VFR

Wiring Applicable valve model VFR40-F VFR41-D VFR41-E VFR44-G, VFR44-E VFR44-T, VFR44-D Collection rate of drainage and oil mist: 99.9% or more.

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

Basic type / Direct mount type Series CY3B/CY3R

9 #4 #8 E @4 r @7 @5 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

Compact Cylinder Series CQS

Basic style (Through-hole/Both ends tapped common): CQSKW/CDQSKW 12 16 Auto switch Minimum lead wire bending radius 10 2 x 2 x OB counterbore H thread effective depth C F Q Width across flats K1 2 x M5 x 0.8 2 x 2 x OA effective depth RA Width across flats K2 I SMC T D M E SMC 2 x N through M E RB RB 5 Flat washer 2 pcs.

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

VZ100/300/500

port R port P , E port R port Electrical entry Note) VZ52R is for manifold only.

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

13

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

VZ3000

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 8 7.

LEC-OM07605CN

(3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Air Cylinder Series MB

Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,

Smooth Cylinder

Contents 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25-PS Note 1) Intermediate strokes not listed above are also available. Note 2) Consult SMC for strokes outside the above ranges. Note 3) As the stroke increases, more sliding resistance may result due to the deflection of the piston rod and other factors.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 Bore (mm) 20 25 32 40 12.5 81 93 106 131 156 25 37.5 50 75 100 68 17 35 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 17 35 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 17 35 12.5 90 102 115 140 165 190 25 37.5 50 75 100 125 77 19