Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

Air Slide Table Series MXS

D-X Individual -X 73 Series MXS Construction y u i o w e !8 !9 !5 !7 q !1 !0 !6 !2 !3 !

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

machined on the flange for E.

21

2 i e @ A @ C @ B Boss-cut Clevis integrated Note No.

One-touch Fittings

E Bulkhead union Bulkhead connector LE Bulkhead male elbow N Adapter Applicable tubing O.D. Spare Parts Symbol Size 02 2 23 3.2 04 4 06 6 08 8 10 10 12 12 16 16 Use the part number below to order the gasket for M3, M5, and M6 threads.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

[Torque: 0.1 Nm or less] Push-turn locking lever type [Type E] While pressing, turn in the direction of the arrow. If it is not turned, it can be operated in the same way as the non-locking push type. Locked position PUSH LOCK Caution When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.

RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Compact Cylinder

4 y e q !3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

D. P. Lube (Unit) Series ALD(U)600/900

3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

5 Port Solenoid Valve Series VQZ1000/2000/3000

143.5 21 135.5 13 185.5 175 154 16 146 14 198 187.5 164.5 17 156.5 15 210.5 200 175 18 167 16 223 212.5 185.5 19 177.5 17 235.5 225 196 20 188 18 248 237.5 206.5 21 198.5 19 248 237.5 217 15.5 209 20 260.5 250 227.5 16.5 219.5 L1 L2 L3 L4 L5 73 62.5 38.5 17.5 30.5 927 Series VQZ1000/2000/3000 Dimensions: VQZ2000 VV5QZ22C Stations U side D side One-touch fitting [4(A), 2(B) port] Applicable

CG5-S

Stainless steel used for improved corrosion resistance Operating range Centre of Sphere Stainless steel (SUS304) e 5 g n a r U U Centre axis g n ti a r 5 e p O Cylinder connection threads Spherical rotation No leakage of water, etc., from the threads into the interior.

3 Position Cylinder Series RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Refrigerated Air Dryer

B AT IDF IDU IDF FS C IDFA IDFA F IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868

Refrigerated Air Dryer

IDFB22E, 37E-N A C AD48N-8Z-X2110 E AMF The AD48-8-X2110 auto drain, insulator, and onetouch fitting are included. Power cable outlet 0.7 [17 mm] (Wire diameter 0.4 [9 to 11 mm]) IDFB6E to 15E-11 IDF-S0086 ZFC F One-touch fitting (KQ2H1002AS) is not included.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Switch (when equipped with switch) Internal pilot manifold L: Dimensions n : Stations (n1 + n2) External pilot manifold L: Dimensions n : Stations (n1 + n2) L n 4 160.5 150 129 16 L n 4 173 162.5 139.5 17 2 135.5 125 108 14 3 148 137.5 118.5 15 5 173 162.5 139.5 17 6 185.5 175 150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 9 210.5 200 181.5 14.5 10 223 212.5 192 15.5 2 148 137.5 118.5

Refrigerated Thermo-chiller

P S O E N L C Breaker handle Display panel Cooling fan for the unit inside (exhaust) Power cable entry 85 mm or less 55 mm or less A B D Circulating fluid fill port REMOTE START/STOP RUN ALARM RESET Handle SEL Model no. label ENT Handle Ventilation (expiration) E S O L C SMC N E P O Circulating fluid return inlet Rc 3/4 (with plug) Circulating fluid level gauge Facility water outlet Refrigerant

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !