Magnet Type: Built-in Strong Magnet w/Magnetic Field Resistant Auto Switch, Clevis: 19.5mm, Bore: 50mm, Thread: Rc1/4, Stroke: 50mm, End Bracket: Double Knuckle Joint, M6 w/o Tap, Option: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet Type: Built-in Strong Magnet w/Magnetic Field Resistant Auto Switch, Clevis: 16.5mm, Bore: 40mm, Thread: Rc1/4, Stroke: 50mm, End Bracket: Double Knuckle Joint, M6 w/o Tap, Option: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet Type: w/o Magnet, Clevis: 16.5mm, Bore: 40mm, Thread: Rc1/4, Stroke: 50mm, End Bracket: Y [Double Knuckle Joint (M6 w/o Tap)], Option: -, Auto Switch: -, Lead Wire: -, Number: -

Magnet Type: w/o Magnet, Clevis: 16.5mm, Bore: 50mm, Thread: Rc1/4, Stroke: 50mm, End Bracket: Y [Double Knuckle Joint (M6 w/o Tap)], Option: -, Auto Switch: -, Lead Wire: -, Number: -

Magnet Type: w/o Magnet, Clevis: 16.5mm, Bore: 63mm, Thread: Rc1/4, Stroke: 50mm, End Bracket: Y [Double Knuckle Joint (M6 w/o Tap)], Option: -, Auto Switch: -, Lead Wire: -, Number: -

Magnet Type: w/o Magnet, Clevis: 19.5mm, Bore: 40mm, Thread: Rc1/4, Stroke: 50mm, End Bracket: Y [Double Knuckle Joint (M6 w/o Tap)], Option: -, Auto Switch: -, Lead Wire: -, Number: -

Magnet Type: w/o Magnet, Clevis: 19.5mm, Bore: 50mm, Thread: Rc1/4, Stroke: 50mm, End Bracket: Y [Double Knuckle Joint (M6 w/o Tap)], Option: -, Auto Switch: -, Lead Wire: -, Number: -

Magnet Type: w/o Magnet, Clevis: 19.5mm, Bore: 63mm, Thread: Rc1/4, Stroke: 50mm, End Bracket: Y [Double Knuckle Joint (M6 w/o Tap)], Option: -, Auto Switch: -, Lead Wire: -, Number: -

Magnet Type: w/o Magnet, Clevis: 16.5mm, Bore: 50mm, Thread: NPT1/4, Stroke: 50mm, End Bracket: Y [Double Knuckle Joint (M6 w/o Tap)], Option: -, Auto Switch: -, Lead Wire: -, Number: -

Table of Contents

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

Micro Mechanical Valve Series VM1000

3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

ZP

ZP80H ZPA-X201-B P. 76 ZP100HB ZP125HB ZP100H ZP125H ZPA-X301-B P. 76 Buffer Assembly Part No.

Electric Actuators

H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.

&snac

i O N : S , P S ) f i t t i n s i n g u s e p u r s i n s o f t u b e a T u b e s i z e w i t h o n e t o u c h ( o p t i o n P , P 5 ) f o r p u r g p l e a s e r e f e r t o P . ?

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

Battery-less

3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5351 (A) 4 (B) 2 VQ5350 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5451 VQ5450 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5551 (A) 4 (B) 2 VQ5550 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3 Description Material Note No