MXS Series Air Slide Table

7 2 38 12 6.6 11 12 A B 34 16 34 16 H Cross section AA Cross section BB (NN-1) X H G (mm) Note) Refer to "Dimensions" of MXS25 on P. 64 for one with shock absorber as symmetric.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

OMR0032

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

Thermo-con/Rack Mount Type

Signal contents N 100-240 VAC L 100-240 VAC E PE 8 7 6 5 4 3 2 Pin no. Signal contents 1-2 Unused 3 Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 1 2.

CLA

With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..

Cylinder with Lock Series CLS

< 0.4 MPa 0.3 MPa P < 0.4 MPa 4000 1000 900 3000 250 800 250 700 2000 600 200 200 CLJ2 500 180 Load mass: m (kg) Load mass: m (kg) 180 1000 160 700 800 900 400 CLM2 140 160 600 125 300 CLG1 500 140 400 CL1 125 300 200 200 MLGC CNG 100 500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph 6 Graph 3 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa

Modular F.R.L. Units

Optional/Semi-standard specifications N.C.: Gray N.O.: Black B B B B B Dimensions Width across flats 14 1/8 Barb fitting Applicable tubing: T0604 Width across flats 17 1/4 M5 x 0.8 Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Model Standard specifications Optional specifications Bracket mount With auto drain B 104.9 156.8 186.9 188.9 A 40 53 70 75 P 1/8,

Manifold Specifications

Series VZ3000/Body Ported Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions, and refer to p.3.8-2 for precautions on series CB. 75 20 80 90 2 Same side 100 100 100 100 D-A3C D-G39C D-K39C 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides n 100+100(n2) Same side 100+100(n2), n=2, 4, 6, 8, n=2, 3, 4, 5, 10 80 75 90 1 Replacement Dif. sides

CNG

2 2 MNB 1 1 CNA 0.5 100 500 400 300 200 100 0.5 500 400 300 200 1000 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 200 200 CLQ 100 100 40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

One-touch fitting) (Pitch) P=12.5 19.5 2n-M5 0.8 (A, B port) Q 1 2n-One-touch fitting (A, B port) (Pitch) P=12.5 19.5 5 Q B B 15 1 29.8 A A 5 B B Q 15 29.5 A A (Non-locking) Manual override L1 Q L2 4 Manual override (Pitch) P=12.5 14.5 (Non-locking) Q 24.5 (Mounting holes) 64.3 47.3 45.5 35.3 Q 10 16 4.5 33.5 16.5 63.3 1 17 7.5 36.5 MAX.5 P A A A A A A 10 P Q 31.5 B B B B B

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions, and refer to p.3.4-2 for precautions on series CB. 75 20 80 90 2 Same side 100 100 100 100 D-A3C D-G39C D-K39C 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides n 100+100(n2) Same side 100+100(n2), n=2, 4, 6, 8, n=2, 3, 4, 5, 90 10 80 75 1 Replacement Dif. sides

LECA6_C

CN1(P.18) 4.2 CN2CN3: LE-CA-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O (P.27) 6.3 (P.24) 17 - 5.

PFxx-OMA1007

-B Temperature Accuracy (reference value) Models A B AMS20 5 L/min 500 L/min AMS30 10 L/min 1000 L/min AMS40 20 L/min 2000 L/min AMS60 40 L/min 4000 L/min -134No.PF-OMA1007-B Dimensions Standby E/P regulator type NC Specification AMS20/30/40/60A-R/N/F#C Part number P A B C D E J M L AMS20A-#C 1/8 1/4 274.3 214.7 81.7 134.4 25.6 46.2 24 40.1 AMS30A-#C 1/4 3/8 291.8 214.7 87.9 134.4 29.1

Air Slide Table

(The part number has a P suffix.) Metal Stopper Table Extension stroke end Retraction stroke end C D M B B E M P A C F Metal stopper only M G A D A MXQA-A38 Model Adjuster part no.

125

] 1(P) 2(A) 2(A) 1(P) 3(R) 2(A) 2(A) 3(R) Air operated Model Port size (External/ Internal) Pilot solenoid C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b VEX312-01 1/8 2.4 0.19 2.4 0.31 2.3 0.36 2.5 0.22 0.1 0.2 VEX312-02 1/4 3.5 0.35 3.3 0.49 3.1 0.46 3.5 0.33 0.1 0.2 VEX332-02 1/4 4.1 0.36 4.3 0.42 4.1 0.41 4.6 0.25 0.3 0.4 VEX332-03 3/8 8.7 0.29 7.9 0.52 7.8

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.