XL Holding voltage is 25% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.)
of P port and R port. 1/8 4-4-12 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Type 20 Manifold: Top Ported/SS3YJ3-20Stations -00 (-F) [ ] for AC Grommet (G) 3.5 L2 (6) (2.5) (17.3) 10 (21.5) V100 M3 x 0.5 (Bracket mounting screw) 2-3.5 (For mounting) SY SYJ (Pitch) P=10.5 12.5 41.5 M3 x 0.5 (A port) 5 5 VK 2 (2.5) 1.9 10 5 10 5 VZ 12.7 R P P 26.4 21 25 48.6 [50.8] VT R
Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080
A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture
25 25 1 l/min (ANR) {In the case of Inlet air pressure 0.7 MPa} Bracket Assembly (Accessory) Part No.
52 14 21 13 M12 x 1.75 10 22 48 M22 x 1.5 80 +0.084 0 0.1 0.3 25 35.5 100 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 58 M26 x 1.5 Bore size (mm) N P RR S U H Z ZZ 27 1/4 10 84 16 51 165 175 40 50 30 3/8 12 90 19 58 183 195 63 31 3/8 16 98 23 58 196 212 80 37 1/2 20 116 28 71 235 255 100 40 1/2 25 126 36 72 256 281 Double Clevis Style: CA2YD 2 x P (Rc, NPT, G) 4 x J Rod dia.: CDd9 Hole
IA8X 1 y ZPR400 40 43 29 42.5 G H G I H 15 79.5 10 ,p mm Applicable tube ZPR25D 25 28 20 35 48~ 636 25 89.5 .6 AppHcabfe'l\Jbe O.D Q R ~S Appllcabfe tube (mm) I 24.3 16.8 6 12.8 A:PPlicab~ )iJ~ 0.0 ;P Q R _ .SI 8 . 2$.,2,; 18.7 . 15.2 . 8 ;' 4 23.3 15.8 1 0.4 .6 6 24.3 '16.8 12.8 I ~8 8 26.2 18.7 15.2 18 Vacuum Entry HorizC?"
Q Note) CE-compliant Note) DIN terminal D only for 100 VDC XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve (Bellows pressure balance, 2-stage voltage switching type) Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 5 100 VAC 200 VAC 24 VDC Control power supply P With control power supply Note) There are no CE-compliant
) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable pad form Connection/Thread dia.
VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.
3/8 3/8 1/2 1/2 15 18 25 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 84 90 98 116 126 94 100 108 126 136 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 Double Clevis Style: CA2DQ 2-P (Rc, NPT, G) 4-J Shaft diameter: CDd9 Hole diameter: CDH10 MM Width across flats KA G G D E Width across flats B1
28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C
Press MANUAL button ( ) once for sizing operation (speed, sizing amount are specified values) P P MOVE Test P P P Return to ORIG Compatible Compatible P Operation of the specified step data P P Test drive Compatible Compatible (Continuous operation) P Forced output Compatible ON/OFF of the output terminal can be tested.
= 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner D side mounting
Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3
CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41
25 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) D-A59W n (Same surface) 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 2 (Different surfaces, same surface) 15 25 25 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) n (Same surface) 10 25 25 1 2 (Different surfaces, same surface)
Model How to Order / Specifications P. 14, 15 Cooling Capacity / Pump Capacity / Facility Water Required Flow Rate P. 16, 17 Dimensions P. 18 to 21 Piping Connection and Installation Dimensions P. 22, 23 Operation Panel Display P. 24 Alarm P. 24 Contact Input/Output Function P. 25 Other Features P. 25 Options With Casters P. 26 With Ground Fault Circuit Interrupter P. 26 With Communications