Compact Hydraulic Cylinder

Example) CQ-M5x55L 4 pcs. Mounting bolt CHQ CHQ C D CHK Model C D Mounting bolt part no. Model C D Mounting bolt part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Dealing with intermediate stroke by the 1 mm interval is available by using spacer with standard stroke cylinder. 12 16 20 25 32 40 50 63 80 100 CQ-D012 CQ-D016 CQ-D020 CQ-D025 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-F012 CQ-F016 CQ-F020 CQ-F025 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQ-L012 CQ-L016 CQ-L020 CQ-L025 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 Description

Compact Cylinder with Air Cushion Series RQ

CQ-L040 CQ-L050 CQS-F020 F9B F9BV J79 F7BV 12V CQS-D025 CQS-F025 2 wire Solid state switch Connector J79C CQ-D032 CQ-F032 CQ-D040 CQ-F040 3 wire (NPN) Relay, PLC F7NWV F9NW F9NWV F79W Yes 24V Diagnostic indication (2 color indicator) CQ-D050 CQ-F050 5V, 12V IC circuit 3 wire (PNP) Note 3) When ordering foot brackets, order 2 pieces per cylinder.

CE

CQ-D012 CQ-F012 Open collector (24 VDC, 40 mA) Output type CE2 CQ-L020 CQ-D020 CQ-F020 A/B phase difference output Output signal CQ-L032 CQ-D032 CQ-F032 500 VDC, 50 M or more (between case and 12E) Insulation resistance ML2B CQ-L040 CQ-D040 CQ-F040 33.3 Hz, 6.8 G 2 hrs. each in X, Y directions 4 hrs. in Z direction based upon JIS D 1601 Vibration resistance CQ-L050 CQ-D050 CQ-F050 C J G5

Stroke Reading Cylinder and Counter

CQ-D032 50 M or more (500 VDC measured via megohmmeter) (between case and 12E) Insulation resistance CQ-L040 CQ-F040 CQ-D040 CQ-L050 CQ-F050 CQ-D050 33.3 Hz, 6.8 G 2 hrs. each in X, Y directions 4 hrs. in Z direction based upon JIS D 1601 Vibration resistance CQ-L063 CQ-F063 CQ-D063 Note 1) When ordering the foot bracket, order 2 pcs. per cylinder.

CHKD/CHKG

Mounting bolt Example) CQ-M5x55L 4 pcs.

Compact Cylinder with Air Cushion

IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 20 Note 1) Note 3) Bore size (mm) Foot Flange Double clevis 25 CQS-D020 CQS-D025 CQ-D032 CQ-D040 CQ-D050 CQ-D060 CQ-D080 CQ-D100 CQS-F020 CQS-F025 CQ-F032 CQ-F040 CQ-F050 CQ-F060 CQ-F080 CQ-F100 CQS-L020 CQS-L025 CQ-L032 CQ-L040 CQ-L050 CQ-L060 CQ-L080 CQ-L100 20 25 32 40 50 63 80 100 32 40 50 Note 1) When ordering foot brackets, order

CE

CQ-D012 CQ-F012 Open collector (24 VDC, 40 mA) Output type CE2 CQ-L020 CQ-D020 CQ-F020 A/B phase difference output Output signal CQ-L032 CQ-D032 CQ-F032 500 VDC, 50 M or more (between case and 12E) Insulation resistance ML2B CQ-L040 CQ-D040 CQ-F040 33.3 Hz, 6.8 G 2 hrs. each in X, Y directions 4 hrs. in Z direction based upon JIS D 1601 Vibration resistance CQ-L050 CQ-D050 CQ-F050 C J G5

CE

CQ-D012 CQ-F012 Open collector (24 VDC, 40 mA) Output type CE2 CQ-L020 CQ-D020 CQ-F020 A/B phase difference output Output signal CQ-L032 CQ-D032 CQ-F032 500 VDC, 50 M or more (between case and 12E) Insulation resistance ML2B CQ-L040 CQ-D040 CQ-F040 33.3 Hz, 6.8 G 2 hrs. each in X, Y directions 4 hrs. in Z direction based upon JIS D 1601 Vibration resistance CQ-L050 CQ-D050 CQ-F050 C J G5

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) Foot (1) Flange (3) 50 CQ2X50-PS Double clevis 63 DCQ2X63-PS Gasket: 1 pc. 32 40 50 63 80 100 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 80 CQ2X80-PS Grease pack (10 g): 1 pc. -X 100 CQ2X100-PS Pneumatic Circuit 2.

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

CE

Magnetic resistance 145 gauss Power supply 12 to 24VDC (10%) (power supply ripple: 1% or less) Current consumption 40mA Foot Flange Bore size (mm) Double clevis Resolution 0.1mm/pulse 12 20 32 40 50 63 CQ-L012 CQ-D012 CQ-F012 Accuracy 0.2mm Note 1) CQ-L020 CQ-D020 CQ-F020 Output type Open collector (24VDC, 40mA) CQ-L032 CQ-D032 CQ-F032 Output signal A/B phase difference output CQ-L040 CQ-D040

Smooth Cylinder/Low Speed Cylinder

RZQ 63 CQ2X63-PS Gasket: 1 pc. (3) Bore size (mm) Foot (1) Compact foot 32 40 50 63 80 100 Flange Double clevis 80 CQ2X80-PS Grease pack (10 g): 1 pc. 100 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQ-LC032 CQ-LC040 CQ-LC050 CQ-LC063 CQ-LC080 CQ-LC100 CQ2X100-PS 2.

COQ2BP

Foot , u Flange Clevis Moun~ 50 CQ-L050 CQ-F050 CQ0050 f~ ",,~~.~ 50 25, 30, 35, 40, 45, 50, 75, 100 ..63 CQ-L063 CQ-F063 CQ0063 63 25. 30. 35, 40, 45, 50, 75, 100 . 60 " CO-LOBO CO-FOeD CO-DOSO Notes. If foot bracket is required, order 2 pcsIcylinder.

High Vacuum Slit Valve

Application Remarks Receptacle plug XGT0402-9-12S (For XGT31-50336-C) C016 30D006 100 12 (AMP) 11 - 6Maintenance Please refer to valve maintenance procedure in the attached documents. 7Troubleshooting Condition Assumed cause Countermeasure Gate Internal leakage Operating pressure is low Pressure should be 0.45MPa or more.

MQQ

Foot (1) Flange Double clevis Bore size (mm) Rod end thread adapter (With nut) 10 CQS-L016 CQS-F016 CQS-D016 MQ10-M 16 CQS-L020 CQS-F020 CQS-D020 MQ16-M 20 CQS-L025 CQS-F025 CQS-D025 MQ20-M 25 CQ-L032 CQ-F032 CQ-D032 MQ25-M 28 CQ-L040 CQ-F040 CQ-D040 MQ28-M Note 1) When ordering foot bracket, order 2 pieces per cylinder.

Parallel Seal Type Slit Valve

Auto switch and the connector Parallel seal type slit valve Symbol Auto switch Connector Nil A Lead wire: 0.5m Multiple connector(AMP) *C016 30D006 100 12 made by AMP is recommended for the connector (female type) C D-A93 (2pcs) D-sub connector *CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD. is recommended for the connector (female type). F 5 - 3.

MQQ

Foot (1) Flange Double clevis Bore size (mm) Rod end thread adapter (With nut) 10 MQ10-M CQS-L016 CQS-F016 CQS-D016 16 MQ16-M CQS-L020 CQS-F020 CQS-D020 20 MQ20-M CQS-L025 CQS-F025 CQS-D025 25 MQ25-M CQ-L032 CQ-F032 CQ-D032 28 MQ28-M CQ-L040 CQ-F040 CQ-D040 Note 1) When ordering foot bracket, order 2 pieces per cylinder.

MQQ

Mounting Bracket Part Numbers Foot Note 1) Double clevis Bore size (mm) Rod end thread adapter (with nut) Flange MQ10-M CQS-L016 CQS-D016 10 CQS-F016 MQ16-M CQS-L020 CQS-D020 16 CQS-F020 MQ20-M CQS-L025 CQS-D025 20 CQS-F025 MQ25-M CQ-L032 CQ-D032 25 CQ-F032 MQ28-M CQ-L040 CQ-D040 28 CQ-F040 Note 1) When ordering foot brackets, order 2 pcs. for each cylinder.

Stopper Cylinder

. *1RSQB12-10m 5 45 CQ-M3X45L RSQB16-10m 7.5 55 CQ-M3X55L -15m 60 X60L RSQB20-10m 7 Example) CQ-M3X55L 2 pcs. 55 CQ-M5X55L -15m 60 X60L -20m 65 X65L RSQB32-10m 9 Mounting bolt 60 CQ-M5X60L -15m 65 X65L -20m 70 X70L RSQB40-20m 9.5 C D 75 CQ-M5X75L -25m 80 CQ-M5X80L -30m 85 X85L RSQB50-20m 9 75 CQ-M6X75L -25m 80 X80L -30m 85 X85L *1 Be sure to use the attached flat washers when mounting 12