2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.

High Vacuum Angle Valve, XL Series

P.4 to P.7 XLAV (With solenoid valve) Particulate free completely cleaned Bellows Seal 105 to 10-6 10-10 10-11 2 XLC Double acting P.8 to P.11 XLCV (With solenoid valve) Manual Electromagnetic Air operated XLF Single acting (N.C.)

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

XL

P.4 to P.7 XLAV (With solenoid valve) Particulate free completely cleaned Bellows Seal 105 to 10-6 10-10 10-11 2 XLC Double acting P.8 to P.11 XLCV (With solenoid valve) Manual Electromagnetic Air operated XLF Single acting (N.C.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

0.23mm2 R 3 1 P Indicator light Applicable cord O.D. 3.5 to 7 90.5 83 : AC R 3 1 P M plug connector (M) 300 (Lead wire) 92 80(81) 77(78) Indicator light Cover dia 1.5 Cross section 0.23mm2 66(71) R 3 1 P : AC Dimensins n: Station (Max.20) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350 360.5 20 330 340 362.5 373

Electric Actuator Miniature Rod Type Miniature Slide table Type

/See 2.1 Specifications on p.9 /See 3.1 Specifications on p.12 Use within specification range. 3) Load/resistance more than /See 2.1 Specifications on p.9 specified range is being applied /See 3.1 Specifications on p.12 to the actuator.

NCA1

Note 2) Refer to p.5.3-5 for lead wire length.

Hydraulic Cylinders

x 100l 115 x 115l 50 (M) 100 50 (M) M5 x 55l 140 CHKDB25 x 140l 75 (M) 55 5 (M) x 60l 165 x 165l 100 (M) 60 10 (M) x 65l 75 CHKDB63 M12 x 75l 5 (M) 65 15 (M) x 70l 80 x 80l 10 (M) 70 20 (M) x 75l 85 x 85l 15 (M) 75 25 (M) 10.4 x 80l 90 x 90l 20 (M) 80 30 (M) x 85l 95 x 95l 25 (M) 85 35 (M) x 90l 100 x 100l 30 (M) 90 40 (M) 16 x 95l 105 x 105l 35 (M) 95 45 (M) x 100l 110 x 110l 40 (M) 100

Rotary Table/Rack & Pinion Style Series MSQ

D DE 2 x JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2 x P BG AX DG Front port (Plugged with a hexagon socket head set screw when end ports are used.) SF AV AU BB (Max. approx.

MGC

Refer to p.0-44 to 0-46 for common precautions of auto switch.

AC Servo Motor Driver (CC-Link Type ）

` p 0 0 0 1 1 SOH DC1 !

Series AP500

Refer to gauge guide (P.94).

Rotary Table/

P-80 (D) 2nd printing April, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

e

P Cable length is selectable from 1 m, 3 m and 5 m. P Improvement in the maximum operating temperature from 40C to 50C (Actuator unit only) P Mounting method can be selected among 3 types.

Compact Guide Cylinder End Lock Type SeriesMGP

P P P Lock position Z80 P P H R Rear lock Front lock Y59A Y69A P p P Manual release Y7PV Y7P P P p N L Non-locking type Locking type Y59B Y69B P p P Solid state switch Y7NW Y7NWV P P p Y7PW Y7PWV P P p Y7BW Y7BWV P P p Y7BA P p Lead wire symbols 0.5m . Nil (Example) Y69B 3m . L Y69BL 5m . Z Y69BZ Solid state switches marked with a "p" are produced upon receipt of order.

Compact Cylinder/Guide Rod Type Series CQM

25 30 35 40 45 50 75 -100 CQMB6310 15 20 25 30 35 40 45 50 75 -100 CQMB8010 15 20 25 30 35 40 45 50 75 -100 CQMB10010 15 20 25 30 35 40 45 50 75 -100 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 30 35 40 45 50 55 60 65 70 75 110 135 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 M8 x 50L x 55L x 60L x

Compact Cylinder with Air Cushion

P-80 (YG) 2nd printing June, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1209, 1210 P. 1204 to 1206 P. 1204 to 1206 P. 1207, 1208 P. 1211, 1212 Buffer stroke Pad dia. 40 50 63 80 100 125 Buffer stroke (mm) 25 50 75 100 Pad Material and Characteristics Characteristics Base resistance Acid resistance Weatherability Ozone resistance Abrasion resistance Waterproof Solvent resistance (Benzene, toluene) Oil resistance benzol Oil resistance gasoline Operating temperature