 128 M14 X .5 36 90 43 14 16 32 17 59 35 36 28 to 1000 3/4 M36 X 1.5 56 53 80 36 18.5 17 182 144 M16 X 1.5 20 40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube M45 X 1.5 60 63 90 115 18.5 46 20 226 182 M20 X 1.5